Product Description
COFC-1300 is a continuous optical thin films coater consisting of three chambers. Transferring work pieces without breaking vacuum, this can mass-produce continuously the optical filters.
Key Feature
- Non-vibrating carrier (dome) transfer system
- Central rotation system to improve rotational precision and to restrain particle generation
- Max rotational speed at 20rpm to improve thickness controllability
- 12 points type high precision optical thickness monitor
- Quartz crystal microbalance monitor (max 80 monitors)
- Sophisticated film quality by RF ion source
- Automatic dome mounting system (Automatic carrier transfer system as option). Extra vacuum chamber as option
Specifications
| Vacuum chamber (3 chamber type) |
Load chamber + Deposition chamber + Unload chamber (Selectable loading/unloading type) |
| Vacuum load/unload chambers (2 chambers) |
SUS 304, 1500mm (L) × 1500mm (D) × 1560mm (H) approx. |
| Deposition chamber (w/ 2 gate valves) |
SUS 304, 1500mm (L) × 1500mm (D) × 1560mm (H) approx. |
| Ultimate vacuum pressure | ≤1.5 × 10-4 Pa |
| Ultimate evacuation time in countinuous runs |
≤5 – 10 min (7.0 × 10-3 Pa) |
| Substrate dome | φ 1200 mm |
| Rotational speed | 5 – 20 rpm |
| Evaporator (two sources) | Electron gun (w/automatic source material feeding system) |
| RF ion source | φ 17cm |
Utility Requirements
| Power Requirements | 3phase+G、200V ± 5％、140kVA approx.、50/60Hz |
| Cooling Water Flow Rate | ≥200ℓ/min each of 3 inlets |
| Gross Weight | 25000 kg approx. |
