9200-04-013 Assy, PCB, 500M Controller

Product Description

Part Number: 9200-04-013

Description: 9200-04-013 Assy, PCB, 500M Controller

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Allwin21 Corp. has been focusing on providing solutions and enhancements to Matrix 105, Matrix 205 usedplasma Asher Descum semiconductor process equipment and Matrix 303,Matrix 403 used plasma Etch semiconductor process equipment. These OEM semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC, solid robotic wafer transfer system and new critical components to achieve the goal of giving our customers a production edge with right cost.

Matrix 105 Plasma Asher Descum (also Matrix 104, Matrix 106, Matrix 108 ,Matrix 111)

Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 2″/3″/4″/5″/6″Capability |  Wafer loading: Automatic, Original Brooks Orbitran® System-Frog Robot | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process,Stand Alone | Gas Lines: 1 ~ 2 lines capability with customized MFCs range

Matrix 205 Plasma Asher Descum (also Matrix 204, Matrix 206, Matrix 208 ,Matrix 211)

Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 2″/3″/4″/5″/6″Capability |  Wafer loading: Automatic, Original Brooks Orbitran® System-Frog Robot | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process,Through The Wall(TTW) | Gas Lines: 1 ~ 2 lines capability with customized MFCs range

Matrix 303 Plasma Etch

Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 3″4″/5″/6″Capability |  Wafer loading: Automatic,Original Brooks Orbitran® System-Frog Robot | Plasma Power: RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/Stand Alone | Etch Materials: Nitride,Silicon Dioxide | Gas Lines: 1~3lines capability with customized MFCs range.

Matrix 403 Plasma Etch

Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 3″/4″/5″/6″Capability |  Wafer loading:Automatic, Original Brooks Orbitran® System-Frog Robot | Plasma Power:RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/Through The Wall(TTW) | Etch Materials: Nitride,Silicon Dioxide | Gas Lines: 1 ~ 3lines capability with customized MFCs range.

Upgrade kits for Matrix 10X 20X 111 211 (Matrix 105 , Matrix 104, Matrix 106, Matrix 108 ,Matrix 111, Matrix 204, Matrix 206, Matrix 208 ,Matrix 211)

The Upgrade kit for Matrix® 105, Matrix® 106 includes an advanced AW-105 System Control with touch screen operator interface or 17″ LCD Monitor , New PC with Allwin21 AW-105 software ,new main control board.