Gasonics Aura 1000 Upgrade

You Upgrade Your Gasonics Aura 1000

The Upgrade kit for Gasonics Aura® 1000 includes an advanced AW-1000 System Control with touch screen operator interface or 17″ LCD Monitor , New PC with Allwin21 AW-1000 software ,new main control board and new wafer heating function with Allwin21 RTP technology. The kit is easy to incorporate (plug-and-play) into the original Gasonics Aura® 1000 system. No need to move the to be upgraded system from its present location. All utility connections stay in place. The new control system will enhance the entire system operation. It makes the upgraded plasma asher system much more reliable with real time precise control.

$top Breaking Wafer$Tegal Robot
The robust integrated robotic wafer transfer is optional for much better wafer transfer, far less wafer breakage ($!), and higher MTBF.

AW-1000 System Control Key Features

  •   Maintenance, Manual, Semi Automatic and Full Automatic operation modes
  •   Automated calibration of all subsystems
  •   Trouble shooting to sub-assembly levels
  •   Programmed comprehensive calibration and diagnostic functions
  •   Recipe creation for full automatic wafer processing
  •   Automatic decline of improper recipes and process data
  •   Multi level password protections
  •   Storage of multiple recipes and system functions
  •   Real-Time process data acquisition,display ,analysis
  •   Real-Time graphics user display (GUI)
  •   Process Data and Recipe storage on a hard drive
  •   Advanced EOP function with  SLOPE
  •   New Wafer Heating function for better repeatable performance (CLTC)
  •   GEM/SEC II functions (optional)
  •   The robust solid integrated robotic wafer transfer  is optional

 Replaced Obsolete Parts

  • The old controller
  • The old PCBs
  • OPTION – The primitive Index Wafer Transfer Subsystem (Eliminates original pneumatics panel as an added bonus…)

Fast On-site Upgrading

  • Customized survey and upgrading plan
  • Same input/output connectors
  • Same definition of each connector
  • Plug-and-Play
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