Perkin-Elmer 4410 Sputter

Manufacturer: Allwin21 Corp.
Condition: Fully Refurbished and Upgraded
Wafer Size: Small~8 inch
Wafer loading: Manual, with Load Lock
Cathodes: Delta Shape, 3 max
Sputter Methods: DC/RF; Diode/Magnetron
Gas Lines: 1~3 MFCs
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Perkin Elmer 44xx (PDF)


Process proven for III-V. With an installed base in the thousands of systems, Perkin-Elmer was a leading supplier of sputter deposition equipment for high technology application in 1990’s. The Perkin-Elmer 4410 Sputter Deposition Systems, fully refurbished and upgraded by Allwin21 Corp., were designed for flexibility offering a wide range of operating and process modes. The highest quality construction, components and Allwin21’s new AW-4450 System Control assure reliable operation and an ultra clean vacuum environment to yield consistently reproducible results. Every fully refurbished and upgraded Perkin Elmer sputtering system was supported by years of technological experience and backed by a worldwide sales and service organization dedicated to prompt courteous service.

All our Perkin-Elmer 4410 Sputter Deposition Systems go through a series of rigorous tests which are documented, standardized, and certified by performance and reliability standards. By strictly following these procedures, the customer receives guaranteed rapid start-up, lifecycle reliability, and proven process performance.

Key Features

  • Process Proven for III-V substrates
  • Non-PLC (Smaller footprint / easy maintenance)
  • 20 years proven sputter technology
  • New optimum AW-4450 System Control
  • Efficient DeltaTM cathode
  • Up to 3 pieces of DeltaTM cathode ports
  • High throughput operation
  • High Uniformity and Yield
  • DC, RF Sputter
  • Magnetron and Diode Sputter option
  • RF Etch and Bias are optional
  • Ultra Clean vacuum system
  • Load lock operation
  • UHV design
  • Flexible for development or production use
  • Full range of substrate sizes and shapes
  • Various pumping and power options
  • Co-sputtering option
  • Reactive Sputtering option

AW-4450 System Controller

  • Maintenance, Manual, Semi Automatic and Full Automatic operation modes
  • Automated calibration of all sub-systems
  • Trouble shooting to sub-assembly levels
  • Programmed comprehensive calibration and diagnostic functions
  • Recipe creation for full automatic wafer processing
  • Automatic decline of improper recipes and process data
  • Multi level pass word protections
  • Storage of multiple recipes and system functions
  • Real-Time process data acquisition,display ,analysis
  • Real-Time graphics use display
  • Process Data and Recipe storage on a hard drive
  • Easy TC vacuum gauge calibration
  • Positioning Deposition(optional)
  • GEM/SEC II functions (optional)

Screen of Perkin-Elmer 4410 Sputter Desposition System

Screen of Perkin-Elmer 4410 Sputter Desposition System

Approved Processes and Applications of   Perkin-Elmer 4410 Sputter Deposition System

Al+W Cr/SiO2 SiC Ti+Au
InSnO SiO2 Ti/W Ti+Au+Ni
Al2O3 Mo SiO2+O2 Ni/Fe+Cu+SiO2
Ag MoSi2 Si+N2(Si3N4) Ti/W+Au
Au Mo2Si5 Si+N2+B4C Ti/W+Au+Ta
C Mo5Si3 Ta Ti/W+Al/Si
Cr Ni TaC Ti/W+Ni/Cr+Au
Cr/Co Ni/Cr Ta+Au Ti/W+Pt
Cr/Au Ni+Ni/Cr TaSi2 Al+Ti/W+Ag
Cr+Cu Ni/Fe Ta+SiO2 W+Al2O3
Cr/Si Pt Zr Zn
Cr/SiO TiO2 TiO2+Cr ZnO2

 

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