AW-B3000 Plasma Asher

Manufacturer: Allwin21 Corp.
Condition: New
Wafer Size: Small~8″ Wafers
Wafer Loading: Manual
Plasma Power: New Air-Cooled RF 13.56MHz
Type: Barrel/Batch, Desktop or Stand Alone
Gas Lines: 1-3 Lines
Dimensions:W:27.25″ D:33″ H:24.75”(Main Body)
Downloads: 

AW-B3000 (PDF)

Branson_IPC

KEY FEATURES:

  • 2 ” to 8 ” substrate.
  • Up to three gas lines with three MFC(Customized)
  • One New Computer with touch screen.
  • One New Controller Box
  • One New Touch Screen Monitor with keyboard, mouse.
  • One 13.56 MHz ENI RF Generator or Equivalent for up to 1200W
  • New Allwin21 Corp proprietary AW software with PC control for Branson/IPC 3000/2000
  • Baratron Gauge to read the pressure to keep the process repeatable 
  • Throttle valve to control the pressure to keep the process repeatable

SOFTWARE FEATURES:

Branson-IPC-back

  • Maintenance, Manual, Semi Automatic and Full Automatic operation modes
  • Automated calibration of all subsystems
  • Troubleshooting to sub-assembly levels
  • Programmed comprehensive calibration and diagnostic functions
  • Recipe creation for full automatic wafer processing
  • Automatic decline of improper recipes and process data
  • Multi level password protections
  • Storage of multiple recipes and system functions
  • Real-Time process data acquisition,display ,analysis
  • Real-Time graphics user display (GUI)
  • Process Data and Recipe storage on a hard drive
  • GEM/SEC II functions (optional)
  • ENI RF Generator instead of the original obsolete RF Generator
  • New Controller box instead of the original controller

OPTIONS:

  • End of Process (EOP) Detection:
    • Automatically stops the Process after all wafers are fully stripped regardless of their quantity or photoresist thickness.
  • Chamber Pre-heat:
    • Allwin21 AW-B3000 Controller uses temperature from sheathed Thermocouple (TC) within chamber to preheat substrates using an N2 Plasma thus increasing the Ash-rate.
Contact Us for More Information

RFQ-Plasma Asher Descum Clean

    Please help fill in the following Customer Survey Form for suitable Plasma Asher Descum model and configuration for your applications. Appreciate your time. Thank you very much.

    1. Your Name(Required):

    2. Your Email(Required):

    3. Your Company Name(Required):

    4. Company Address:

    5. Substrate Sizes(Required):
    small sample1 inch2 inch3 inch4 inch5 inch6 inch6.125 inch6.25 inch8 inch12 inchOthers
    6. Substrate Material(Required):
    SiSiCGaAsGaNGaInPInPOthersNot sure
    7. What are the highest and lowest process temperature(Required,°C):

    8. What is the Asher rate specification:

    9. What are the Asher Uniformity/Repeatability specifications:

    10. Amount of Gas lines(Required):

    11. What are the maximum and minimum RF power watts?

    12. Did you use any Plasma Asher Descum Equipment which met your requirements? If yes, pls specify brand and model(Required).

    13. Do you know Matrix, Branson/IPC, Gasonics plasma asher equipment?If yes, pls tell us which model you know(Required).

    14. Special Requirements:

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