Allwin21 AccuThermo RTP Systems
Allwin21 AccuThermo RTP systems combine AG Associates Heatpulse RTP technology heritage, modernized Allwin21 hardware architecture, process-oriented RTAPRO software, and decades of semiconductor thermal process application experience.
AG Associates Heatpulse Technology Heritage
Modernized Allwin21 RTP Hardware Architecture
RTAPRO Software with PowerSum & Multi-Zone Control
Decades of Installed Base & RTP Applications
CE Marked Equipment • SEMI Member Since 2007 • 40+ Countries • 1500+ RTP Systems Worldwide
RTP Selection and Configuration Form
AccuThermo RTP Product Lineup
How to Choose the Right RTP System
Manual / Semi-Auto RTP
Best for R&D labs, universities, and flexible process development
Supports manual loading and flexible substrate sizes
Lower system complexity and cost
Typical models: AW610M, AW820M
Automatic RTP
Best for repeatable single-wafer thermal processing
Reduces operator loading variation and handling inconsistency
Recommended for fragile, sensitive, and production wafers
Typical models: AW820R, AW820RV, AW1230R
Atmospheric RTP
Suitable for many standard annealing and thermal process applications
Focuses on gas purity, oxygen control, and stable thermal response
Often the practical first choice for RTP process development
Available in manual and automatic configurations
Vacuum RTP
Used when vacuum or special ambient is truly required by the process
Selected based on real process requirements, not only marketing preference
Requires application review before configuration
Typical models: AW820V, AW820RV
Allwin21 RTP Platform Advantages
AG Associates Heatpulse Technology Heritage
AccuThermo RTP systems inherit the proven chamber and thermal process foundation from AG Associates Heatpulse RTP technology heritage
The accepted RTP chamber behavior helps customers develop and transfer thermal processes with lower risk compared with completely new unproven designs
Production-proven thermal architecture supports wafer-to-wafer, lot-to-lot, and long-term process repeatability in real semiconductor applications
Modernized Allwin21 RTP Hardware Architecture
Modern control electronics, industrial hardware, updated modules, and improved subsystem architecture reduce obsolete hardware dependency
Multi-zone lamp architecture supports independent thermal tuning across 6-zone and 10-zone RTP configurations
Modernized gas, temperature, safety, and control architecture improves system reliability, serviceability, and long-term equipment stability
RTAPRO Software with Practical Process Tools
RTAPRO is developed with real RTP equipment and process engineering experience, so the software displays information that equipment engineers and process engineers actually use every day
PowerSum monitoring gives engineers practical visibility into total lamp power behavior, helping process monitoring, troubleshooting, and protection of valuable wafers
Multi-zone recipe control, lamp intensity limits, and recipe-level parameters give engineers practical tools for thermal profile tuning, repeatability, and process optimization
Decades of Installed Base & RTP Applications
AG Associates Heatpulse heritage and modernized Allwin21 AccuThermo RTP systems have been widely used in fabs, universities, institutes, and compound semiconductor applications
Customers benefit from lower adoption risk because the RTP process platform and chamber behavior are already widely accepted and understood
The accepted RTP platform helps customers move faster from installation and acceptance into real process development, optimization, and production operation
Not Sure Which RTP Model Fits Your Process?
Please send wafer size, material, thickness, process gas, maximum temperature, steady-state time, ramp requirements, throughput target, and process evaluation method. Allwin21 can recommend the suitable RTP model and configuration.
RTP Selection and Configuration Form
Additional RTP Keywords and Legacy RTP Platform References
Rapid Thermal Processing, RTP, RTA, Rapid Thermal Annealing, Rapid Thermal Processor, Rapid Thermal Oxidation, RTO, Rapid Thermal Nitridation, RTN, semiconductor thermal processing, compound semiconductor annealing, dopant activation, ohmic contact annealing, AG Associates Heatpulse, Heatpulse 610, Heatpulse 410, Heatpulse 210, MPT RTP, RTA-600S, RTA-600XP, RTA-800S, RTA-800XP, atmospheric RTP, vacuum RTP, automatic RTP, semi-auto RTP, wafer annealing equipment, semiconductor process equipment.
