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RFQ – Sputter Deposition System

    Please help fill in the following Customer Survey Form for suitable Sputter Deposition System model and configuration for your applications. Appreciate your time. Thank you very much.

    1. Your Name(Required):

    2. Your Email(Required):

    3. Your Company Name(Required):

    4. Company Address:

    5. Substrate Sizes(Required):
    small sample1 inch2 inch3 inch4 inch5 inch6 inch6.125 inch6.25 inch8 inch12 inchOthers
    6. Substrate Material(Required):
    SiSiCGaAsGaNGaInPInPOthersNot sure
    7. Amount of Gas lines(Required):

    8. Sputter Materials (Required)
    Ag;Al;Al2O3;Au;Cr;CrNx;CrSi2;Cu;Mo;MoSi2;Ni;Nichrome;Pd;Permalloy;Pt; Quartz;Si;Si3N4;Ta;TaNx;Ti;TiNx;Ti/W(10%);W;WNx;Others;Not sure
    9. Sputter Type(Required,Multiple):
    DC MagnetronRF MagnetronDC DiodeRF DiodePulse DCOthersNot sure
    10. Cathode Amount(Required):

    11. Cathode Size and Shape(Required):

    12. Etch Function(Required) :

    13. Bias Function(Required):

    14 Co-sputter Function(Required):

    15 Reactive Sputter Function(Required):

    16 Turbo Pump for load lock(Required):

    17 IR Lamp Heating function for Degas in load lock(Required):

    18 Lamp Heating function in reactor chamber(Required):

    19.1 Maximum DC Power Watts(Required):

    19.2 Maximum RF Power Watts(Required):

    20. Did you use any Sputtering Equipment which met your requirements? If yes, pls specify brand and model(Required).

    21. Do you know Perkin-Elmer Sputtering equipment?If yes, pls tell us which model you know(Required).

    22. Special Requirements:

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