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Lam AutoEtch X90 Upgrade

ByUpgrade Service

The Upgrade kit for Lam AutoEtch X90 ( Lam AutoEtch® 490 590 690 790 ) includes an advanced AW-x90 System Control with touch screen (Video)operator interface or 17″ LCD Monitor , New PC with Allwin21 AW-x90 software and new interface board. The kit is easy to incorporate (plug-and-play) into the original Lam Research Lam AutoEtch Etch systems. No need to move the to be upgraded system from its present location. All utility connections stay in place. The new control system will enhance the entire system operation. It makes the upgraded plasma Etch system much more reliable with real time precise control.

AW-x90 System Control Key Features

Maintenance, Manual, Semi Automatic and Full Automatic operation modes
Automated calibration of all subsystems
Trouble shooting to sub-assembly levels
Programmed comprehensive calibration and diagnostic functions
Recipe creation for full automatic wafer processing
Automatic decline of improper recipes and process data
Multi level password protections
Storage of multiple recipes and system functions
Real-Time process data acquisition,display ,analysis
Real-Time graphics user display (GUI)
Process Data and Recipe storage on a hard drive
Easy TC vacuum gauge calibration with using software, not the hardware resistors adjusting.
Advanced EOP function with SLOPE

Replaced Obsolete Parts

The old controller
The old Interface Board

Fast On-site Upgrading

Customized survey and upgrading plan
Same input/output connectors
Same definition of each connector
Plug-and-Play

Contact Us for More Information

Lam AutoEtch and related trademarks belongs to Lam Research company.

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Gasonics L3510 Upgrade

Matrix 105 20X 111 211 303 403 Upgrade

Semi Membership

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