Utilities and Dimension of PE 4450 thin film coatings

Utilities and Dimension of  PE 4450 thin film coatings

  • Rear-mounted electrical, water, gas and LN2 inlet panel
  • Power distribution box
  • Water flow switch panel and manifold
  • DC or RF power supply: 208VAC, 60Hz, 3phases, 60A, 4 wires
  • Vacuum system: 208VAC, 60Hz, 3phases, 60A, 5 wires
  • Cooling Water: 1.8gpm3
  • Process N2: 60-70 psi
  • Process Argon: 5-10 psi
  • CDA: 40-60 psi
  • Dimension: 65″W x 46″D x 68″H
  • Weight: 2,288 lbs