Vacuum Systems for Perkin-Elmer 4450

 Vacuum Systems for the process chamber and loadlock of  Perkin-Elmer 4450

  • 2 stage Cryopump with 1000 l/s pumping speed for air, including chevron, water-cooled compressor and lines, automatic regeneration controller and plumbing kit. 71/2″ O.D. (6″ ASA) aluminum air-operated gate valve, Air-operated venetian blind throttling valve.
  • 36.7 cfm mechanical pump for process chamber and load lock roughing
  • Chamber base pressure: 5X10-7 Torr. 

    Perkin-Elmer 4450 Sputter Deposition Vacuum Systems

    Perkin-Elmer 4450 Sputter Deposition Vacuum Systems