Product Description
Tegal 90Xe Spart Parts (Tegal 901e Spare Parts, Tegal 903e Spare Parts) List-Pressure Module
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| 31-328-001 | SWITCH VAC VALVE INTLK 9XX |
| 31-375-001 | Atmospheric Pressure Sensor |
| 33-080-003 | TUBE VAC W/EXT BLST 9XXE |
| 33-267-005 | Pressure Vacuum Manifold |
| 39-376-002 | BLOCK MANF QDISC 90XE |
| 46-605-001 | PLATE SHIM NUPRO 9XXE/15XXE |
| 80-080-093 | FLTR GAS .01MICRON 1/4VCR 3/54 |
| 80-095-370 | PRESS XDCR ABS 0-10TORR VCR CA |
| 80-095-793 | UPC N2 2SLM VCR 8130 |
| 80-095-794 | UPC N2 225SCCM VCR 8130 |
| 80-192-139 | GSKT,1/4OD T, UNPLATED NICKEL |
| 80-192-192 | FTNG 1-TOUCH ELB 1/4T 1/8MNPT |
| 80-195-101 | SEAL NW40 CTR-RING W/V-OR AL |
| 80-195-102 | CLAMP,NW40,1 1/2OD T,HNG,ALUM |
| 80-195-159 | FTNG CPLG BODY 1/8F 1/4T PNL |
| 80-195-168 | FTNG CPLG INSR 1/8F 1/8T S-OFF |
| 80-195-310 | GSKT VCR 1/2OD T SST |
| 80-195-500 | FTNG VCR CAP 1/4″ SST |
| 83-096-002 | VALVE,MOD 80-198-045 T/9XXE |
| 80-195-102 | CLAMP,NW40,1 1/2OD T,HNG,ALUM |
| 80-080-093 | FLTR GAS .01MICRON 1/4VCR 3/54 |
| 80-192-192 | FTNG 1-TOUCH ELB 1/4T 1/8MNPT |
| 80-195-159 | FTNG CPLG BODY 1/8F 1/4T PNL |
| 80-195-168 | FTNG CPLG INSR 1/8F 1/8T S-OFF |
| 80-195-500 | FTNG VCR CAP 1/4″ SST |
| 80-195-310 | GSKT VCR 1/2OD T SST |
| 80-192-139 | GSKT,1/4OD T, UNPLATED NICKEL |
| 46-605-001 | PLATE SHIM NUPRO 9XXE/15XXE |
| 80-095-370 | PRESS XDCR ABS 0-10TORR VCR CA |
| 33-267-005 | Pressure Vacuum Manifold |
| 80-195-101 | SEAL NW40 CTR-RING W/V-OR AL |
| 31-328-001 | SWITCH VAC VALVE INTLK 9XX |
| 33-080-003 | TUBE VAC W/EXT BLST 9XXE |
| 80-095-793 | UPC N2 2SLM VCR 8130 |
| 80-095-794 | UPC N2 225SCCM VCR 8130 |
| 83-096-002 | VALVE,MOD 80-198-045 T/9XXE |
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PLEASE CONTACT US IF YOU NEED TEGAL 901E SPARE PARTS, TEGAL 903E SPARE PARTS
Allwin21 Corp. has been focusing on providing solutions and enhancements toTegal 901e, Tegal 903e, Tegal 901e TTW, Tegal 903e TTW used plasma Etch RIE semiconductor process equipment. These OEM Etch RIE semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC, solid robotic wafer transfer system and new critical components to achieve the goal of giving our customers a production edge with right cost.
Tegal 901e Plasma Etch RIE
Manufacturer:Tegal | Condition:Fully Refurbished&Upgraded By Allwin21 | Wafer Size:3″/4″/5″/6″Capability | Wafer loading: Automatic, Original Belt-Shuttle-Wafer-Transfer OR Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power:RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/RIE/Stand Alone | Etch Materials: Polysilicon, Refractory metal silicides and Nitride | Gas Lines:1~4 lines capability with customized MFCs range
Tegal 903e Plasma Etch RIE
Manufacturer: Tegal | Condition: Fully Refurbished&Upgraded By Allwin21 | Wafer Size: 3″/4″/5″/6″Capability | Wafer loading: Automatic, Original Belt-Shuttle-Wafer-Transfer OR Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process/Plasma Etch/RIE/Stand Alone | Etch Materials: Silicon Oxide | Gas Lines: 1~4 lines capability with customized MFCs range
Tegal 901e TTW Plasma Etch RIE
Manufacturer:Tegal | Condition:Fully Refurbished&Upgraded By Allwin21 | Wafer Size:3″/4″/5″/6″Capability | Wafer loading: Automatic, Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/RIE/Through-The-Wall(TTW) | Etch Materials: Polysilicon, Refractory metal silicides and Nitride | Gas Lines:1~4 lines capability with customized MFCs range
Tegal 903e TTW Plasma Etch RIE
Manufacturer: Tegal | Condition: Fully Refurbished&Upgraded By Allwin21 | Wafer Size: 3″/4″/5″/6″Capability | Wafer loading: Automatic, Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process/Plasma Etch/RIE/Through-The-Wall(TTW) | Etch Materials: Silicon Oxide | Gas Lines: 1~4 lines capability with customized MFCs range
Tegal 901e Tegal 903e Upgrade Kits (Allwin21 Corp.)
The Upgrade kit for Tegal® 901e Tegal® 903e includes an advanced AW-900 System Control with touch screen operator interface or 17″ LCD Monitor , New PC with Allwin21 AW-900 software and new main control board.
