Modular Process Technology Corporation was founded in 1991. Modular Process Technology supplies rapid thermal processing (RTP) solutions for silicon, compound semiconductor, integrated photonics, and MEMS device processing. The Company’s line of business includes manufacturing industrial furnaces and ovens. Models: RTP-600S, MPT RTP-600XP, MPT RTP-800S, MPT RTP-800XP,MPT RTA-3000.…
Archive | Upgrade Service
Your legacy 1990s semiconductor tools don’t have to hold your fab back. At Allwin21, we take your aging AG Associates, MPT RTPs, Branson/IPC, Matrix, Gasoncis Ashers, Matrix, Tegal, Gasoncis Etchers, and Perkin-Elmer sputter systems and transform them with modern control, reliable spare parts, and automation features — eliminating obsolete components, stabilizing performance, and freeing your engineers from constant troubleshooting. With our upgrades, your old tools work like new, so your team can focus on production, not maintenance.
Please provide as much information as possible in the upgrade kits survey in PDF at our website and email it to sales@allwin21.com / allwin21corp@gmail.com.The more complete and accurate your responses, the better we can recommend the most suitable upgrade kit or configuration for your specific needs, based on our 45 years of upgrading used semiconductor equipment experience and hundreds of successful installation worldwide. Completing the survey thoroughly will ensure optimal system performance while avoiding unnecessary options that do not contribute to your application. We greatly appreciate your time and effort.
Gasonics L3510 Plasma Asher
Gasonics Aura 3010/3000
Gasonics Aura 2000LL
Lam Rainbow 45XX Plasma Etcher
Lam Rainbow 44XX Plasma Etcher
MRC 6X3 9X3 Sputtering System Upgrade
The AW-603/903 Sputter System Upgrade Kit includes an advanced control system with touch screen operator interface and Allwin21 computer software. The kit is easy to incorporate (plug-and-play) into the original MRC 6X3/9X3 sputter system. No need to move the to be upgraded system from its present location.…
Lam Rainbow 44XX Upgrade
Tegal 901e Tegal 903e Upgrade
The Upgrade kit for Tegal® 901e Tegal® 903e includes an advanced AW-900 System Control with touch screen operator interface or 17" LCD Monitor , New PC with Allwin21 AW-900 software and new main control board.
Matrix 105 20X 111 211 303 403 Upgrade
The Upgrade kit for Matrix® 105, Matrix® 106 includes an advanced AW-105 System Control with touch screen operator interface or 17" LCD Monitor , New PC with Allwin21 AW-105 software ,new main control board.
Lam AutoEtch X90 Upgrade
The Upgrade kit for Lam AutoEtch® 490 590 690 790 includes an advanced AW-590 System Control with touch screen operator interface or 17" LCD Monitor , New PC with Allwin21 AW-590 software and new interface board.
Gasonics L3510 Upgrade
The Upgrade kit for Gasonics L3510 includes an advanced AW-3510 System Control with touch screen operator interface , New PC with Allwin21 AW-3000 software ,new main control board, new wafer heating function with Allwin21 RTP technology, fixed cassette station instead of the original elevator and robust integrated robotic wafer transfer instead of the original Z-bot .
Gasonics Aura 3010 Upgrade
The Upgrade kit for Gasonics Aura® 3010, Gasonics Aura® 3000 includes an advanced AW-3000 System Control with touch screen operator interface , New PC with Allwin21 AW-3000 software ,new main control board, new wafer heating function with Allwin21 RTP technology, fixed cassette station instead of the original elevator and robust integrated robotic wafer transfer instead of the original Z-bot .
Gasonics Aura 1000 Upgrade
The Upgrade kit for Gasonics Aura® 1000 includes an advanced AW-1000 System Control with touch screen operator interface or 17" LCD Monitor , New PC with Allwin21 AW-1000 software ,new main control board and new wafer heating function with Allwin21 RTP technology.
Perkin-Elmer 24XX/44XX Upgrade
The AW-4450 Sputter System Upgrade Kit includes an advanced control system with touch screen operator interface and Allwin21 computer software. The kit is easy to incorporate (plug-and-play) into the original PE sputter system.

