The RPD series is a reactive plasma deposition system and can mass-produce high performance, functional LED films (ITO and AlN) at low cost.
- Realizing both activation and evaporation of deposition materials by employing a reactive plasma source.
- High quality crystalline film by applying optimum energy.
- Mass-production at low temperature and low cost.
|1000 mm × H1165 mm
|φ 870 mm
|Max. Dome Rotation Speed
|10 – 30 rpm
|Crystal Flim Thicness Monitor
|6 point rotary sensor
|Reactive Plasma Source