RFQ – Sputter Deposition System Please help fill in the following Customer Survey Form for suitable Sputter Deposition System model and configuration for your applications. Appreciate your time. Thank you very much. 1. Your Name(Required): 2. Your Email(Required): 3. Your Company Name(Required): 4. Company Address: 5. Substrate Sizes(Required): small sample1 inch2 inch3 inch4 inch5 inch6 inch6.125 inch6.25 inch8 inch12 inchOthers 6. Substrate Material(Required): SiSiCGaAsGaNGaInPInPOthersNot sure 7. Amount of Gas lines(Required): ---1 gas line2 gas lines3 gas lines4 gas linesOthersNot sure 8. Sputter Materials (Required) Ag;Al;Al2O3;Au;Cr;CrNx;CrSi2;Cu;Mo;MoSi2;Ni;Nichrome;Pd;Permalloy;Pt; Quartz;Si;Si3N4;Ta;TaNx;Ti;TiNx;Ti/W(10%);W;WNx;Others;Not sure 9. Sputter Type(Required,Multiple): DC MagnetronRF MagnetronDC DiodeRF DiodePulse DCOthersNot sure 10. Cathode Amount(Required): ---1234OthersNot Sure 11. Cathode Size and Shape(Required): ---Delta8 inch circle6 inch circleOthersNot sure 12. Etch Function(Required) : ---With Etch FunctionWithout Etch FunctionOthersNot sure 13. Bias Function(Required): ---RF Bias FunctionDC Bias FunctionWithout Bias FunctionOthersNot sure 14 Co-sputter Function(Required): ---With Co-sputter FunctionWithout Co-sputter FunctionOthersNot sure 15 Reactive Sputter Function(Required): ---With Reactive Sputter FunctionWithout Reactive Sputter FunctionOthersNot sure 16 Turbo Pump for load lock(Required): ---Turbo Pump for load lockWithout Turbo Pump for load lockOthersNot sure 17 IR Lamp Heating function for Degas in load lock(Required): ---Heating in load lockWithout heating in load lockOthersNot sure 18 Lamp Heating function in reactor chamber(Required): ---YesNoOthersNot sure 19.1 Maximum DC Power Watts(Required): ---3KW5KW10KWOthersNot sure 19.2 Maximum RF Power Watts(Required): ---600W1KW2KW3KWOthersNot sure 20. Did you use any Sputtering Equipment which met your requirements? If yes, pls specify brand and model(Required). 21. Do you know Perkin-Elmer Sputtering equipment?If yes, pls tell us which model you know(Required). 22. Special Requirements: Enter the characters shown in the image.