Allwin21 AccuThermo RTP Systems
Allwin21 AccuThermo RTP platforms combine production-proven RTP hardware heritage, modernized control architecture, process-oriented RTAPRO software, and decades of semiconductor thermal processing experience.
Production-Proven RTP Hardware Platform
Modernized RTP Hardware Architecture
Process-Oriented RTAPRO Software
Decades of RTP Application Experience
CE Marked Equipment • SEMI Member Since 2007 • 40+ Countries • 1,500+ RTP Systems Worldwide
RTP Selection and Configuration Form
AccuThermo RTP Product Lineup
How to Choose the Right RTP System
Manual / Semi-Auto RTP
Best for R&D labs, universities, and flexible process development
Supports manual loading and flexible substrate sizes
Lower system complexity and cost
Typical models: AW610M, AW820M
Automatic RTP
Best for repeatable single-wafer thermal processing
Reduces operator loading and handling variation
Recommended for fragile and sensitive wafers
Typical models: AW820R, AW820RV, AW1230R
Atmospheric RTP
Suitable for many standard RTP annealing processes
Focuses on gas purity and O₂ / moisture control
Often the practical choice for process development
Available in manual and automatic configurations
Vacuum RTP
Used when vacuum or special ambient is truly required
Selected based on real process requirements
Requires application review before configuration
Typical models: AW820V, AW820RV
Allwin21 RTP Platform Advantages
Production-Proven RTP Platform
Based on AG Associates Heatpulse RTP technology heritage
Used in fabs, universities, and research institutes worldwide
Designed for real semiconductor thermal process work
Modernized RTP Hardware Architecture
Updated control electronics and industrial hardware design
Improved monitoring, safety, and system serviceability
Modern Allwin21 architecture built on proven RTP hardware
Process-Oriented RTAPRO Software
Recipe control for ramp, steady-state, and process steps
Real-time lamp power control and process monitoring
PowerSum visibility for troubleshooting and process protection
Decades of RTP Application Experience
Experience with Si, SiC, GaN, GaAs, InP, and compound materials
Support for universities, institutes, R&D labs, and fabs
Application-focused guidance for RTP model and configuration selection
Not Sure Which RTP Model Fits Your Process?
Please send wafer size, material, thickness, process gas, maximum temperature, steady-state time, ramp requirements, throughput target, and process evaluation method. Allwin21 can recommend the suitable RTP model and configuration.
RTP Selection and Configuration Form
Additional RTP Keywords and Legacy RTP Platform References
Rapid Thermal Processing, RTP, RTA, Rapid Thermal Annealing, Rapid Thermal Processor, Rapid Thermal Oxidation, RTO, Rapid Thermal Nitridation, RTN, semiconductor thermal processing, compound semiconductor annealing, dopant activation, ohmic contact annealing, AG Associates Heatpulse, Heatpulse 610, Heatpulse 410, Heatpulse 210, MPT RTP, RTA-600S, RTA-600XP, RTA-800S, RTA-800XP, atmospheric RTP, vacuum RTP, automatic RTP, semi-auto RTP, wafer annealing equipment, semiconductor process equipment.
