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Tegal 901e Tegal 903e-Fully Refurbished and Upgraded By Allwin21

Tegal 90Xe Spart Parts List-Sender Receiver

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Product Description

Tegal 90Xe Spart Parts (Tegal 901e Spare Parts, Tegal 903e Spare Parts) List-Sender Receiver

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39-848-001 Stage block, 3 inch wafer size
40-374-001 Stop Block, 3 inch wafer size
39-847-001 Hook, 3 inch wafer size
39-852-005 Back Stop, 3 inch wafer size
39-853-005 Spatula, 3 inch wafer size
30-225-001 Spatula Assy, 3 inch wafer size
39-848-005 Stage block , 4 inch wafer size
40-374-002 Stop Block , 4 inch wafer size
39-847-002 Hook , 4 inch wafer size
39-852-004 Back Stop , 4 inch wafer size
39-853-004 Spatula , 4 inch wafer size
30-225-002 Spatula Assy , 4 inch wafer size
39-848-003 Stage block,5 inch wafer size
40-374-003 Stop Block,5 inch wafer size
39-847-003 Hook,5 inch wafer size
39-852-001 Back Stop,5 inch wafer size
39-853-001 Spatula,5 inch wafer size
30-225-003 Spatula Assy,5 inch wafer size
39-848-004 Stage block , 6 inch wafer size
40-374-004 Stop Block , 6 inch wafer size
39-847-004 Hook , 6 inch wafer size
39-852-002 Back Stop , 6 inch wafer size
39-853-002 Spatula , 6 inch wafer size
30-225-004 Spatula Assy , 6 inch wafer size
30-225-001 Spatula Assy 3″
30-225-002 Spatula Assy 4″
30-225-003 Spatula Assy 5″
30-225-004 Spatula Assy 6″
31-165-005 STEPPER MOTOR ELEV 9XX
31-165-006 STEPPER MOTOR CARR 9XX
31-165-012 STPR MTR SPAT I9XX
31-173-001 SOLENOID VALVE SDR/RCVR 900
37-521-001 Sensor Bracket
37-817-001 BLOCK TENSION GEAR I900
39-637-001 BLOCK PULLEY LDR 900
39-637-002 BLOCK IDLER GEAR I900
39-717-001 SCREW THUMB
39-847-001 Hook 3″
39-847-002 Hook 4″
39-847-003 Hook 5″
39-847-004 Hook 6″
39-848-001 BLOCK STAGE 3″ CAT WSKR 9XX
39-848-001 Stage Block 3″
39-848-003 BLOCK STAGE 5″ CAT WSKR 9XX
39-848-003 Stage Block 5″
39-848-004 BLOCK STAGE 6″ CAT WSKR 9XX
39-848-004 Stage Block 6″
39-848-005 BLOCK STAGE 4″ CAT WSKR RH 9XX
39-848-005 Stage Block 4″
39-852-001 Back Stop 5″
39-852-002 Back Stop 6″
39-852-004 Back Stop 4″
39-852-005 Back Stop 3″
39-853-001 Spatula 5
39-853-002 Spatula 6″
39-853-004 Spatula 4″
39-853-005 Spatula 3″
39-854-001 ARM SNSR 9XX
39-855-001 BLOCK BEARING ELEV 9XX
39-856-001 BLOCK PLATFORM 9XX
39-860-001 CARRIAGE SPAT 9XX
39-860-004 CARRIAGE SPAT
39-868-001 BLOCK SNSR ADJUST 9XX
40-374-001 Stop Block 3″
40-374-002 Stop Block 4″
40-374-003 Stop Block 5″
40-374-004 Stop Block 6″
40-375-001 PAD ISOLATION 9XX
41-118-003 FLAG CARRIAGE SPAT (SUPER) 9XX
41-177-001 FLAG CASS 9XX
41-190-001 BRKT SNSR ADJ FR 9XX
42-553-001 Sensor Bracket
46-438-001 PLATE PCB LOADER MT 900
49-047-001 PIN ADJ SPATULA 9XX
50-056-001 SCREW LEAD ELEV 9XX
53-055-001 SHAFT SPAT 9XX
54-01-01 SPRING FLAG 900
55-08-01 BELT SPAT 9XX
56-042-001 NUT ELEV 9XX
57-027-001 PULLEY STAGE LOADER 900
57-028-001 PULLEY CASSETTE LOADER 900
80-080-052 CYL,DBL,PANCAKE,1 1/2S,2B
80-095-696 Dual Beam Sensor
80-127-062 SCR PNH PH 10-32X3/8L PL SST
80-127-641 SCR SET SCH 8-32X1/4L LKG SST
80-127-827 SCR SET SCH 6-32X1L PL SST
80-127-867 SCR SET SCH 10-32X1L PL SST
80-162-004 WASHER,FLAT,#10,SST
80-163-024 WASHER LKG SPRING #8 SST
80-170-042 STDF M/F HX 4-40X1/4X1/4 NYLON
80-195-154 FTNG STR 10-32M 1/4OD T BRB BR
80-197-040 VALVE NDL ADJ CONT 10-32P BRS
80-198-074 VALVE SHTL/QIK EXH 10-32M/F P
80-200-031 SHAFT PRCN 1/4DIA 1 1/2L SST
80-200-039 SHAFT PRCN 3/16DIA 1 1/2L SST
80-200-095 COLLAR 1/4B 1/2OD SET SCR SST
80-200-116 SFT PRCN,3/16 DIA X 1.25LG SST
80-200-127 BBRG FLG DSHLD 3/16B 5/16OD SS
80-200-139 COLLAR 3/16B 3/8OD SET SCR SST
80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL
80-200-187 PULLEY 1/4B 20GRV 40DP 5/16B
80-200-188 PULLEY 1/4B 40GRV 40DP 5/16B
80-200-207 PIN SPR 3/32OD 1L STL
80-200-302 SPR CPRSN .022DIA 9/16L MW
80-200-403 GSKT .190ID .035THK LEAD
80-200-763 GEAR FLEX CHAIN 32 PITCH 26 T
80-200-765 GEAR FLEX CHAIN,32P 20T 3/16ID
80-200-766 SHAFT EXTENSION 1/4 DIAMETER
80-200-767 SPLIT HUB CLAMP 1/4 SHAFT
80-200-768 BBRG FLG DSHLD 3/16BX3/8OD SST
80-202-297 BELT 1/4W 115GRV 40DP PEU/POL
80-202-343 BSHG BALL 3/8B 5/8OD 7/8L DEL
80-202-770 CHAIN GEAR DRIVE,32P,50.265LG
93-936-002 GAAS Cap Sensor
94-228-004 HARN WAFER SENSOR CAP 9XX
94-400-001 HARN SNSR ALL SNSR 9XX
99-197-002 PCB SSL-2 SNSR SLOT 9XX
99-246-003 PCB EIA-3 ELEV INTCON T/903EJ
99-247-003 PCB SPI-3 SPAT INTFC T/90XEJ
39-854-001 ARM SNSR 9XX
39-852-005 Back Stop 3″
39-852-004 Back Stop 4″
39-852-001 Back Stop 5″
39-852-002 Back Stop 6″
80-200-127 BBRG FLG DSHLD 3/16B 5/16OD SS
80-200-768 BBRG FLG DSHLD 3/16BX3/8OD SST
80-202-297 BELT 1/4W 115GRV 40DP PEU/POL
55-08-01 BELT SPAT 9XX
39-855-001 BLOCK BEARING ELEV 9XX
39-637-002 BLOCK IDLER GEAR I900
39-856-001 BLOCK PLATFORM 9XX
39-637-001 BLOCK PULLEY LDR 900
39-868-001 BLOCK SNSR ADJUST 9XX
39-848-001 BLOCK STAGE 3″ CAT WSKR 9XX
39-848-005 BLOCK STAGE 4″ CAT WSKR RH 9XX
39-848-003 BLOCK STAGE 5″ CAT WSKR 9XX
39-848-004 BLOCK STAGE 6″ CAT WSKR 9XX
37-817-001 BLOCK TENSION GEAR I900
41-190-001 BRKT SNSR ADJ FR 9XX
80-202-343 BSHG BALL 3/8B 5/8OD 7/8L DEL
80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL
39-860-004 CARRIAGE SPAT
39-860-001 CARRIAGE SPAT 9XX
80-202-770 CHAIN GEAR DRIVE,32P,50.265LG
80-200-095 COLLAR 1/4B 1/2OD SET SCR SST
80-200-139 COLLAR 3/16B 3/8OD SET SCR SST
80-080-052 CYL,DBL,PANCAKE,1 1/2S,2B
80-095-696 Dual Beam Sensor
41-118-003 FLAG CARRIAGE SPAT (SUPER) 9XX
41-177-001 FLAG CASS 9XX
80-195-154 FTNG STR 10-32M 1/4OD T BRB BR
93-936-002 GAAS Cap Sensor
80-200-763 GEAR FLEX CHAIN 32 PITCH 26 T
80-200-765 GEAR FLEX CHAIN,32P 20T 3/16ID
80-200-403 GSKT .190ID .035THK LEAD
94-400-001 HARN SNSR ALL SNSR 9XX
94-228-004 HARN WAFER SENSOR CAP 9XX
39-847-001 Hook 3″
39-847-002 Hook 4″
39-847-003 Hook 5″
39-847-004 Hook 6″
56-042-001 NUT ELEV 9XX
40-375-001 PAD ISOLATION 9XX
99-246-003 PCB EIA-3 ELEV INTCON T/903EJ
99-247-003 PCB SPI-3 SPAT INTFC T/90XEJ
99-197-002 PCB SSL-2 SNSR SLOT 9XX
49-047-001 PIN ADJ SPATULA 9XX
80-200-207 PIN SPR 3/32OD 1L STL
46-438-001 PLATE PCB LOADER MT 900
80-200-187 PULLEY 1/4B 20GRV 40DP 5/16B
80-200-188 PULLEY 1/4B 40GRV 40DP 5/16B
57-028-001 PULLEY CASSETTE LOADER 900
57-027-001 PULLEY STAGE LOADER 900
80-127-062 SCR PNH PH 10-32X3/8L PL SST
80-127-867 SCR SET SCH 10-32X1L PL SST
80-127-827 SCR SET SCH 6-32X1L PL SST
80-127-641 SCR SET SCH 8-32X1/4L LKG SST
50-056-001 SCREW LEAD ELEV 9XX
39-717-001 SCREW THUMB
37-521-001 Sensor Bracket
42-553-001 Sensor Bracket
80-200-116 SFT PRCN,3/16 DIA X 1.25LG SST
80-200-766 SHAFT EXTENSION 1/4 DIAMETER
80-200-031 SHAFT PRCN 1/4DIA 1 1/2L SST
80-200-039 SHAFT PRCN 3/16DIA 1 1/2L SST
53-055-001 SHAFT SPAT 9XX
31-173-001 SOLENOID VALVE SDR/RCVR 900
39-853-005 Spatula 3″
39-853-004 Spatula 4″
39-853-001 Spatula 5
39-853-002 Spatula 6″
30-225-001 Spatula Assy 3″
30-225-002 Spatula Assy 4″
30-225-003 Spatula Assy 5″
30-225-004 Spatula Assy 6″
80-200-767 SPLIT HUB CLAMP 1/4 SHAFT
80-200-302 SPR CPRSN .022DIA 9/16L MW
54-01-01 SPRING FLAG 900
39-848-001 Stage Block 3″
39-848-005 Stage Block 4″
39-848-003 Stage Block 5″
39-848-004 Stage Block 6″
80-170-042 STDF M/F HX 4-40X1/4X1/4 NYLON
31-165-006 STEPPER MOTOR CARR 9XX
31-165-005 STEPPER MOTOR ELEV 9XX
40-374-001 Stop Block 3″
40-374-002 Stop Block 4″
40-374-003 Stop Block 5″
40-374-004 Stop Block 6″
31-165-012 STPR MTR SPAT I9XX
80-197-040 VALVE NDL ADJ CONT 10-32P BRS
80-198-074 VALVE SHTL/QIK EXH 10-32M/F P
80-163-024 WASHER LKG SPRING #8 SST
80-162-004 WASHER,FLAT,#10,SST

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 PLEASE CONTACT US IF YOU NEED TEGAL 901E SPARE PARTS, TEGAL 903E SPARE PARTS

Allwin21 Corp. has been focusing on providing solutions and enhancements toTegal 901e, Tegal 903e, Tegal 901e TTW, Tegal 903e TTW used plasma Etch RIE semiconductor process equipment. These OEM Etch RIE semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC, solid robotic wafer transfer system and new critical components to achieve the goal of giving our customers a production edge with right cost. 

 

 

The robust integrated robotic wafer transfer for Tegal 901e Tegal 90e

Tegal 901e Plasma Etch RIE

Manufacturer:Tegal | Condition:Fully Refurbished&Upgraded By Allwin21 | Wafer Size:3″/4″/5″/6″Capability |  Wafer loading: Automatic, Original Belt-Shuttle-Wafer-Transfer OR Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power:RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/RIE/Stand Alone | Etch Materials: Polysilicon, Refractory metal silicides and Nitride | Gas Lines:1~4 lines capability with customized MFCs range

 

Tegal 903e Plasma Etch RIE

Manufacturer: Tegal | Condition: Fully Refurbished&Upgraded By Allwin21 | Wafer Size: 3″/4″/5″/6″Capability |  Wafer loading: Automatic, Original Belt-Shuttle-Wafer-Transfer OR Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process/Plasma Etch/RIE/Stand Alone | Etch Materials: Silicon Oxide | Gas Lines: 1~4 lines capability with customized MFCs range

 

Tegal 901e TTW Plasma Etch RIE

Manufacturer:Tegal | Condition:Fully Refurbished&Upgraded By Allwin21 | Wafer Size:3″/4″/5″/6″Capability |  Wafer loading: Automatic, Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/RIE/Through-The-Wall(TTW) | Etch Materials: Polysilicon, Refractory metal silicides and Nitride | Gas Lines:1~4 lines capability with customized MFCs range

 

Tegal 903e TTW Plasma Etch RIE

Manufacturer: Tegal | Condition: Fully Refurbished&Upgraded By Allwin21 | Wafer Size: 3″/4″/5″/6″Capability |  Wafer loading: Automatic, Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process/Plasma Etch/RIE/Through-The-Wall(TTW) | Etch Materials: Silicon Oxide | Gas Lines: 1~4 lines capability with customized MFCs range

 

Tegal 901e Tegal 903e Upgrade Kits (Allwin21 Corp.)

The Upgrade kit for Tegal® 901e Tegal® 903e includes an advanced AW-900 System Control with touch screen operator interface or 17″ LCD Monitor , New PC with Allwin21 AW-900 software and new main control board. 

 

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