1 | Alliance |
2 | Anritsu Company |
3 | Beijing Yandong |
4 | Changzhou Chemsemi Co., Ltd |
5 | ClassOne Equipment Inc |
6 | CS Microelectronics Co., Ltd. |
7 | Duet Microelectronics Beijing Co.,Ltd. |
8 | DYNEX |
9 | Excelitas |
10 | Honeywell Sensing and Control |
11 | Jiangyin Xinshun |
12 | Micralyne |
13 | Microsemi Power Products Group |
14 | National Research Council Canada |
15 | NEDI |
16 | nuvoTon |
17 | OCLARO Technology Ltd. |
Archive | Others
Rapid Thermal Processor’s Main Customers
1 | 13 Institute |
2 | 44 Institute |
3 | Academy of Sciences of the Czech Republic |
4 | Accelink Technologies Co.,Ltd |
5 | ADS Inc./ Army Research Lab |
6 | Advanced Engineering Research Organization |
7 | Advanced Micro Semiconductors Co., Ltd |
8 | Advanced Packing Technology |
9 | Advanced Semiconductor Manufacturing |
10 | AdvanceTEC/ City College of NY |
11 | Advantest |
12 | AERO |
13 | AET Co.,LTD |
Sputtering Equipment Main Customers
1 | A-Flex Technologies Co., Ltd |
2 | Amphenol/GE |
3 | Anritsu Company |
4 | APT Electronics Ltd/ Nanjing TSL |
5 | BAE Systems |
6 | Bicmos Foundary |
7 | EnaChip Inc. |
8 | glo-usa Inc /Avicena Tech |
9 | Google LLC |
10 | Hangzhou Liangdongxin Microelectronics CO.Ltd |
11 | Hatchip Co.,/Hunan |
AW-105R Main Customers
1 | 3SP Technologies S.A.S |
2 | CETE 13 Institute |
3 | Changzhou Chemsemi Co., Ltd |
4 | Continental Automotive Systems Division |
5 | CS Microelectronics Co., Ltd. |
6 | Duet Microelectronics Beijing Co.,Ltd. |
7 | Dynax Semiconductor Inc. |
8 | Electronics Scientific Engineering Ltd |
9 | EPISTAR |
10 | Excelitas |
11 | Finisar |
13 | Hatchip Co.,/Hunan |
AW-B3000 Main Customers
1 | Applied Materials |
2 | Archcom |
3 | Bridgelux, Inc. |
4 | Broadcom |
5 | Chengdu University of Electronic Science/Sichuan HuaLong |
6 | Chengdu Yaguang Electronics CO.,Ltd. |
7 | Chongqing University |
8 | Cree |
9 | Emcore Copration |
10 | Excelitas |
11 | Facebook Technologies, LLC |
12 | GE Global Research |
13 | General Research/Union Semicon/SUMEC |
14 | glo-usa Inc /Avicena Tech |
15 | Hong Kong University of Science & Technology |
16 | Infinera Corporation |
17 | JDSU |
18 | Keysight Technologies |
19 | Meridian Innovation Limited |
20 | Micralyne |
21 | On Semicondcutor |
22 | Ori-Chip Optoelectronics Technology |
23 | Quantum Devices, Inc. |
AccuThermo AW 610M Spare Parts Price List
The prices below are subject to change without notice.
Item |
P/N |
Description |
Unit Price |
Qty |
Amount |
Spare Kit, Level 1 |
|||||
1 |
2451-0010-02 |
Lamp, 1200W 208V |
$52.00 |
5 |
$260.00 |
2 |
2504-0070 |
O-Ring, Purge Inlet |
$3.00 |
2 |
$6.00 |
3 |
2504-0160-AW1 |
O-Ring, Flange to Tube,Door to Flange |
$15.00 |
4 |
$60.00 |
4 |
5101-0030 |
Fuse,1A 250V,Fst-Blo |
$2.00 |
2 |
$4.00 |
5 |
5101-0090 |
Fuse,1/2A 250V,Fst-Blo |
$2.00 |
2 |
$4.00 |
6 |
A5-0346 |
Fuse,10A 250V |
$5.00 |
2 |
$10.00 |
Subtotal |
|
||||
Spare Kit, Level 2 |
|||||
7 |
2109-0050 |
Lampholder,Tung Halg,10A 600V |
$30.00 |
2 |
$60.00 |
8 |
A5-0391 |
Valve Solenoid NC-2 way 3/8″ |
$200.00 |
2 |
$400.00 |
9 |
A5-0138 |
BELLOWS VALVE |
$500.00 |
1 |
$500.00 |
10 |
A5-0182 |
Valve, 12VDC |
$55.00 |
2 |
$110.00 |
11 |
A5-0390 |
Flow Switch,3/8″ NPT,1-10LPM |
$285.00 |
1 |
$285.00 |
12 |
2901-0040 |
Digital Panel Meter Assy |
$159.00 |
1 |
$159.00 |
13 |
5107-0010 |
Door Interlock Switch |
$10.00 |
1 |
$10.00 |
14 |
5107-0020 |
Cabinet Interlock |
$50.00 |
1 |
$50.00 |
15 |
5300-0060 |
Thermstat Interlock “A” |
$25.00 |
1 |
$25.00 |
16 |
5300-0070 |
Thermstat overcool “B” |
$25.00 |
1 |
$25.00 |
17 |
5300-0090 |
ThermstatOpen=150F CL=135F |
$25.00 |
1 |
$25.00 |
18 |
7100-0326-01-AW |
TC ASSEMBLY, T-SHAPE, QUARTZ |
$275.00 |
1 |
$275.00 |
19 |
7100-0874-11 |
ERP Pyro, Water Cooled |
$6,800.00 |
1 |
$6,800.00 |
20 |
2100-0900-078 |
PCA, Main Control Board |
$3,650.00 |
1 |
$3,650.00 |
21 |
2100-0900-054 |
PCA, Gas Control Board |
$1,250.00 |
1 |
$1,250.00 |
Subtotal |
|
||||
Spare Kit, Level 3 |
|||||
22 |
A5-1001-02 |
Contactor, 3-P |
$280.00 |
1 |
$280.00 |
23 |
045-0119 |
RELAY, SOLID STATE, 240 VAC, 25A |
$60.00 |
6 |
$360.00 |
24 |
7400-0066-03 |
Quartz Isolation Tube with pyrometer window |
$4,180.00 |
1 |
$4,180.00 |
25 |
7400-0082-01-4 |
6-inch tray for 4 to 6 inch wafers. |
610 RTP Steady Time to Temperature
The current 610 RTP oven design is limited to the Time at Temperature limits listed below. High Temperature processing has many “Ins and Outs” of strategies and compromises. Be sure to let Allwin21 know the details of your process requirements. With the current oven design, customers wanting to use the 1050C to 1250C range of processing need to let Allwin21 know…
Time (sec) — the amount of time to elapse for this step. …
RF Bias Function
Combines the DC or RF sputtering and the RF etching operations. While DC or RF power is applied to the target, a small amount of RF is also applied to the substrate table. As a result, the substrate and target are both bombarded by ions ( the substrate to a lesser extent than the target ).…
RF Etch function
Essentially the reverse process of RF diode sputter deposition, in which the substrate table becomes the cathode (negative pole) and the target assembly becomes the anode (positive pole). Under these circumstances, surface material from the substrates is ejected. Surface impurities are ejected along with substrates material, making this process useful for pre-cleaning substrate prior to sputter deposition.…
Reactive Sputtering
Some metals, such as nitrides and oxides, are best deposited by this method: the target is the parent metal and a small amount of nitrogen or oxygen is introduced into the process chamber along with the argon sputtering gas. Because ionized gases are typically highly reactive, a film deposited in a mixture of argon and a reactive gas will often form a compound with the reactive gas (e.g.,…
Co-Sputtering Deposition
Sometimes called co-sputtering or dual deposition, co-deposition is identical in principle and practice to other types of sputter deposition, except that two targets (typically of different materials) are simultaneously activated. Substrates passing sequentially and repeatedly beneath the targets are coated with alternating, very thin films of two materials.…
Options for Allwin21 RTPs
- Installation and Training on customer site
- Multiple Process Gases (Up to 6) and MFCs
- Patented ERP Pyrometer (400-1250°C) as non-contact high temperature sensor
- A5-1006-02 Shielded TC probe assembly and A4-1010-01-SiC Cap for 150-1050°C
- 2 TC terminals. NOT RECOMMENDED
- Chiller for ERP Pyrometer
- TC Wafer, Single Point for Pyrometer calibration
- Omega Meter for Pyrometer calibration
- Vacuum Function-AW820V.
Q & A on Rapid Thermal Annealing Systems
1. Q: Which model should I purchase?
A: Normally your biggest substrate size determines the model. AccuThermo AW610M is up to 6 inch; AccuThermo AW810M, AccuThermo AW820M, AccuThermo AW820V (NOT RECOMMENDED) are up to 8 inch.
2.…
Use PSum1 and PSum2 to save valuable compound wafers
A GaAs, InP,GaN, GaInP, SiC and other compound semiconductor wafers are very expensive and it is difficult to get a good ohmic contact region. Thus, it is easy to ruin one of these wafers. Therefore, the yield can be very low if adequate precautions are not taken.…
Free Fast Quote RFQs
Please help fill in the following RFQs at our website for suitable RTP, Asher, Etcher, Sputtering Deposition, Metal Thin Film Metrology System, Used Equipment Upgrade Kit model and configuration for your applications. We will provide an official quotation accordingly.…