Please provide as much information as possible in the sputtering deposition system survey in PDF at our website and email it to sales@allwin21.com / allwin21corp@gmail.com.The more complete and accurate your responses, the better we can recommend the most suitable sputtering system model or configuration for your specific needs, based on our 45 years of sputtering system experience and hundreds of successful installation worldwide. Completing the survey thoroughly will ensure optimal system performance while avoiding unnecessary options that do not contribute to your application. We greatly appreciate your time and effort.
In mature fabs, customers normally do not ask equipment vendors to supply the vacuum pump or chiller together with the tool. Instead, the standard practice is:
- The equipment vendor provides vacuum and cooling requirements (pumping speed, base pressure, exhaust conditions, heat load, etc.)
- The fab then selects specific pump and chiller models from their approved vendor list, based on their own capability categories and infrastructure standards.
- Different fabs typically standardize on a few pump and chiller models according to their internal specifications, maintenance strategy, and spares management. As a result, they prefer to decide the exact model themselves.
- In addition, the physical location of the pump and chiller (distance from the tool, sub-fab vs. cleanroom, exhaust routing, vibration constraints, etc.) can influence model selection. These factors are normally evaluated by the fab’s facilities and vacuum experts.
