Product Description
Part Number: UFC-8100
Description: UFC-8100 MFC, O2, 30 SCCM for Lam Rainbow 4XXX
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Allwin21 Corp. has been focusing on providing solutions and enhancements to Lam AutoEtch 490 ,Lam AutoEtch 590, Lam AutoEtch 690, Lam AutoEtch 790, Lam Rainbow 44XX, Lam Rainbow 45XX, Lam Rainbow 46XX, Lam Rainbow 47XX used plasma Etch RIE semiconductor process equipment. These OEM Etch RIE semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC and new critical components to achieve the goal of giving our customers a production edge with right cost.
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Models |
AutoEtch |
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490 |
590 |
690 |
790 |
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System Type |
Fully automated ,in-line, single wafer, double airlocked, parallel plate plasma |
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Plasma Etcher |
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Wafer Size |
4”,6” |
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Controller |
Z80 Microprocessor * |
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Recipe |
A recipe programmable module |
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Etch Material |
Poly Si, Nitride |
Oxide |
Metal |
Metal |
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Chamber Heater (Upper,Lower) |
No |
No |
Yes |
Yes |
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Loadlock and Chamber door |
From inside, easy leak |
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Gas System |
5 MFCs with 6 gas lines |
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Cooling |
Chiller |
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Clamp with He cooling |
No |
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Electrode Gap |
0.5cm ~ 2.7cm, Potentiometer |
No |
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Wafer Transfer |
Belt, no detector, no aligner (with wafer block) |
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Plasma Load lock |
No |
Optional (LPG-6) |
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Atmospheric Passivation Module |
No |
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RF Match |
Upper |
Lower |
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RF Split |
No |
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RF Generator |
13.56 MHz |
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Dimension (Etcher System only) |
44″ W x 36″D x 46″H |
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Weight (Etcher System only) |
950 Lbs |
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* Allwin21 Corp. provides upgrade kits including computer, AW Software( GUI), Touch Screen, New Interface Board and New EOP technology |
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Models |
Rainbow |
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4420 |
4520 |
4620 |
4720 |
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System Type |
Fully automated ,in-line, single wafer, double airlocked, parallel plate plasma |
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Plasma Etcher/ RIE |
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Wafer Size |
4”,6”,8” |
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Controller |
Computer |
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Recipe |
Computer |
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Etch Material |
Poly Si, Nitride |
Oxide |
Metal |
Metal |
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Chamber Heater (Upper,Lower) |
Yes |
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|
Loadlock and Chamber door |
From outside |
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Gas System |
8 MFCs with 8 gas lines |
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Cooling |
TCU with two tanks |
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Clamp with He cooling |
Optional |
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Electrode Gap |
0.5cm ~ 8.5 cm encode |
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Wafer Transfer |
Robotic, Edge Detector and Center Aligner,Wafer Detector at XLL |
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Plasma Load lock |
Optional(LPG-6) |
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Atmospheric Passivation Module |
No |
Yes |
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RF Match |
Upper&Lower |
No |
Upper&Lower |
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RF Split |
No |
Yes |
No |
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RF Generator |
13.56MHz |
400kHz |
13.56MHz |
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Dimension (Etcher System only) |
44″ W x 54″D x 66″H |
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Weight (Etcher System only) |
1700 Lbs |
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Manufacturer:Lam Research | Condition:Fully Refurbished and Upgraded By Allwin21 | Wafer Size:4″/5″/6″Capability | Wafer loading:Automatic, Original Robotic-Wafer-Transfer | Plasma Power:RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/Stand Alone | Etch Materials: Polysilicon, Refractory metal silicides and Nitride | Gas Lines: 1~5 lines capability with customized MFCs range
Manufacturer:Lam Research | Condition:Fully Refurbished and Upgraded By Allwin21 | Wafer Size:4″/5″/6″Capability | Wafer loading:Automatic, Original Robotic-Wafer-Transfer | Plasma Power:RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/Stand Alone | Etch Materials: Silicon Dioxide | Gas Lines: 1~5 lines capability with customized MFCs range
Manufacturer:Lam Research | Condition:Fully Refurbished and Upgraded By Allwin21 | Wafer Size:4″/5″/6″Capability | Wafer loading:Automatic, Original Robotic-Wafer-Transfer | Plasma Power:RF,13.56MHz | Type:Parallel/Single-Wafer-Process/Plasma Etch/Stand-Alone | Etch Materials:Metal lead(such as Aluminum,Aluminum-Alloy with silicon or both) | Gas Lines: 1~5 lines capability with customized MFCs range
Manufacturer:Lam Research | Condition:Fully Refurbished and Upgraded By Allwin21 | Wafer Size:4″/5″/6″Capability | Wafer loading: Automatic, Original Robotic-Wafer-Transfer | Plasma Power:RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/Stand Alone | Etch Materials: Barrier-metal/alloys(such as Titanium/Tungsten) etching | Gas Lines: 1~5 lines capability with customized MFCs range
Lam Rainbow 4420 Plasma Etch RIE
Manufacturer:Lam Research | Condition:Fully Refurbished and Upgraded by Allwin21 with Allwin21 Own New Controller and Software | Wafer Size:4″/5″/6″/8″Capability | Wafer loading:Automatic, Original Robotic-Wafer-Transfer | Plasma Power:RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/RIE/Stand Alone | Etch Materials: Polysilicon, Refractory metal silicides and Nitride | Gas Lines:1~8 lines capability with customized MFCs range
Lam Rainbow 4520 Plasma Etch RIE
Manufacturer: Lam Research | Condition: Fully Refurbished and Upgraded by Allwin21 with Allwin21 Own New Controller and Software | Wafer Size: 4″/5″/6″/8″Capability | Wafer loading: Automatic, Original Robotic-Wafer-Transfer | Plasma Power: RF,400kHz | Type: Parallel/Single Wafer Process/Plasma Etch/RIE/Stand Alone | Etch Materials: Silicon Dioxide | Gas Lines: 1~8 lines capability with customized MFCs range
Manufacturer:Lam Research | Condition:Fully Refurbished and Upgraded by Allwin21 with Allwin21 Own New Controller and Software | Wafer Size:4″/5″/6″/8″Capability | Wafer loading:Automatic,Original Robotic-Wafer-Transfer | Plasma Power:RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/Stand Alone | Etch Materials:Metal lead(such as Aluminum,Aluminum Alloy with silicon or both) | Gas Lines:1~8lines capability with customized MFCs range
Manufacturer: Lam Research | Condition: Fully Refurbished and Upgraded by Allwin21 with Allwin21 Own New Controller and Software| Wafer Size:4″/5″/6″/8″Capability | Wafer loading:Automatic, Original Robotic-Wafer-Transfer | Plasma Power:RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/Stand Alone | Etch Materials:Barrier-metal/alloys(such as Titanium/Tungsten) etching | Gas Lines:1~8lines capability with customized MFCs range
Lam AutoEtch X90 Upgrade Kit
The Upgrade kit for Lam AutoEtch® 490 590 690 790 includes an advanced AW-590 System Control with touch screen operator interface or 17″ LCD Monitor , New PC with Allwin21 AW-590 software and new interface board.
Lam Rainbow 4XXX Upgrade Kit
The Upgrade kit for Lam Rainbow® 4400, Lam Rainbow 4500,Lam Rainbow 4600, Lam Rainbow 4420,Lam Rainbow 4520, Lam Rainbow 4620, Lam Rainbow 4720, Lam Rainbow 4428, Lam Rainbow 4528, Lam Rainbow 4628, Lam Rainbow 4728 includes an advanced AW-4500 System Control with touch screen operator interface monitor , New PC with Allwin21 AW-4500 software and new interface board.
