Model: Gasonics Aura 2000LL
OEM: Gasonics
Condition: Refurbished and Upgraded
Wafer Size: Up to 8 inch capability. Customized.
Gases:O2 5SLM, N2 1SLM. Maximum 4 lines. Customized.
Wafer Transfer with loadlock,original.
Controller: Allwin21 PC with touch screen monitor.
Specifications: OEM
Valid Time: Subject to prior sale.
The GaSonics Aura 2000LL Asher is a single wafer load locked system, designed to address the demands for ultra clean, damage free photoresist removal.
Gasonics Aura 2000LL with Allwin21 PC controller Features:
- Load lock with cool-down station
- Water-cooled chamber and lamp assembly
- Maintenance, Manual, Semi Automatic and Full Automatic operation modes
- Automated calibration of all subsystems
- Trouble shooting to sub-assembly levels
- Programmed comprehensive calibration and diagnostic functions
- Recipe creation for full automatic wafer processing
- Automatic decline of improper recipes and process data
- Multi level password protections
- Storage of multiple recipes and system functions
- Real-Time process data acquisition, display ,analysis
- Real-Time graphics user display (GUI)
- Process Data and Recipe storage on a hard drive
Specifications for reference:
- Pressure: 0.5 – >5.0 torr
- Platen temperature: 150 – 300°C
- Microwave Power: 0 – 1000 watts at 2.45 GHz
- Lamp utilization: 0 – 100% (1000 watts)
- Throughput: 45-60wph
- Asher Rate: 1.5u-5u/min. positive photoresist; >8u/min. negative photoresist
- Uniformity: 15%, Process Dependent
- Particulate: <0.05 /cm2 (0.03um or greater)
- Damage: CV: <0.I V CV-shift for 250A gate oxide
- Selectivity: >1000:1
