RFQ – Sputter Deposition System

Please help fill in the following Customer Survey Form for suitable Sputter Deposition System model and configuration for your applications. Appreciate your time. Thank you very much.


1. Your Name(Required):

2. Your Email(Required):

3. Your Company Name(Required):

4. Company Address:

5. Which model are you interested in?


6. Purchase Schedule(Required):


7. Budget(Required):


8. Substrate Maximum Size(Required):


9. Substrate Maximum Thickness(Required):


10. Substrate Material(Required):
 Si SiC GaAs GaN GaInP InP Others Not sure

11. Substrate Shape(Required):
 Round Square Rectangle Abnormity Others Not sure

12. Amount of Gas lines(Required):


13. Sputter Materials (Required)
 Ag; Al; Al2O3; Au; Cr; CrNx; CrSi2; Cu; Mo; MoSi2; Ni; Nichrome; Pd; Permalloy; Pt; Quartz; Si; Si3N4; Ta; TaNx; Ti; TiNx; Ti/W(10%); W; WNx; Others; Not sure

14. Sputter Type(Required,Multiple):
 DC Magnetron RF Magnetron DC Diode RF Diode Others Not sure

15. Cathode Amount(Required):


16. Cathode Size and Shape(Required):


17. Etch Function :


18. Bias Function:


19 Co-sputter Function


20. Special Requirements:

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