The AW-4450 Sputter System Upgrade Kit includes an advanced control system with touch screen operator interface and Allwin21 computer software. The kit is easy to incorporate (plug-and-play) into the original Perkin-Elmer 24XX/44XX Series Sputter Deposition Systems. No need to move the to be upgraded system from its present location. All utility connections stay in place. The new control system will enhance the entire system operation. It makes the upgraded sputter system much more reliable, since many of the old controllers are eliminated.
AW-4450 System Control
- Maintenance, Manual, Semi Automatic and Full Automatic operation modes
- Automated calibration of all subsystems
- Trouble shooting to sub-assembly levels
- Programmed comprehensive calibration and diagnostic functions
- Recipe creation for full automatic wafer processing
- Automatic decline of improper recipes and process data
- Multi level password protections
- Storage of multiple recipes and system functions
- Real-Time process data acquisition,display ,analysis
- Real-Time graphics user display (GUI)
- Process Data and Recipe storage on a hard drive
- Easy TC vacuum gauge calibration
- Positioning Deposition(optional)
- GEM/SEC II functions (optional)
Replaced Obsolete Controls If Necessary
- Auto Pump Down Controller
- Load Lock Controller
- Digital Clock Timer
- Table Raise / Lower Control
- Throttle Valve Control System
- Pressure Control System
- Sputter Head Controls (optional)
Fast On-site Upgrading
- Customized survey and upgrading plan
- Same input/output connectors
- Same definition of each connector
- Plug-and-Play
