Sputter Selection and Configuration Form Sputter Selection and Configuration Form Please provide the following process requirements and planning information. Based on your application requirements, Allwin21 will recommend a suitable sputtering system model and configuration. Contact Information 1. Your Name (Required): 2. Your Email (Required): 3. Company Name (Required): 4. Company Address: Process Requirements 5. Deposition Materials (Required): AlAl+Ti/W+AgAl2O3AuCCrCr/CoCr/AuCr+CuCr/SiCr/SiOCr/SiO2InSnOMoMoSi2Mo2Si5Mo5Si3NiNi/CrNi+Ni/CrNi/FeNi/Fe+Cu+SiO2PtSiCSiO2SiO2+O2Si+N2 / Si3N4Si+N2+B4CTaTaCTa+AuTaSi2Ta+SiO2TiO2TiO2+CrTi+AuTi+Au+NiTi/WTi/W+AuTi/W+Au+TaTi/W+Al/SiTi/W+Ni/Cr+AuTi/W+PtWW+Al2O3ZnZnO2ZrInconelOtherNot Sure 6. Substrate Material: SiSiCGaAsGaNGaInPInPGlassSapphireCeramicOtherNot Sure 7. Substrate Size / Maximum Size (Required): Small Sample2 inch3 inch4 inch5 inch6 inch8 inchOtherNot Sure 8. Substrate Thickness: ≤200 µm200–1000 µm>1000 µmNot Sure 9. Film Thickness Requirement (A): 10. Process Gases and MFC Range: Ar-100 SCCMN₂-10 SCCMO₂-10 SCCMOther 11. Base Pressure Requirement( 5x10-7 torr): 12. Process Pressure Requirement (mtorr): 13. Required Sputter Rate (A/min): 14. Required Uniformity (%): 15. Required Repeatability (%): 16. Current or Previous Sputtering System (Manufacturer and Model): System Configuration Requirements 17. Sputter Power Type: RFDCPulsed DCNot Sure 18. Sputter Type: DiodeMagnetronReactive SputteringCo-SputteringNot Sure 19. Cathode Type: 8-inch CircularDELTAOther 20. Plasma Etch / Preclean Function: RequiredNot RequiredNot Sure 21. RF Bias Function: RequiredNot RequiredNot Sure 22. Load Lock Heating for Degas (200°C): RequiredNot RequiredNot Sure 23. Reactor Heating Function (300°C): RequiredNot RequiredNot Sure 24. Reactor High Vacuum Pump Preference: Cryo Pump with CompressorTurbo PumpNot Sure 25. Load Lock Pump: Turbo PumpNot Sure Planning 26. Throughput Requirement: R&D<5 wafers/day5–10 wafers/day10–20 wafers/day20–50 wafers/day>50 wafers/dayNot Sure 27. Approximate Budget: < USD $200KUSD $200K–400KUSD $400K–600KUSD $600K–800K> USD $800KNot Sure 28. Approximate Purchase Timeline: <1 month1–3 months3–6 months6–12 months>12 monthsNot Sure 29. Future Expansion Plan: Additional Information 30. Please share any additional application details, challenges, previous experience, process concerns, or future plans that may help us better understand your requirements. Enter the characters shown in the image: