RFQ – Sputter Deposition System

Please help fill in the following Customer Survey Form for suitable Sputter Deposition System model and configuration for your applications. Appreciate your time. Thank you very much.


1. Your Name(Required):

2. Your Email(Required):

3. Your Company Name(Required):

4. Company Address:

5. Which model are you interested in?
---AccuSputter AW-4450Perkin-Elmer 4400Perkin-Elmer 4410Perkin-Elmer 4450OtherNot sure

6. Purchase Schedule(Required):
---In 1 MonthIn 1 to 2 MonthsIn 2 to 3 MonthsIn 3 to 4 monthsIn 4 to 5 MonthsIn 5 to 6 MonthsMore than 6 MonthsOnly for budgetNot sureOthers

7. Budget(Required):
---Less than USD$50,000.00USD$50,000.00 ~ USD$90,000.00USD$90,000.00 ~ USD$150,000.00USD$150,000.00 ~ USD$200,000.00USD$200,000.00 ~ USD$300,000.00USD$300,000.00 ~ USD$400,000.00USD$400,000.00 ~ USD$500,000.00More than USD$500,000.00Not sureOthers

8. Substrate Maximum Size(Required):
---<2 inch2 inch3 inch4 inch5 inch6 inch8 inchMore than 8 inchNot sureOthers

9. Substrate Maximum Thickness(Required):
---Less than 0.2 mm0.2 mm ~ 1.0 mm1.0 mm ~ 1.5 mm1.5 mm ~ 2.0 mm2.0 mm ~ 3.0 mm3.0 mm ~ 6.0 mm6.0 mm ~ 10.0 mmThicker than 10.00 mmNot sureOthers

10. Substrate Material(Required):
 Si SiC GaAs GaN GaInP InP Others Not sure

11. Substrate Shape(Required):
 Round Square Rectangle Abnormity Others Not sure

12. Amount of Gas lines(Required):
---1 gas line2 gas lines3 gas linesMore than 3 gas linesOthersNot sure

13. Sputter Materials (Required)
 Ag; Al; Al2O3; Au; Cr; CrNx; CrSi2; Cu; Mo; MoSi2; Ni; Nichrome; Pd; Permalloy; Pt; Quartz; Si; Si3N4; Ta; TaNx; Ti; TiNx; Ti/W(10%); W; WNx; Others; Not sure

14. Sputter Type(Required,Multiple):
 DC Magnetron RF Magnetron DC Diode RF Diode Others Not sure

15. Cathode Amount(Required):
---1234OthersNot Sure

16. Cathode Size and Shape(Required):
---Delta8 inch circle6 inch circleOthersNot sure

17. Etch Function :
---With Etch FunctionWithout Etch FunctionOthersNot sure

18. Bias Function:
---RF Bias FunctionDC Bias FunctionWithout Bias FunctionOthersNot sure

19 Co-sputter Function
---With Co-sputter FunctionWithout Co-sputter FunctionOthersNot sure

20. Special Requirements:

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