Product Description
Tegal 90Xe Spart Parts (Tegal 901e Spare Parts, Tegal 903e Spare Parts) List-Shuttle
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| 31-165-005 | STEPPER MOTOR 1.8D/24V |
| 31-165-012 | STPR MTR I9XX |
| 31-193-004 | SOL VALVE ASSY 903EJ |
| 31-319-001 | SNSR CHUCK 9XXE |
| 39-350-002 | BLOCK XPORT BEARING 90X |
| 39-699-001 | STRAP CLAMP 90X |
| 39-717-001 | SCREW THUMB |
| 40-287-001 | CLAMP BELT DRIVE 900 |
| 41-037-001 | FLAG SHUTTLE |
| 41-047-002 | FLAG SHUTTLE CTR 90X |
| 44-375-001 | COVER PCB SHUTTLE INTFC 900 |
| 55-04-01 | BELT DRIVE CARRIAGE 9XX |
| 80-127-827 | SCR SET SCH 6-32X1L PL SST |
| 80-165-004 | WSHR THR .252X568X.064 HDN STL |
| 80-170-029 | STDF M/F HX 6-32X1 1/16LX1/4 N |
| 80-172-004 | SPCR RD #10CLRX1/4LX5/16 AL |
| 80-195-166 | FTNG CPLG BODY 1/8F 1/8T PNL |
| 80-200-031 | SHAFT PRCN 1/4DIA 1 1/2L SST |
| 80-200-095 | COLLAR 1/4B 1/2OD SET SCR SST |
| 80-200-121 | BBRG FLG DSHLD 1/4B 5/16OD SS |
| 80-200-144 | BSHG BALL 3/8B 5/8OD 7/8L STL |
| 80-200-177 | SHAFT PRCN 3/8DIA 19 3/8L SST |
| 80-200-302 | SPR CPRSN .022DIA 9/16L MW |
| 80-202-034 | GROMMET 5/16ID 1/2DIA HOLE |
| 80-202-046 | GROMMET 5/16ID 7/16DIA HOLE |
| 80-202-768 | CHAIN,GEAR DR 32PITCH 36.334LG |
| 83-084-001 | SPR GND SHTL 80-200-109 |
| 93-217-001 | CABLE DBL SNSR 9XX |
| 94-136-002 | HARN SHUTTLE POS 9XX |
| 99-176-001 | PCB SNS-1 SNSR 15 6500 |
| 99-224-001 | PCB CSN-1 CTR SNSR 9XX |
| 99-287-003 | PCB SST-3 SHTL INTFC STDT/9XXE |
| 80-200-121 | BBRG FLG DSHLD 1/4B 5/16OD SS |
| 55-04-01 | BELT DRIVE CARRIAGE 9XX |
| 39-350-002 | BLOCK XPORT BEARING 90X |
| 80-200-144 | BSHG BALL 3/8B 5/8OD 7/8L STL |
| 93-217-001 | CABLE DBL SNSR 9XX |
| 80-202-768 | CHAIN,GEAR DR 32PITCH 36.334LG |
| 40-287-001 | CLAMP BELT DRIVE 900 |
| 80-200-095 | COLLAR 1/4B 1/2OD SET SCR SST |
| 44-375-001 | COVER PCB SHUTTLE INTFC 900 |
| 41-037-001 | FLAG SHUTTLE |
| 41-047-002 | FLAG SHUTTLE CTR 90X |
| 80-195-166 | FTNG CPLG BODY 1/8F 1/8T PNL |
| 80-202-034 | GROMMET 5/16ID 1/2DIA HOLE |
| 80-202-046 | GROMMET 5/16ID 7/16DIA HOLE |
| 94-136-002 | HARN SHUTTLE POS 9XX |
| 99-224-001 | PCB CSN-1 CTR SNSR 9XX |
| 99-176-001 | PCB SNS-1 SNSR 15 6500 |
| 99-287-003 | PCB SST-3 SHTL INTFC STDT/9XXE |
| 80-127-827 | SCR SET SCH 6-32X1L PL SST |
| 39-717-001 | SCREW THUMB |
| 80-200-031 | SHAFT PRCN 1/4DIA 1 1/2L SST |
| 80-200-177 | SHAFT PRCN 3/8DIA 19 3/8L SST |
| 31-319-001 | SNSR CHUCK 9XXE |
| 31-193-004 | SOL VALVE ASSY 903EJ |
| 80-172-004 | SPCR RD #10CLRX1/4LX5/16 AL |
| 80-200-302 | SPR CPRSN .022DIA 9/16L MW |
| 83-084-001 | SPR GND SHTL 80-200-109 |
| 80-170-029 | STDF M/F HX 6-32X1 1/16LX1/4 N |
| 31-165-005 | STEPPER MOTOR 1.8D/24V |
| 31-165-012 | STPR MTR I9XX |
| 39-699-001 | STRAP CLAMP 90X |
| 80-165-004 | WSHR THR .252X568X.064 HDN STL |
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PLEASE CONTACT US IF YOU NEED TEGAL 901E SPARE PARTS, TEGAL 903E SPARE PARTS
Allwin21 Corp. has been focusing on providing solutions and enhancements toTegal 901e, Tegal 903e, Tegal 901e TTW, Tegal 903e TTW used plasma Etch RIE semiconductor process equipment. These OEM Etch RIE semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC, solid robotic wafer transfer system and new critical components to achieve the goal of giving our customers a production edge with right cost.
Tegal 901e Plasma Etch RIE
Manufacturer:Tegal | Condition:Fully Refurbished&Upgraded By Allwin21 | Wafer Size:3″/4″/5″/6″Capability | Wafer loading: Automatic, Original Belt-Shuttle-Wafer-Transfer OR Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power:RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/RIE/Stand Alone | Etch Materials: Polysilicon, Refractory metal silicides and Nitride | Gas Lines:1~4 lines capability with customized MFCs range
Tegal 903e Plasma Etch RIE
Manufacturer: Tegal | Condition: Fully Refurbished&Upgraded By Allwin21 | Wafer Size: 3″/4″/5″/6″Capability | Wafer loading: Automatic, Original Belt-Shuttle-Wafer-Transfer OR Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process/Plasma Etch/RIE/Stand Alone | Etch Materials: Silicon Oxide | Gas Lines: 1~4 lines capability with customized MFCs range
Tegal 901e TTW Plasma Etch RIE
Manufacturer:Tegal | Condition:Fully Refurbished&Upgraded By Allwin21 | Wafer Size:3″/4″/5″/6″Capability | Wafer loading: Automatic, Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/RIE/Through-The-Wall(TTW) | Etch Materials: Polysilicon, Refractory metal silicides and Nitride | Gas Lines:1~4 lines capability with customized MFCs range
Tegal 903e TTW Plasma Etch RIE
Manufacturer: Tegal | Condition: Fully Refurbished&Upgraded By Allwin21 | Wafer Size: 3″/4″/5″/6″Capability | Wafer loading: Automatic, Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process/Plasma Etch/RIE/Through-The-Wall(TTW) | Etch Materials: Silicon Oxide | Gas Lines: 1~4 lines capability with customized MFCs range
Tegal 901e Tegal 903e Upgrade Kits (Allwin21 Corp.)
The Upgrade kit for Tegal® 901e Tegal® 903e includes an advanced AW-900 System Control with touch screen operator interface or 17″ LCD Monitor , New PC with Allwin21 AW-900 software and new main control board.
