OTFC-PX, equipped with a planetary dome and ion source is suitable for coating a reflector and lenses with high curvature.
- Planetary dome improves coating uniformity over substrate.
- Dome angle can be inclined in accordance with lens curvature.
- IAD system greatly improves film quality.
- High precision spectrum property at spherical substrate can be obtained at high accuracy by optical monitor.
- Large size chamber (1800 mm in diameter) with planetary dome increases productivity.