Tegal 901e Tegal 903e Upgrade

Upgrade Your Tegal 901e Tegal 903e Plasma Etch RIE Systems

The Upgrade kit for Tegal 901e Tegal 903e  includes an advanced AW-900 System Control with touch screen operator interface or 17″ LCD Monitor , New PC with Allwin21 AW-900 software and new main control board. The kit is easy to incorporate (plug-and-play) into the original Tegal® 901e Tegal® 903e systems. No need to move the to be upgraded system from its present location. All utility connections stay in place. The new control system will enhance the entire system operation. It makes the upgraded plasma etch RIE system much more reliable with real time precise control.

$top Breaking Wafer$Tegal Robot
The robust integrated robot wafer transfer is for much better wafer handling, with far less wafer breakage ($!), easy maintenance, and much higher MTBF.

AW-900 System Control Key Features

  • “Designed with III-V in mind…”
  • Maintenance, Manual, Semi Automatic and Full Automatic operation modes
  • Automated calibration of all subsystems
  • Trouble shooting to sub-assembly levels
  • Programmed comprehensive calibration and diagnostic functions
  • Recipe creation for full automatic wafer processing
  • Automatic decline of improper recipes and process data
  • Multi level password protections
  • Storage of multiple recipes and system functions
  • Real-Time process data acquisition,display ,analysis
  • Real-Time graphics user display (GUI)
  • Process Data and Recipe storage on a hard drive
  • Advanced EOP function with  SLOPE
  • GEM/SEC II functions (optional)

Fast On-site Upgrading

  • Customized survey and upgrading plan
  • Same input/output connectors
  • Same definition of each connector
  • Plug-and-Play

 

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