Tag Archives | Gasonics

Allwin21 Corp. has been focusing on providing solutions and enhancements to Gasonics Aura 1000, Gasonics Aura 3010, Gasonics L3510 used plasma Asher Descum semiconductor process equipment. These OEM Asher semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC, solid robotic wafer transfer system and new critical components to achieve the goal of giving our customers a production edge with right cost.

 

AW-2001R Etcher

Manufacturer: Allwin21 | Condition: New | Wafer Size: 2"/3"/4"/5"/6"Capability | Wafer loading: Automatic, Solid Robotic Wafer Transfer-Allwin21 Own Technology | Plasma Power: Microwave | Type: Parallel/Single Wafer Process,Stand Alone | Gas Lines: 4 lines with customized MFCs range

AW-2001R with solid robotic wafer transfer (optional)
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Gasonics L3510 Upgrade

The Upgrade kit for Gasonics L3510 includes an advanced AW-3510 System Control with touch screen operator interface , New PC with Allwin21 AW-3000 software ,new main control board, new wafer heating function with Allwin21 RTP technology, fixed cassette station instead of the original elevator and robust integrated robotic wafer transfer instead of the original Z-bot . 

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Gasonics Aura 3010 Upgrade

The Upgrade kit for Gasonics Aura® 3010, Gasonics Aura® 3000 includes an advanced AW-3000 System Control with touch screen operator interface , New PC with Allwin21 AW-3000 software ,new main control board, new wafer heating function with Allwin21 RTP technology, fixed cassette station instead of the original elevator and robust integrated robotic wafer transfer instead of the original Z-bot . 

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Gasonics Aura 1000 Upgrade

The Upgrade kit for Gasonics Aura® 1000 includes an advanced AW-1000 System Control with touch screen operator interface or 17" LCD Monitor , New PC with Allwin21 AW-1000 software ,new main control board and new wafer heating function with Allwin21 RTP technology. 

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Gasonics Aura 2000 Upgrade

The Upgrade kit for Gasoncis 2000LL / Gasonics Aura 2000LL  includes an advanced AW-2000 System Control with touch screen operator interface , New PC with Allwin21 AW-2000 software ,new main control board. The kit is easy to incorporate (plug-and-play) into the original Gasoncis 2000LL / Gasonics Aura 2000LL  systems.…

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