Product Description
Tegal 90Xe Spart Parts (Tegal 901e Spare Parts, Tegal 903e Spare Parts) List-Chassis
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| Parts Number | QTY and Description |
| 52-041-001 | 1 HINGE CHASSIS FRONT COVER |
| 52-047-001 | 1 LATCH ROLLER TOP PLATE 900 |
| 52-057-002 | 1 LEVER TOP PL LATCH LH 900 |
| 52-058-002 | 1 LATCH TOP PL RH 9XXE |
| 59-11-01 | 2 LINKAGE TOP PL LATCH 900 |
| 80-080-031 | 2 FLOW CONT 10-32NPT PORT S/SPR |
| 80-080-054 | 1 CYL,DBL,PVT MT,10S,1 1/16B |
| 80-080-151 | 1 CYL DBL ACT1-1/2B90DEG PT I9XX |
| 80-095-196 | 1 COUNTER PNEU 8DGT 11-120PSIG |
| 80-150-131 | 1 SCR SHLDR SCH 10-32X1/8L SST |
| 80-165-002 | 1 WSHR FL .250X.500X.062 FBR |
| 80-165-036 | 1 WSHR FL .203X.562X.040 SST |
| 80-195-029 | 1 FTNG BSHG 10-32F-1/8MNPT |
| 80-195-096 | 6 FTNG TEE 1/8ID T BRB BRS |
| 80-195-098 | 4 FTNG STR 10-32M 1/4OD T BRB BR |
| 80-195-158 | 2 FTNG ELB .17ID T-1/8MNPT BRB |
| 80-195-355 | 1 FTNG 1-TOUCH STR 1/8T 10-32NPT |
| 80-197-010 | 1 VALVE,AIR,TGL,4WAY,NO/NC,1/4T |
| 80-197-013 | 1 VALVE TGL 3WAY NC BRS |
| 80-200-210 | 3 RING-E,3/16SFT,.025THK,STL |
| 80-200-396 | 1 MAGNET ROD 1/4OD 1/2L 11OZ HF |
| 80-200-396 | 1 MAGNET ROD 1/4OD 1/2L 11OZ HF |
| 80-640-016 | 3 LAMP INCND 14V 15.1W MDGT SCR |
| 80-671-034 | 7 SW INTLK DOOR SPDT 125/250V |
| 80-671-056 | 1 CONT BLOCK,SNAP ACTN,1NO,3MM |
| 80-671-057 | 1 CONT BLOCK,SNAP ACTN,1NO,1MM |
| 80-671-058 | 1 CONT BLOCK,SNAP ACTN,1NC,1MM |
| 80-671-059 | 1 ACTR PB EMER RTRY PLSE-STOP |
| 80-671-061 | 1 LENS HLDR ACTR SQ-STANDBY |
| 80-671-062 | 1 LENS HLDR ACTR SQ-MACHINE ON |
| 80-671-063 | 1 LENS HLDR ACTR SQ-MACHINE OFF |
| 80-671-064 | 1 LENS ACTR TRANS CLEAR PLSTC |
| 80-671-065 | 1 LENS ACTR TRANS YEL PLSTC |
| 80-671-067 | 3 HOLDER LAMP ALTR SQ |
| 80-671-069 | 3 SLEEVE IND SQ |
| 80-671-070 | 3 SLEEVE ACTR SQ MOM ACTN |
| 80-671-071 | 1 BEZEL ALTR SQ GRA PLSTC |
| 80-671-081 | 1 DIFFUS IND SQ-MACHINE PWR ON |
| 80-671-124 | 1 LENS CAP IND SQ GRN PLSTC |
| 80-890-015 | 1 TUBE SHRINK 1/4DIA BLK |
| 80-890-020 | 1 TUBE SHRINK 3/4DIA BLK |
| 80-671-059 | 1 ACTR PB EMER RTRY PLSE-STOP |
| 80-671-071 | 1 BEZEL ALTR SQ GRA PLSTC |
| 80-671-058 | 1 CONT BLOCK,SNAP ACTN,1NC,1MM |
| 80-671-057 | 1 CONT BLOCK,SNAP ACTN,1NO,1MM |
| 80-671-056 | 1 CONT BLOCK,SNAP ACTN,1NO,3MM |
| 80-095-196 | 1 COUNTER PNEU 8DGT 11-120PSIG |
| 80-080-151 | 1 CYL DBL ACT1-1/2B90DEG PT I9XX |
| 80-080-054 | 1 CYL,DBL,PVT MT,10S,1 1/16B |
| 80-671-081 | 1 DIFFUS IND SQ-MACHINE PWR ON |
| 80-080-031 | 2 FLOW CONT 10-32NPT PORT S/SPR |
| 80-195-355 | 1 FTNG 1-TOUCH STR 1/8T 10-32NPT |
| 80-195-029 | 1 FTNG BSHG 10-32F-1/8MNPT |
| 80-195-158 | 2 FTNG ELB .17ID T-1/8MNPT BRB |
| 80-195-098 | 4 FTNG STR 10-32M 1/4OD T BRB BR |
| 80-195-096 | 6 FTNG TEE 1/8ID T BRB BRS |
| 52-041-001 | 1 HINGE CHASSIS FRONT COVER |
| 80-671-067 | 3 HOLDER LAMP ALTR SQ |
| 80-640-016 | 3 LAMP INCND 14V 15.1W MDGT SCR |
| 52-047-001 | 1 LATCH ROLLER TOP PLATE 900 |
| 52-058-002 | 1 LATCH TOP PL RH 9XXE |
| 80-671-064 | 1 LENS ACTR TRANS CLEAR PLSTC |
| 80-671-065 | 1 LENS ACTR TRANS YEL PLSTC |
| 80-671-124 | 1 LENS CAP IND SQ GRN PLSTC |
| 80-671-063 | 1 LENS HLDR ACTR SQ-MACHINE OFF |
| 80-671-062 | 1 LENS HLDR ACTR SQ-MACHINE ON |
| 80-671-061 | 1 LENS HLDR ACTR SQ-STANDBY |
| 52-057-002 | 1 LEVER TOP PL LATCH LH 900 |
| 59-11-01 | 2 LINKAGE TOP PL LATCH 900 |
| 80-200-396 | 1 MAGNET ROD 1/4OD 1/2L 11OZ HF |
| 80-200-396 | 1 MAGNET ROD 1/4OD 1/2L 11OZ HF |
| 80-200-210 | 3 RING-E,3/16SFT,.025THK,STL |
| 80-150-131 | 1 SCR SHLDR SCH 10-32X1/8L SST |
| 80-671-070 | 3 SLEEVE ACTR SQ MOM ACTN |
| 80-671-069 | 3 SLEEVE IND SQ |
| 80-671-034 | 7 SW INTLK DOOR SPDT 125/250V |
| 80-890-015 | 1 TUBE SHRINK 1/4DIA BLK |
| 80-890-020 | 1 TUBE SHRINK 3/4DIA BLK |
| 80-197-013 | 1 VALVE TGL 3WAY NC BRS |
| 80-197-010 | 1 VALVE,AIR,TGL,4WAY,NO/NC,1/4T |
| 80-165-036 | 1 WSHR FL .203X.562X.040 SST |
| 80-165-002 | 1 WSHR FL .250X.500X.062 FBR |
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PLEASE CONTACT US IF YOU NEED TEGAL 901E SPARE PARTS, TEGAL 903E SPARE PARTS
Allwin21 Corp. has been focusing on providing solutions and enhancements toTegal 901e, Tegal 903e, Tegal 901e TTW, Tegal 903e TTW used plasma Etch RIE semiconductor process equipment. These OEM Etch RIE semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC, solid robotic wafer transfer system and new critical components to achieve the goal of giving our customers a production edge with right cost.
Tegal 901e Plasma Etch RIE
Manufacturer:Tegal | Condition:Fully Refurbished&Upgraded By Allwin21 | Wafer Size:3″/4″/5″/6″Capability | Wafer loading: Automatic, Original Belt-Shuttle-Wafer-Transfer OR Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power:RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/RIE/Stand Alone | Etch Materials: Polysilicon, Refractory metal silicides and Nitride | Gas Lines:1~4 lines capability with customized MFCs range
Tegal 903e Plasma Etch RIE
Manufacturer: Tegal | Condition: Fully Refurbished&Upgraded By Allwin21 | Wafer Size: 3″/4″/5″/6″Capability | Wafer loading: Automatic, Original Belt-Shuttle-Wafer-Transfer OR Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process/Plasma Etch/RIE/Stand Alone | Etch Materials: Silicon Oxide | Gas Lines: 1~4 lines capability with customized MFCs range
Tegal 901e TTW Plasma Etch RIE
Manufacturer:Tegal | Condition:Fully Refurbished&Upgraded By Allwin21 | Wafer Size:3″/4″/5″/6″Capability | Wafer loading: Automatic, Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/RIE/Through-The-Wall(TTW) | Etch Materials: Polysilicon, Refractory metal silicides and Nitride | Gas Lines:1~4 lines capability with customized MFCs range
Tegal 903e TTW Plasma Etch RIE
Manufacturer: Tegal | Condition: Fully Refurbished&Upgraded By Allwin21 | Wafer Size: 3″/4″/5″/6″Capability | Wafer loading: Automatic, Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process/Plasma Etch/RIE/Through-The-Wall(TTW) | Etch Materials: Silicon Oxide | Gas Lines: 1~4 lines capability with customized MFCs range
Tegal 901e Tegal 903e Upgrade Kits (Allwin21 Corp.)
The Upgrade kit for Tegal® 901e Tegal® 903e includes an advanced AW-900 System Control with touch screen operator interface or 17″ LCD Monitor , New PC with Allwin21 AW-900 software and new main control board.
