Product Description
Part Number: 714-013091-001
Description: 714-013091-001, Bracket, Support, Harness (4 Clamp)
Where Used: Frame Fittings Misc
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Allwin21 Corp. has been focusing on providing solutions and enhancements to Lam Rainbow 44XX, Lam Rainbow 45XX, Lam Rainbow 46XX, Lam Rainbow 47XX used plasma Etch RIE semiconductor process equipment. These OEM Etch RIE semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC and new critical components to achieve the goal of giving our customers a production edge with right cost.
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Models |
Rainbow |
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4420 |
4520 |
4620 |
4720 |
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System Type |
Fully automated ,in-line, single wafer, double airlocked, parallel plate plasma |
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Plasma Etcher/ RIE |
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Wafer Size |
4”,6”,8” |
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Controller |
Computer |
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Recipe |
Computer |
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Etch Material |
Poly Si, Nitride |
Oxide |
Metal |
Metal |
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Chamber Heater (Upper,Lower) |
Yes |
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Loadlock and Chamber door |
From outside |
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Gas System |
8 MFCs with 8 gas lines |
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Cooling |
TCU with two tanks |
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Clamp with He cooling |
Optional |
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Electrode Gap |
0.5cm ~ 8.5 cm encode |
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Wafer Transfer |
Robotic, Edge Detector and Center Aligner,Wafer Detector at XLL |
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Plasma Load lock |
Optional(LPG-6) |
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Atmospheric Passivation Module |
No |
Yes |
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RF Match |
Upper&Lower |
No |
Upper&Lower |
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RF Split |
No |
Yes |
No |
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RF Generator |
13.56MHz |
400kHz |
13.56MHz |
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Dimension (Etcher System only) |
44″ W x 54″D x 66″H |
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Weight (Etcher System only) |
1700 Lbs |
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