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Allwin21 Corp. is the exclusive licensed manufacturer of AG Associates Heatpulse 610 Rapid Thermal Process tool.  We are manufacturing the new AccuThermo AW Series Atmospheric and Vacuum Rapid Thermal Processors. Compared with traditional RTP systems, Allwin21’s AccuThermo AW RTPs have innovative software and more advanced temperature control technologies to achieve the BEST rapid thermal processing performance (repeatability, uniformity, and stability) with decades of research directly applicable..

AW-105R Plasma Asher

Manufacturer: Allwin21 Corp. | Condition: New | Wafer Size: 2"/3"/4"/5"/6"Capability |  Wafer loading: Automatic, Solid Robotic Wafer Transfer-Allwin21 Own Technology | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process,Stand Alone | Gas Lines: 1 ~ 3 lines capability with customized MFCs range

Plasma Aser Descum - AW-105R
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AW-2001R Etcher

Manufacturer: Allwin21 | Condition: New | Wafer Size: 2"/3"/4"/5"/6"Capability | Wafer loading: Automatic, Solid Robotic Wafer Transfer-Allwin21 Own Technology | Plasma Power: Microwave | Type: Parallel/Single Wafer Process,Stand Alone | Gas Lines: 4 lines with customized MFCs range

AW-2001R with solid robotic wafer transfer (optional)
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AW-901e Plasma Etch RIE

Manufacturer: Allwin21| Condition: New | Wafer Size: 3"/4"/5"/6"Capability |  Wafer loading: Automatic, Original Belt-Shuttle-Wafer-Transfer OR Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process/Plasma Etch/RIE/Stand Alone | Etch Materials: Polysilicon, Refractory metal silicides and Nitride | Gas Lines: 1~4 lines capability with customized MFCs range

The robust integrated robotic wafer transfer for Tegal 901e Tegal 90e
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AW-903e Plasma Etch RIE

Manufacturer: Allwin21| Condition: New | Wafer Size: 3"/4"/5"/6"Capability |  Wafer loading: Automatic, Original Belt-Shuttle-Wafer-Transfer OR Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process/Plasma Etch/RIE/Stand Alone | Etch Materials: Silicon Oxide | Gas Lines: 1~4 lines capability with customized MFCs range

The robust integrated robotic wafer transfer for Tegal 901e Tegal 90e
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