PROCESS BY-PRODUCT HAZARDS:
The process by-products of the machines are 95% unreacted (i.e., 95% of the gases going in come out in the same form). Among the products of plasma reactions involving chlorocarbons, fluorocarbons, and combinations thereof which have been detected in vacuum pump oil and on reactor surfaces are hexachlorobenzene, hexachloroethane, and hexachlorobutadiene in small concentrations. Depending on specific process parameters and choice of photoresists, other chlorinated and fluorinated products, plus organic and inorganic acids, may be present in used pump oil.
Allwin21 Corp. has been focusing on providing solutions and enhancements to Matrix 105 , Matrix 205, Gasonics Aura 1000 , Gasonics Aura 3010, Gasonics L3510, Branson/IPC 3000, Branson/IPC L3200 used plasma asher descum semiconductor process equipment and Tegal 901e, Tegal 903e, Tegal 901e TTW, Tegal 903e TTW, Lam AutoEtch 490 ,Lam AutoEtch 590, Lam AutoEtch 690, Lam AutoEtch 790, Lam Rainbow 44XX, Lam Rainbow 45XX, Lam Rainbow 46XX, Lam Rainbow 47XX, Matrix 303,Matrix 403 used plasma Etch RIE semiconductor process equipment. These OEM semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC, solid robotic wafer transfer system and new critical components to achieve the goal of giving our customers a production edge with right cost.
Allwin21 Corp. was formed in 2000 with a focus on professionally providing Rapid Thermal Process, Plasma Asher Stripper Descum, Plasma Etch/RIE, Sputter Deposition high-tech semiconductor equipment, services and technical support in Semiconductor industry, MEMS, Biomedical, Nanotechnology, Solar, LEDs etc. We endeavor to be a leader in our semiconductor equipment product lines. To achieve this, we have been providing unique innovative and cost-effective technical solution, high quality semiconductor equipment and on time spare parts delivery worldwide. We have maintained a global presence that has grown and expanded into the major high-tech manufacturing areas of the world. We pride ourselves on developing and continuing lasting customer and client relationships.
We understand that a timely responsive support and service are critical elements in semiconductor industries. Allwin21 experienced engineer team is the best guaranty for our high quality service and support. We provide on-site installation, training, maintenance, semiconductor equipment optimization, retrofits, customized upgrades.
We continue to be a fast growing company. Our unique ability to provide high performance semiconductor equipment benefits our customers. Our awareness, flexibility, unique quality and innovation are the driving force of our success.
- Allwin21 is the exclusive licensed manufacturer of AG Associates Heatpulse 610 Rapid Thermal Processor semiconductor equipment.
- Advanced AW Series Software for the Rapid Thermal Process, Plasma Asher Stripper Descum,Plasma Etch/RIE, Sputter Deposition semiconductor equipment, which enable new processes, increase yield, improve uptime, reduce maintenance costs, and extend capital equipment.
- Integrated robotic wafer transfer for many single wafer process semiconductor equipment which increases equipment stability sharply.
- The AW software incorporates a Superior Temperature Control Technology (Advanced PID) that surpasses all original manufactures specs and make the semiconductor equipment have much better repeability. The AW software is capable of controlling the temperature of the wafer to ± 1°C. It is also able to control the temperature from wafer to wafer to ± 0.5°C.
- All our semiconductor equipment go through a series of rigorous tests which are documented, standardized, and certified by performance and reliability standards. By strictly following these procedures, the customer receives guaranteed rapid start-up, lifecycle reliability, and proven process performance.
