Product Description
OTFC series, based on the ion-assisted technology, are the most suitable coating system for producing AR coatings and optical filters such as edge filters, band pass filters etc.
Key Features
-
- Chamber size: φ 600mm-φ1800mm
- 60-point optical thickness monitor.
- RF ion source achieving uniformed, larger ion beam distribution over a larger area at high ion current density.
- Over 100 layers can be deposited by 2 EB guns and multi-point crucible hearth or annular hearth.
- Auto-deposition control system for fully automated process.
- Center-driving or planetary substrate dome is selectable.
- Diffusion pumps plus Polycold or Cryo- pumps.
Specifications
Model | OTFC-1300CBI/DBI |
Vacuum Chamber | SUS304, φ1300mm×1610mm (H) |
Substrate Dome Size | φ1130mm |
Substrate Dome Rotation Speed | 10 rpm to 50 rpm (Variable) |
Optical Film Thickness Control System | HOM2-R-VIS350A High-precision Optical Monitor Wavelength range: 350nm to 1100nm Reflection/Transmittance |
Crystal Film Thickness Monitor | XTC/3 plus 6-point rotary sensor |
Evaporation Source | EB source: 2 units |
Ion Source | 17 cm RF ion source |
Vacuum System | Roughing Pump, 2 Diffusion Pumps + Polycold Or 2 Cryo Pumps + Cryo Trap |
Performance
Ultimate Pressure | 7.0×10-5 Pa or lower |
Pump Down Rate | 15 minutes (Atm. to 1.3×10-3 Pa) |
Substrate Heater | 350℃ (max.) |
Utility
Layout Dimensions | 5000mm (W)×6500mm (D)×3500mm (H) approx. |
Power Requirements | 3-phase, 200V, 50/60Hz, 100kVA approx. |
Cooling Water Flow Rate | 140ℓ/min. or greater |
Compressed Air Pressure | 0.5MPa or higher |
Gross Weight | 8500kg approx. |