Archive | Upgrade Service

Lam AutoEtch X90 Upgrade

The Upgrade kit for Lam AutoEtch® 490 590 690 790 includes an advanced AW-590 System Control with touch screen operator interface or 17" LCD Monitor , New PC with Allwin21 AW-590 software  and new interface board. 

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Gasonics L3510 Upgrade

The Upgrade kit for Gasonics L3510 includes an advanced AW-3510 System Control with touch screen operator interface , New PC with Allwin21 AW-3000 software ,new main control board, new wafer heating function with Allwin21 RTP technology, fixed cassette station instead of the original elevator and robust integrated robotic wafer transfer instead of the original Z-bot . 

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Gasonics Aura 3010 Upgrade

The Upgrade kit for Gasonics Aura® 3010, Gasonics Aura® 3000 includes an advanced AW-3000 System Control with touch screen operator interface , New PC with Allwin21 AW-3000 software ,new main control board, new wafer heating function with Allwin21 RTP technology, fixed cassette station instead of the original elevator and robust integrated robotic wafer transfer instead of the original Z-bot . 

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Gasonics Aura 1000 Upgrade

The Upgrade kit for Gasonics Aura® 1000 includes an advanced AW-1000 System Control with touch screen operator interface or 17" LCD Monitor , New PC with Allwin21 AW-1000 software ,new main control board and new wafer heating function with Allwin21 RTP technology. 

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Perkin-Elmer 44XX Upgrade

The AW-4450 Sputter System Upgrade Kit includes an advanced control system with touch screen operator interface and Allwin21 computer software. The kit is easy to incorporate (plug-and-play) into the original PE sputter system. 

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Branson/IPC 3000 Upgrade

The Upgrade kit for Branson IPC® 2000, 3000, 4000 includes an advanced AW-B3000 System Control with touch screen operator interface , New PC with Allwin21 AW-B3000 software ,new main control board and new gas lines with MFCs. 

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Gasonics Aura 2000 Upgrade

The Upgrade kit for Gasoncis 2000LL / Gasonics Aura 2000LL  includes an advanced AW-2000 System Control with touch screen operator interface , New PC with Allwin21 AW-2000 software ,new main control board. The kit is easy to incorporate (plug-and-play) into the original Gasoncis 2000LL / Gasonics Aura 2000LL  systems.…

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