Vacuum Systems for the process chamber and loadlock of Perkin-Elmer 4480
- 2 stage Cryopump with 1000 l/s pumping speed for air, including chevron, water-cooled compressor and lines, automatic regeneration controller and plumbing kit. 71/2″ O.D. (6″ ASA) aluminum air-operated gate valve, Air-operated venetian blind throttling valve.
- 36.7 cfm mechanical pump for process chamber and load lock roughing
- Chamber base pressure: 5X10-7 Torr.