AW-303R Etcher

Allwin21 AW-303R Features:

1. Production-proven plasma etcher system.
2. Integrated solid robotic wafer handling, Single wafer process.
3. High selectivity to PR(> 10: 1 Oxide:PR, SiN:Oxide)
4. Frontside and backside isotropic removal.
5. Consistent wafer-to-wafer process cycle repeatability.
6. Temperature control from 20 to 120oC.
7. 50mm-150mm wafer capability. Up to 6.25” substrate.
8. Up to 4 wafer size capability without hardware change.
9. Fixed cassette station and wafer aligner/cooling station.
10. Can handle 50um thickness wafer.
11. PC controller with Advanced Allwin21 Software.
12. Endpoint detection (EOP) with Allwin21 SLOPE technology (Optional).
13. Up to 3 gas lines with MFC.
14. Air-Cooled 300W or 600W MKS 13.56 MHz RF Generator
15. Pressure control with Throttle Valve.
16. 15-inch Touch screen monitor GUI.
17. EMO, Interlocks, and Watchdog function.
18. GEM/SECS II (optional).
19. Small Footprint: 27”W x 40”D x 59”H (280LBs)
20. Made in U.S.A.

Specifications:

1. Wafer Size: Up to 6.25 inch.
2. Temperature: 20-120ºC (±2ºC)
3. Gas Lines: Up to four gas lines with MFCs.
4. >2000 A/min. Thermo Oxide,>16000A/min.LPCVD Nitride
5. Uniformity: <±3~5%
6. Particulate: <0.15 /cm2 (0.3um or greater)
7. Damage: CV:<0.1V from control; Mobile Ion:<1-2 E10 ; Vt :0% total shift on 98% of points tested no shift >5%
8. Selectivity: >10:1(Oxide:PR, SiN:Oxide)
9. MTBF/MTTA/MTTR: 450 Hours/100 Hours/3.5 Hours or Better.
10. 95% uptime

Applications:

• Contact Slope Etch
• Via Etch
• BPSG Etch
• LTO Etch
• TEOS Etch
• Thermal Oxide Etch
• LPCVD Nitride Etch
• PECVD Nitride Etch
• Trench Rounding
• Descum
• RIE Damage Removal
• Sodium Removal
• Planarization
• Backside Etch (Poly, Nitride, or Oxide)
• Nitride Pattern Removal (PBL, LOCOS w/ Pad Ox = >400Å)
• Low Temp Photoresist Ashing over Oxides, Poly, Al, W, Ti, or Moly

Facilities:

• • Plumbed Process Gases
  • Cooling water: 1GPM house circulating supply @ <23 ± 2°C
  • Facility Exhaust: 100 CFM @ 1” static pressure
  • Vacuum supply for Robot: 11.8”Hg(-5.8psi) / 0.1CFM airflow
  • Power: 190-240VAC, single phase, 30A, 50/60Hz (NEMA L-6-30P plug supplied)

Matrix and related trademarks belongs to Matrix company.

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