MRC 6X3 9X3 Sputtering System Upgrade

Upgrade Kit for MRC 603 MRC 643 MRC 903 MRC 943 MRC 923

Upgrade Kit for MRC 603 MRC 643 MRC 903 MRC 943 MRC 923

The AW-603/903 Sputter System Upgrade Kit includes an advanced control system with touch screen operator interface and Allwin21 computer software. The kit is easy to incorporate (plug-and-play) into the original MRC 6X3/9X3 sputter system. No need to move the to be upgraded system from its present location. All utility connections stay in place. The new control system will enhance the entire system operation. It makes the upgraded sputter system much more reliable, since many of the old controllers are eliminated.

AW-603/903 System Control

  • Maintenance, Manual, Semi Automatic and Full Automatic operation modes
  • Automated calibration of all subsystems
  • Trouble shooting to sub-assembly levels
  • Programmed comprehensive calibration and diagnostic functions
  • Recipe creation for full automatic wafer processing
  • Automatic decline of improper recipes and process data
  • Multi level password protections
  • Storage of multiple recipes and system functions
  • Real-Time process data acquisition,display ,analysis
  • Real-Time graphics user display (GUI)
  • Process Data and Recipe storage on a hard drive
  • Easy TC vacuum gauge calibration
  • Positioning Deposition(optional)
  • GEM/SEC II functions (optional)

Upgrade Kit includes the following

  • New PC controller
  • External monitor
  • Keyboard/Cables
  • DC valves plus manifolds Suitable
  • Pressure Reading Meter
  • Vacuum valves
  • Installation/Training

Fast On-site Upgrading

  • Customized survey and upgrading plan
  • Same input/output connectors
  • Same definition of each connector
  • Plug-and-Play
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