The Upgrade kit for Tegal® 915 Tegal 965 includes a New PC Board with Allwin21 software package ,new main control board and cables. The kit is easy to incorporate (plug-and-play) into the original Tegal 915,Tegal 965 Plasma Asher Plasma Etcher systems. No need to move the to be upgraded system from its present location. All utility connections stay in place. The new control system will enhance the entire system operation. It makes the upgraded Tegal 915 Tegal 965 plasma asher, descum system much more reliable with real time precise control.
- Maintenance, Manual, Semi Automatic and Full Automatic operation modes
- Automated calibration of all subsystems
- Troubleshooting to sub-assembly levels
- Programmed comprehensive calibration and diagnostic functions
- Recipe creation for full automatic wafer processing
- Automatic decline of improper recipes and process data
- Multi level password protections
- Storage of multiple recipes and system functions
- Real-Time process data acquisition, display ,analysis
- Real-Time graphics user display (GUI)
- Process Data and Recipe storage on a hard drive
- GEM/SEC II functions (Optional)
- Up-to-date Generator instead of the original obsolete RF Generator (Optional)
- Air Actuated Door(Optional)
Batch Bulk-Ash Options
- End of Process (EOP) Detection:
- Automatically stops the Process after all wafers are fully stripped regardless of their quantity or photoresist thickness.
Fast On-site Upgrading
- Customized survey and upgrading plan
- Same input/output connectors
- Same definition of each connector
Tegal and related trademarks belongs to Tegal company.