Matrix 105 20X 111 211 303 403 Upgrade

Upgrade Your Used Matrix 105 106 205 303 403 104 103 102 101 Plasma Asher Descum Etch Systems

The Upgrade kit for Matrix® 10X, Matrix® 20X , Matrix® 111,, Matrix® 211 303 403 includes an advanced AW-105 System Control with touch screen operator interface or 17″ LCD Monitor , New PC with Allwin21 AW-105 software ,new main control board. The kit is easy to incorporate (plug-and-play) into the original Matrix 10X, Matrix 20X , Matrix 111,, Matrix 211,Matrix 303, Matrix 403  system. No need to move the to be upgraded system from its present location. All utility connections stay in place. The new control system will enhance the entire system operation. It makes the upgraded plasma asher, descum system much more reliable with real time precise control. The robust integrated robotic wafer transfer and fixed cassette station instead of the original frog robot and elevator are optional for much better wafer transfer and MTTB.

 

AW-105 System Control Key Features

  • Maintenance, Manual, Semi Automatic and Full Automatic operation modes

    Robust integrated robotic wafer transfer

    Robust integrated robotic wafer transfer

  • Automated calibration of all subsystems
  • Trouble shooting to sub-assembly levels
  • Programmed comprehensive calibration and diagnostic functions
  • Recipe creation for full automatic wafer processing
  • Automatic decline of improper recipes and process data
  • Multi level password protections
  • Storage of multiple recipes and system functions
  • Real-Time process data acquisition,display ,analysis
  • Real-Time graphics user display (GUI)
  • Process Data and Recipe storage on a hard drive
  • Advanced EOP function with  SLOPE
  • GEM/SEC II functions (optional)
  • The robust integrated robotic wafer transfer is optional
  • New AC/DC Distributor and pressure control box
  • New Eurotherm Closed-Loop Temperature Control
  • New chuck for 2 to 6 inch wafer with much better performance is optional
  • New digital RF Generator is optional and coming with new AW-105R equipment only.

Replaced Obsolete Parts

  • The old obsolete controller
  • The old obsolete controller PCBs
  • The obsolete robot control PCB (Optional)
  • Old obsolete Eurotherm Unit
  • The old obsolete pressure control module if necessary
  • The old obsolete AC/DC Module

Fast On-site Upgrading

  • Customized survey and upgrading plan
  • Same input/output connectors
  • Same definition of each connector
  • Plug-and-Play

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