Configuration and Specification of Perkin-Elmer 4480 sputtering process system:
| Items |
Perkin-Elmer 4450 uhv sputtering system |
||
| Basic System |
|
||
| Cathode Shape | Delta | ||
| Cathode Size | Delta | ||
| Cathode Port Amount | 1 to 3 | ||
| Cathode/Sputter Type | DC Magnetron (RF Magnetron, RF Diode, Pulse DC are optional) | ||
| DC Power Supply | 1-10 KW | ||
| RF Power Supply | 1-3 KW | ||
| Process Gases | Argon (200 SCCM) Standard, Up to 3 gas lines, MFC customized. | ||
Configuration and Specification of Perkin-Elmer 4450 uhv sputtering system:
| Items |
Perkin-Elmer 4450 uhv sputtering system |
||
| Basic System |
|
||
| Cathode Shape | Delta | ||
| Cathode Size | Delta | ||
| Cathode Port Amount | 1 to 3 | ||
| Cathode/Sputter Type | DC Magnetron (RF Magnetron, RF Diode, Pulse DC are optional) | ||
| DC Power Supply | 1-10 KW | ||
| RF Power Supply | 1-3 KW | ||
| Process Gases | Argon (200 SCCM) Standard, Up to 3 gas lines, MFC customized. | ||
Configuration and Specification of Perkin-Elmer 4410 plasma sputtering systems: Delta Cathode, up to 3 cathodes, Cyropump, up to 3 process gases, Upgrated
Configuration and Specification of Perkin-Elmer 4400 vacuum deposition systems:
| Items |
Perkin-Elmer 4400 |
||
| Basic System |
|
||
| Cathode Shape | Circular | ||
| Cathode Size | 8 inch | ||
| Cathode Port Amount | 1 to 4 | ||
| Cathode/Sputter Type | RF Magnetron (DC Magnetron, RF Diode, Pulse DC are optional) | ||
| DC Power Supply | 1-5 KW | ||
| RF Power Supply | 1-2 KW | ||
| Process Gases | Argon (200 SCCM) Standard, Up to 3 gas lines, MFC customized. | ||
…
Utilities and Dimension of PE 4450 thin film coatings: Rear-mounted electrical, water, gas and LN2 inlet panel,DC or RF power supply,Vacuum system,panels
Utilities and Dimension of PE 4410 sputtering deposition:Rear-mounted electrical, water,gas and LN2 inlet panel,Power distribution box,switch panel,manifold
Vacuum Systems for the process chamber and loadlock of Perkin-Elmer 4450: 2 stage Cryopump with 1000 l/s pumping speed ,Chamber base pressure: 5X10-7 Torr.
Vacuum Systems for Perkin-Elmer 4450: 2 stage Cryopump with 1000 l/s pumping speed for air, including chevron, water-cooled compressor and lines, automatic regeneration controller and plumbing kit
Vacuum Systems for the process chamber and loadlock of Perkin-Elmer 4410:2 stage Cryopump with 1000 l/s pumping speed for air, including chevron,compressor
Perkin-Elmer 4400 vacuum:2 stage Cryopump with 1000 l/s pumping speed for air, including chevron, water-cooled compressor ,automatic regeneration controller
Loadlock of Perkin Elmer 4480,30" x 28" x 8" stainless steel load lock chamber with aluminum cover,23" diameter molybdenum annular substrate pallet
Loadlock of Perkin Elmer 4450,30" x 28" x 8" stainless steel load lock chamber with aluminum cover, 2" air-operated roughing isolation valve -Allwin21 Corp.
Loadlock of Perkin Elmer 4410, 30" x 28" x 8" stainless steel load lock chamber with aluminum cover,Air-operated vent valve -Allwin21 Corp.
Loadlock of Perkin Elmer 4400 sputter deposition equipment , 30" x 28" x 8" stainless steel load lock chamber with aluminum cover, 2" air-operated roughing isolation valve
