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Allwin21 Plasma Asher / Descum Cleaning Systems

Allwin21 plasma asher and descum systems combine production-proven plasma chamber technology, modernized Allwin21 hardware architecture, process-oriented software control, and decades of semiconductor plasma process application experience.

Production-Proven Plasma Chamber & Process Platform
Modernized Allwin21 Hardware Architecture
Process-Oriented Allwin21 Software Control
Decades of Installed Base & Customer Applications
Allwin21 Plasma Asher Descum Cleaning Systems
CE Marked Equipment • SEMI Member Since 2007 • 2000+ Asher Systems Worldwide

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How to Choose the Right Plasma Asher System

AW-105R • 2″~6″ Downstream Plasma Asher

Recommended for critical descum and low plasma damage applications
Suitable for compound semiconductor and sensitive wafer processes
Helps improve wafer-to-wafer and lot-to-lot repeatability
Best fit when 2-inch to 6-inch wafer capability is required

AW-10R • 4″~8″ Downstream Plasma Asher

Same process-positioning logic as AW-105R with larger wafer capability
Designed for 4-inch to 8-inch semiconductor wafer applications
Supports robotic wafer handling for reduced handling variation
Best fit when larger wafer size and production consistency are required

AW-B3000 • Desktop Barrel Plasma Asher

Designed for bulk photoresist stripping and simple cleaning applications
Cost-effective solution without tight uniformity requirements
Suitable for university labs and non-critical cleaning processes
Best fit when complete resist removal is more important than process uniformity

Application Review Before Model Selection

Critical descum requires review of wafer material, resist, process target, and uniformity needs
Bulk resist removal may not require the same uniformity and repeatability level
Fragile wafers benefit from stable robotic handling and reduced manual variation
Allwin21 recommends model selection based on real process and production requirements

Allwin21 Plasma Asher Platform Advantages

Production-Proven Plasma Chamber & Hardware Platform

Core plasma chamber technology is inherited from historically accepted semiconductor plasma asher and descum platforms widely used in fabs, universities, and research institutes
Production-proven chamber behavior helps customers develop and transfer processes with lower technical and process risk compared with completely new unproven designs
Stable and accepted process platform supports wafer-to-wafer, lot-to-lot, and long-term process consistency over daily production operation and long-term equipment usage

Modernized Allwin21 Hardware Architecture

Solid robotic wafer transfer architecture helps reduce wafer breakage rate, operator handling variation, and wafer handling inconsistency during daily production operation
Air-cooled digital RF generator architecture with Allwin21 RF matching technology eliminates traditional water-cooling requirements while providing more modern and precise RF control compared with older analog RF systems
Modern electronics, modules, PCBs, Baratron, throttle valve control, and RTP-derived temperature control architecture help reduce obsolete hardware dependency while improving equipment reliability, long-term serviceability, and maintenance efficiency

Process-Oriented Allwin21 Software Control

Embedded industrial computer board architecture helps reduce static interference and external PC-related instability compared with traditional external computer control configurations
Unlike generic software developed only by software programmers, Allwin21 software is developed with real semiconductor equipment and process engineering experience
The software exposes practical equipment and process-related information through integrated monitoring and control architecture, helping equipment engineers and process engineers perform troubleshooting, maintenance, process development, optimization, and equipment status review more efficiently

Decades of Installed Base & Customer Applications

Production-proven plasma chamber technology inherited from historically accepted semiconductor platforms, together with modernized Allwin21 systems, has been widely used in semiconductor fabs, universities, and research institutes for decades
Customers benefit from lower adoption risk because the process platform and chamber behavior are already widely accepted and understood in real semiconductor applications
The accepted process platform helps customers move faster from installation and acceptance into real process development, optimization, and production operation

Not Sure Which Plasma Asher Fits Your Application?

Please send wafer size, wafer material, photoresist type, process requirement, target ashing rate, uniformity expectation, throughput target, and application details. Allwin21 can recommend the suitable plasma asher and descum configuration.

Download Plasma Asher RFQ PDF

Additional Plasma Asher / Descum Keywords and Legacy Platform References

Plasma Asher, Plasma Descum, Semiconductor Plasma Cleaning, Downstream Plasma Asher, Barrel Plasma Asher, Photoresist Removal, Semiconductor Cleaning Equipment, Wafer Descum, Low Damage Plasma Cleaning, Compound Semiconductor Descum, Matrix 105, Matrix 205, Matrix 303, Matrix 403, Matrix 106, Matrix 104, Matrix 102, Matrix 101, Matrix 10, System One Stripper, Branson IPC 2000, Branson IPC 3000, Branson IPC 4000, Gasonics Aura 1000, Gasonics Aura 2000LL, Gasonics Aura 3000, Gasonics L3510, Dry Asher, Dry Descum, Plasma Cleaning System, Wafer Cleaning Equipment.

AW-10R Plasma Asher

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AW-105R Plasma Asher

AW-105R Plasma Stripper Asher . Wafer Size: 3-6.25 inch. 1-4 gas lines with MFCs. 60-200C Temperature with CLTC control . Anodized Chuck with Element heating and chiller cooling. Stand Alone. Integrated solid robotic wafer transfer. Single Wafer Process. Suitable for high uniformity, repeatability processes.
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AW-1008 Plasma Stripper/Asher

AW-1008 Plasma Stripper Asher . Wafer Size: 3-6 inch. 1-4 gas lines with MFCs. 100-200C Temperature without control and 200-350C with CLTC. IR Lamp Heating. Stand Alone. Integrated solid robotic wafer transfer. Single Wafer Process. Suitable for high temperature, quick stripper processes.
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