Please help fill in the following Customer Survey Form for suitable Metal Film Metrology model and configuration for your applications. Appreciate your time. Thank you very much.

1. Your Name(Required):

2. Your Email(Required):

3. Your Company Name(Required):

4. Company Address:

5. Substrate Maximum Size(Required):
Small Sample1 inch2 inch3 inch4 inch5 inch6 inch8 inchOthersNot sure
6. Substrate Material(Required):
SiSiCGaAsGaNGaInPInPOthersNot sure
7. Measurement Parameters(Required):
Sheet ResistanceFilm ThicknessOthersNot sure
8. Thin Film Materials(Required):
Epi-SemiconductorAlAuWTaNxCuOthersNot sure
9. Substrate Resistivity(Ω.cm,Required):
<0.050.05-11-100100-100K>100kOthersNot sure
10. Thin Film resistivity(mΩ.cm,Required):
<0.0010.001-11-100100-100K>100kOthersNot sure
11. Multi-Layer Substrate? Specify if Yes(Required) :

12. Data Output(Required):
File of ComputerPrinterOthersNot sure
13. Environment Temperature (Required) :
Under ControlledRoom Temperature (No Control)OthersNot sure
14. Parameter Range: Film Sheet resistance(Ω/□ , Required):
0.001-11-2000OthersNot sure
15. Parameter Range: Film thickness (Angstroms, Required):
<100100- 200k>200kOthersNot sure
16. Did you use any Thin Film Sheet Resistance Measurement Instrument which met your requirements? If yes, pls specify brand and model(Required).

17. Special Requirements:

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