RFQ – Metrology

    Please help fill in the following Customer Survey Form for suitable Metal Film Metrology model and configuration for your applications. Appreciate your time. Thank you very much.

    1. Your Name(Required):

    2. Your Email(Required):

    3. Your Company Name(Required):

    4. Company Address:

    5. Substrate Maximum Size(Required):
    Small Sample1 inch2 inch3 inch4 inch5 inch6 inch8 inchOthersNot sure
    6. Substrate Material(Required):
    SiSiCGaAsGaNGaInPInPOthersNot sure
    7. Measurement Parameters(Required):
    Sheet ResistanceFilm ThicknessOthersNot sure
    8. Thin Film Materials(Required):
    Epi-SemiconductorAlAuWTaNxCuOthersNot sure
    9. Substrate Resistivity(Ω.cm,Required):
    <0.050.05-11-100100-100K>100kOthersNot sure
    10. Thin Film resistivity(mΩ.cm,Required):
    <0.0010.001-11-100100-100K>100kOthersNot sure
    11. Multi-Layer Substrate? Specify if Yes(Required) :

    12. Data Output(Required):
    File of ComputerPrinterOthersNot sure
    13. Environment Temperature (Required) :
    Under ControlledRoom Temperature (No Control)OthersNot sure
    14. Parameter Range: Film Sheet resistance(Ω/□ , Required):
    0.001-11-2000OthersNot sure
    15. Parameter Range: Film thickness (Angstroms, Required):
    <100100- 200k>200kOthersNot sure
    16. Did you use any Thin Film Sheet Resistance Measurement Instrument which met your requirements? If yes, pls specify brand and model.

    17. Approximate budget(Required):
    < USD$ 5K< USD$ 10K< USD$ 15K< USD$ 20K< USD$ 25K< USD$ 30K< USD$ 50K< USD$ 60K< USD$ 70K< USD$ 80K> USD$ 80KNot sureOthers

    18. Approximate purchasing time (Required):
    <In 1 monthIn 2 monthsIn 3 monthsIn 6 monthsIn 9 monthsIn 12 monthsIn 24 monthsNot sureOthers

    19. Throughput Requirement :
    <R&D only<10 wafers per day<20 wafers per day<30 wafers per day<40 wafers per day<50 wafers per day<100 wafers per day<200 wafers per day<500 wafers per day>500 wafers per dayNot sureOthers

    20. Special Requirements:

    Include Files(Limit:3M File types:PDF|JPG|JEPG):
    Files1 :
    Files2 :
    Files3 :
    Files4 :
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