Gasonics L3510 Upgrade

Upgrade Your Gasonics L3510 Plasma Asher

The Upgrade kit for Gasoncis L3510  includes an advanced AW-3510 System Control with touch screen operator interface , New PC with Allwin21 AW-3000 software ,new main control board, new wafer heating function with Allwin21 RTP technology, fixed cassette station instead of the original elevator and robust integrated robotic wafer transfer instead of the original Z-bot . The kit is easy to incorporate (plug-and-play) into the original Gasonics L3510 systems. No need to move the to be upgraded system from its present location. All utility connections stay in place. The new control system will enhance the entire system operation. It makes the upgraded plasma asher system much more reliable with real time precise control.

AW-3510 System Control Key Features

  • Maintenance, Manual, Semi Automatic and Full Automatic operation modes
  • Automated calibration of all subsystems

    Upgrade Your Gasonics L3510 Plasma Asher - Layout

    Upgrade Your Gasonics L3510 Plasma Asher – Layout

  • Trouble shooting to sub-assembly levels
  • Programmed comprehensive calibration and diagnostic functions
  • Recipe creation for full automatic wafer processing
  • Automatic decline of improper recipes and process data
  • Multi level password protections
  • Storage of multiple recipes and system functions
  • Real-Time process data acquisition,display ,analysis
  • Real-Time graphics user display (GUI)
  • Process Data and Recipe storage on a hard drive
  • Advanced EOP function withSLOPE
  • GEM/SEC II functions (optional)
  • The robust integrated robotic wafer transfer instead of the original obsolete Z-bot
  • Fixed wafer cassette station instead of the original elevator.

Replaced Obsolete Parts

  • The old controller
  • The old PCBs
  • The obsolete Z-bot and elevator cassette station (Optional)

Fast On-site Upgrading

  • Customized survey and upgrading plan
  • Same input/output connectors
  • Same definition of each connector
  • Plug-and-Play
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