RTP RFQ ByOthers Allwin21 RTP / RTA System RFQ Form Please provide complete and accurate process information so Allwin21 can recommend the most suitable RTP model and configuration. 1. Customer Information Company Name:Contact Name:Email:Phone: 2. Substrate Information Wafer size(s):Will multiple wafer sizes be used on the same tool?Substrate material:Wafer thickness:Wafer shape: 3. Process Temperature Lowest process temperature:Highest process temperature:Typical process temperature:Ramp rate requirement:Dwell time / steady-state time: 4. Process Type & Gas Process type:Process gases:Oxygen-sensitive process? 5. Process Sensitivity How sensitive is your process to temperature uniformity and repeatability?How do you evaluate process performance? 6. Previous RTP Experience Have you used RTP before? If yes, please provide brand/model/configuration.Have you used multi-wafer RTP with acceptable performance? 7. Throughput & Production Requirement Target throughput:Production stage:Target purchase date / project timeline: 8. Automation & Configuration Preferred system type:Single-wafer or multi-wafer preference:Temperature measurement preference:Required wafer carrier / susceptor configuration: 9. Facility & Integration Available utilities:Factory automation / SECS-GEM requirement: 10. Budget Budget range: 11. Other Special Requirements Please list any other special requirements:Submit RFQ to Allwin21 Reset Form
