Gridless DC Ion Source
OIS-GL is low voltage, high current gridless ion source, and has been developed for substrate cleaning, ion assisted deposition, etc.
Various optical filters can be produced by installing it in Gener-1300 or the OTFC series.
- Well-suited to substrate cleaning and resin substrate coating.
- Wide beam angle at low energy and high current, designed for large area over φ1200.
- High operational stability by improving the cooling method.
|Size||φ163mm × 200mm (H)|
|Discharge voltage||50V – 300V|
|Discharging current (max)||8A|
|Gas flow rate||5sccm – 50sccm（ argon）
10sccm – 100sccm（ oxygen）
|Pressure||3.5 × 10-2 Pa or lower|
|Warter-cooling||Anode and beam unit|
|Neutralizer||Tungsten (W) filament|