Tag Archives | Tegal
Allwin21 Corp. has been focusing on providing solutions and enhancements to Tegal 901e, Tegal 903e, Tegal 901e TTW, Tegal 903e TTW used plasma Etch RIE semiconductor process equipment. These OEM Etch RIE semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC, solid robotic wafer transfer system (Video) and new critical components to achieve the goal of giving our customers a production edge with right cost.
The Upgrade kit for Tegal® 901e Tegal® 903e includes an advanced AW-900 System Control with touch screen operator interface or 17" LCD Monitor , New PC with Allwin21 AW-900 software and new main control board.
The Upgrade kit for Tegal® 915 Tegal 965 includes a New PC Board with Allwin21 software package ,new main control board and cables. The kit is easy to incorporate (plug-and-play) into the original Tegal 915,Tegal 965 Plasma Asher Plasma Etcher systems.…