Allwin21 AccuThermo RTP platforms combine production-proven RTP hardware heritage, modernized control architecture, process-oriented RTAPRO software, and decades of semiconductor thermal processing experience.
Please send wafer size, material, thickness, process gas, maximum temperature, steady-state time, ramp requirements, throughput target, and process evaluation method. Allwin21 can recommend the suitable RTP model and configuration.
Rapid Thermal Processing, RTP, RTA, Rapid Thermal Annealing, Rapid Thermal Processor, Rapid Thermal Oxidation, RTO, Rapid Thermal Nitridation, RTN, semiconductor thermal processing, compound semiconductor annealing, dopant activation, ohmic contact annealing, AG Associates Heatpulse, Heatpulse 610, Heatpulse 410, Heatpulse 210, MPT RTP, RTA-600S, RTA-600XP, RTA-800S, RTA-800XP, atmospheric RTP, vacuum RTP, automatic RTP, semi-auto RTP, wafer annealing equipment, semiconductor process equipment.
Many customers ask for vacuum RTP because they believe vacuum means cleaner processing, lower oxygen, or better performance. Based on more than 45 years of RTP experience, Allwin21 recommends atmospheric RTP for most standard RTP applications unless the process truly requires reduced pressure.
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