Spare Parts for Equipment
Sold & Upgraded by Allwin21
Sold & Upgraded by Allwin21
Allwin21 provides spare parts support for equipment sold and/or upgraded by Allwin21. The spare parts lists below are provided to help customers identify part numbers and prepare quotation requests efficiently.
Semiconductor equipment may have different revisions, options, configurations, upgrade history, and repair history. Even equipment with the same model number may use different components. Complete information helps avoid quotation errors, wrong parts, compatibility issues, and unnecessary downtime.
Spare Parts Lists Currently Available
AccuThermo AW610M RTP
AccuThermo AW820R RTP
AW-105R Plasma Asher
AccuThermo AW820R RTP
AW-105R Plasma Asher
Need Spare Parts Pricing or Availability?
Email: info@allwin21.com
Tel: +1-408-778-7788 EXT 110
Backup: allwin21corp@gmail.com
Most customers use the spare parts tables below to prepare their RFQ list and email it directly to Allwin21.
Before Requesting a Spare Parts Quotation
Please Provide
Equipment model
LOT ID, if applicable
Serial number, if applicable
Part number
Part description
Quantity required
Photos of the part, or failed component, if possible
Special requirements, if applicable
Why This Matters
Same model equipment may have different configurations or revisions
Customer part records may be incomplete, outdated, or from a different system
Allwin21 keeps equipment history and photos for many systems sold or upgraded by Allwin21
Correct information helps identify the correct part the first time
Parts inquiry goal: help the customer identify the correct replacement part, receive an efficient quotation, and avoid costly mistakes. Incomplete information can cause wrong part identification, quotation delays, shipment errors, and additional downtime.
Spare Parts for AccuThermo AW610M RTP System
| Item | Part Number | Description |
|---|---|---|
| 1 | 2451-0010-02 | Lamp, 1200W 208V |
| 2 | 2504-0070 | O-Ring, Purge Inlet |
| 3 | 2504-0160-AW1 | O-Ring, Flange to Tube, Door to Flange |
| 4 | 5101-0030 | Fuse, 1A 250V, Fst-Blo |
| 5 | 5101-0090 | Fuse, 1/2A 250V, Fst-Blo |
| 6 | A5-0346 | Fuse, 10A 250V |
| 7 | 2109-0050 | Lampholder, Tung Halg, 10A 600V |
| 8 | A5-0391 | Valve Solenoid NC-2 way 3/8″ |
| 9 | A5-0138 | Bellows Valve |
| 10 | A5-0182 | Valve, 12VDC |
| 11 | A5-0390 | Flow Switch, 3/8″ NPT, 1-10LPM |
| 12 | 2901-0040 | Digital Panel Meter Assy |
| 13 | 5107-0010 | Door Interlock Switch |
| 14 | 5107-0020 | Cabinet Interlock |
| 15 | 5300-0060 | Thermostat Interlock “A” |
| 16 | 5300-0070 | Thermostat Overcool “B” |
| 17 | 5300-0090 | Thermostat Open=150F CL=135F |
| 18 | A8-1103-00 | TC Assembly, T-Shape, Quartz |
| 19 | 7100-0874-11 | ERP Pyro, Water Cooled |
| 20 | 2100-0900-078 | PCA, Main Control Board |
| 21 | 2100-0900-054 | PCA, Gas Control Board |
| 22 | A5-1001-02 | Contactor, 3-P |
| 23 | 045-0119 | Relay, Solid State, 240 VAC, 25A |
| 24 | A4-0067-01 | Quartz Isolation Tube with Pyrometer Window |
| 25 | 7400-0082-01-4 | 6-inch Tray for 4 to 6 inch Wafers |
| 26 | A4-0004-01 | Quartz Tray, Square |
Spare Parts for AccuThermo AW820R RTP System
| Item | Part Number | Description |
|---|---|---|
| 1 | 2451-0013-01 | Lamp Tung-Halo 1500W |
| 2 | 2504-0070 | O-Ring, Purge Inlet |
| 3 | A5-0336 | O-Ring, Flange to Tube |
| 4 | 5101-0030 | Fuse, 1A 250V, Fst-Blo |
| 5 | A5-0440 | Fuse, 7A 250V Fst-Blo |
| 6 | A5-0346 | Fuse, 10A, 250V, Fst-Blo |
| 7 | A5-0409 | O-Ring, AW820R |
| 8 | A5-0418 | O-Ring, AW820R |
| 9 | 2109-0050 | Lampholder, Tung Halg, 10A 600V |
| 10 | A5-0305 | Flow Switch, NPT, 5A, 125/250VAC |
| 11 | A5-0306 | Solenoid Valve, 24/60 |
| 12 | 2901-0040 | Digital Panel Meter Assy |
| 13 | 5300-0060 | Thermostat Interlock “A” |
| 14 | 5300-0070 | Thermostat Overcool “B” |
| 15 | 5300-0090 | Thermostat Open=150F CL=135F |
| 16 | 7100-0874-11 | ERP Pyro, Water Cooled |
| 17 | 2100-0900-078 | PCA, Main Control Board |
| 18 | 2100-0900-084 | PCA, Gas Control Board |
| 19 | A5-0410 | TC Wire, 0.010″ DIA, 24″L |
| 20 | A5-0408 | Ceramic Thermocouple Insulators, 6″ |
| 21 | A4-1103-01 | Quartz, T-Shape TC Wafer |
| 22 | 9010-0440 | Pin, Quartz |
| 23 | 9820-0810 | Cable Thermocouple Type K (Feet) |
| 24 | A5-0189A | TC Probe, Omega |
| 25 | 4501-0050-B | Contactor, 3 Pole |
| 26 | A5-0307 | Switch Power On |
| 27 | A5-0308 | Switch Power Off |
| 28 | A5-0309 | Switch Lamp Power |
| 29 | A5-0311 | Relay, 24VAC |
| 30 | A5-0130 | Power Supply |
| 31 | A5-0313 | Circuit Breaker, 3 Pole, 100A |
| 32 | 4803-0010 | SCR Dual Pair, 90A, 600V – 4 Zones Version |
| 33 | 045-0119 | Relay, Solid State, 240 VAC, 25A – 10 Zones Version |
| 34 | 7400-0100-06 | Quartz Tube, 8″ |
| 35 | A4-1110-00 | Quartz Tray, AW820R |
| 36 | 014-0101 | Susceptor 6″ Base |
| 37 | 014-0102 | Susceptor 6″ Cover |
Spare Parts for AW-105R Plasma Asher
| Item | Part Number | Description |
|---|---|---|
| 1 | 0990-95010 | Lamp, Pushbutton Switch |
| 2 | 0995-16521 | Solenoid, ETO-3 |
| 3 | 0995-16527 | Solenoid, ET-2M |
| 4 | 0101-0484 | Assy, Bellows Compression |
| 5 | 0992-60149 | Insulator, Bellows Macor |
| 6 | 0994-60005 | O-Ring, Red Silicone (Door) |
| 7 | 0994-60006 | O-Ring, Red Silicone (Reactor) |
| 8 | 0994-60007 | O-Ring, Red Silicone (Bell Jar) |
| 9 | 0994-60019 | O-Ring, Vacuum Valve |
| 10 | 0994-60029 | O-Ring, Vacuum Valve Poppet |
| 11 | 0994-60050 | O-Ring, Chuck Seal |
| 12 | 0994-60055 | O-Ring Silicone (Lifter Pins) |
| 13 | 0994-60062-AW | O-Ring Kalrez (Lifter Pins) |
| 14 | 0994-60063 | O-Ring Kalrez (Chuck) |
| 15 | 0995-10597 | Cylinder, Pancake |
| 16 | 0992-60094 | Ceramic Ring |
| 17 | 0992-60126 | Insulator, Lower Reactor |
| 18 | 0992-60135 | Pin Wafer Lifting |
| 19 | 0992-60147 | Chamber |
| 20 | 0992-60253 | Baffle, Quartz Insulated Reactor |
| 21 | 0995-16512 | Bleed Valve |
| 22 | 0995-99777 | Door Cylinder |
| 23 | 0995-99752 | Baratron, 0-10 Torr, VCR 1/2″ |
| 24 | S2100-1008-008 | PCA, Main Control Board |
| 25 | S2100-0105-019 | PCA, Robot Control Board |
| 26 | S2100-0105-010 | PCA, Distribution Board |
| 27 | 0995-99752 | Baratron, 0-10 Torr, VCR 1/2″ |
| 28 | A5-0602-A | Computer Board |
| 29 | A5-0603-A | CF Card, 64G |
| 30 | A5-1021 | Memory, 256M DDR333 200PIN, Non-ECC |
Need Parts for Other Equipment?
Allwin21 does its best to provide long-term spare parts support for equipment sold and/or upgraded by Allwin21. For other RTP, plasma asher, plasma etcher, PVD/sputter, metrology, or upgraded legacy equipment, please contact us with the complete equipment and parts information.
For obsolete parts, discontinued components, or unsupported modules, Allwin21 may recommend replacement parts, substitute parts, repair services, upgrade kits, or subsystem modernization solutions to help extend the useful life of the equipment.
Contact Allwin21 for Spare Parts
Please prepare your purchase list using the item number, part number, description, and quantity from the tables above. Complete equipment information helps us quote faster and avoid mistakes.
Email: info@allwin21.com
Tel: +1-408-778-7788 EXT 110
Backup Email: allwin21corp@gmail.com