The Upgrade kit for Matrix® 10X, Matrix® 20X , Matrix® 111,, Matrix® 211 303 403 includes an advanced AW-105 System Control with touch screen operator interface or 17″ LCD Monitor , New PC with Allwin21 AW-105 software ,new main control board. The kit is easy to incorporate (plug-and-play) into the original Matrix 10X, Matrix 20X , Matrix 111,, Matrix 211,Matrix 303, Matrix 403 system. No need to move the to be upgraded system from its present location. All utility connections stay in place. The new control system will enhance the entire system operation. It makes the upgraded plasma asher, descum system much more reliable with real time precise control. The robust integrated robotic wafer transfer instead of the original frog robot are optional for much better wafer transfer and MTTB.
Please fill in the Upgrade Kit RFQ at our website for an official quotation.
AW-105 System Control Key Features
- Maintenance, Manual, Semi Automatic and Full Automatic operation modes
- Automated calibration of all subsystems
- Trouble shooting to sub-assembly levels
- Programmed comprehensive calibration and diagnostic functions
- Recipe creation for full automatic wafer processing
- Automatic decline of improper recipes and process data
- Multi level password protections
- Storage of multiple recipes and system functions
- Real-Time process data acquisition,display ,analysis
- Real-Time graphics user display (GUI)
- Process Data and Recipe storage on a hard drive
- Advanced EOP function with SLOPE
- New AC/DC Distributor and pressure control box
- New Eurotherm Closed-Loop Temperature Control
- Optional: GEM/SEC II function
- Optional: EOP function
- Optional: The robust integrated robotic wafer transfer instead of the original frog robot
- Optional: New chuck for 2 to 6 inch wafer with much better performance.
- Optional: New MKS RF generator replaces the obsolete ENI OEM06xl.
Replaced Obsolete Parts
- The old obsolete controller
- The old obsolete controller PCBs
- The obsolete robot control PCB (Optional)
- Old obsolete Eurotherm Unit
- The old obsolete pressure control module if necessary
- The old obsolete AC/DC Module
Fast On-site Upgrading
- Customized survey and upgrading plan
- Same input/output connectors
- Same definition of each connector
Solution of the obsolete 0995-10512 INDEXER,CASSETTE for Matrix
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