Product Description
Gridless DC Ion Source
OIS-GL is low voltage, high current gridless ion source, and has been developed for substrate cleaning, ion assisted deposition, etc.
Various optical filters can be produced by installing it in Gener-1300 or the OTFC series.
Features
- Well-suited to substrate cleaning and resin substrate coating.
- Wide beam angle at low energy and high current, designed for large area over φ1200.
- High operational stability by improving the cooling method.
Specifications
| Model | OIS-GL |
| Size | φ163mm × 200mm (H) |
| Discharge voltage | 50V – 300V |
| Discharging current (max) | 8A |
| Gas flow rate | 5sccm – 50sccm（ argon） 10sccm – 100sccm（ oxygen） |
| Pressure | 3.5 × 10-2 Pa or lower |
| Warter-cooling | Anode and beam unit |
| Neutralizer | Tungsten (W) filament |
