Product Description
Tegal 90Xe Spart Parts (Tegal 901e Spare Parts, Tegal 903e Spare Parts) List-Chuck
[horizontal-scrolling group=”GROUP0″ scrollamount=”5″ scrolldelay=”0″]
| 30-231-001 | RING ASSY LWR ELCTD SEAL 90XE |
| 31-388-001 | RF CONN ASSY 9XXE |
| 33-085-002 | BELLOWS LWR ELCTD |
| 39-687-002 | FLANGE SHUTTLE 90X |
| 39-687-002 | FLANGE SHUTTLE 90X |
| 39-689-001 | SCREW LIFTING 90X |
| 39-689-001 | SCREW LIFTING 90X |
| 39-710-001 | COLLAR FLAG 90X |
| 39-729-001 | KNOB FTNG 900 |
| 39-731-001 | PIN PLATE 901E |
| 39-731-005 | PIN PLATE 903EJ |
| 39-732-001 | COLLAR PIN 90XE |
| 39-738-001 | SHIELD GND ELCTD LWR 90XE |
| 39-756-002 | ELBOW BHD SST 9XXE |
| 39-756-003 | ELBOW,BULKHEAD-W/FTNG,SST |
| 39-761-001 | GASKET RF CONTACT 9XXE |
| 39-767-003 | COUPLING INSULATOR T/90XE |
| 40-238-001 | BLOCK PIN CHUCK 900 |
| 40-290-001 | STOP CYL 901E |
| 40-297-001 | PIN QUARTZ 901E |
| 40-297-002 | PIN QUARTZ 903E |
| 40-304-001 | INSUL LWR ELCTD 90XE |
| 41-127-001 | FLAG CHUCK 901E |
| 41-137-001 | FLAG CHUCK 903E |
| 42-449-001 | BRKT SHUTTLE CNTR 900 |
| 46-272-003 | PLATE ELECTRODE SUPPORT 90X |
| 46-467-001 | PLATE MODULAR CHUCK 90X |
| 51-038-002 | STANDOFF LWR ELCTD 9XX |
| 80-080-065 | CYL DBL STUD MT 1S 1/2B |
| 80-080-072 | CYL,DBL ENDED,1/2S,1 1/8B |
| 80-080-077 | CYL AIR 3/4 SFT 2.09S 2B |
| 80-127-063 | SCR PNH PH 10-32X1/2L PL SST |
| 80-127-101 | SCR PNH PH 4-40X1/4L LKG SST |
| 80-127-142 | SCR PNH PH 8-32X3/8L LKG SST |
| 80-127-262 | SCR SCH 10-32X3/8L PL SST |
| 80-127-263 | SCR SCH 10-32X1/2L PL SST |
| 80-127-273 | SCR SCH 10-32X1 1/4L PL SST |
| 80-127-362 | SCR SCH 10-32X3/8L LKG SST |
| 80-127-363 | SCR SCH 10-32X1/2L LKG SST |
| 80-127-584 | SCR FLH PH 1/4-20X5/8L LKG SST |
| 80-152-005 | NUT HEX 10-32-UNC-2B PL SST |
| 80-162-004 | WASHER,FLAT,#8,SST |
| 80-163-001 | WASHER LKG EXT T #4 SST |
| 80-163-004 | WASHER LKG EXT T #10 SST |
| 80-163-006 | WASHER LKG EXT T #1/2 SST |
| 80-192-155 | FTNG STR 1/4OD T 10-32MTHRD BR |
| 80-192-200 | FTNG STR 1/4ID T-1/8MNPT BRB P |
| 80-192-207 | FTNG ADPTR 1/4-1/4OD T BRB SST |
| 80-192-236 | FTNG STR 1/4OD T-01/8MNPT SST |
| 80-195-238 | FTNG PLUG 10-32F S-T SGL-S-OFF |
| 80-195-259 | FTNG TEE 1/8ID(2)-.078ID T BRB |
| 80-195-284 | FTNG STR 1/8OD T 10-32MTHRD BR |
| 80-195-312 | FTNG ELB 1/8MNPT-1/8ID T BRB |
| 80-195-425 | FTNG STR 3/8OD T-1/4MNPT SST |
| 80-200-314 | CAM FOLLOWER,1/2OD,8-32THRD,SS |
| 80-200-340 | RING EXT 1/4SFT .025THK SST |
| 80-200-342 | BAND CONT FEM .125PIN . SST |
| 80-200-346 | CLAMP,2EAR,1/2NOM,CRP,STL TBG |
| 80-200-366 | CLAMP WORM GEAR 1/4-5/8 SST |
| 80-202-191 | O-R VITON 5/16ID 3/32W D70 |
| 80-202-192 | O-R VITON 6 1/4ID 3/32W D70 |
| 80-202-323 | GSKT .170ID .312OD .016THK FBR |
| 80-202-357 | O-R SILC GRY 6 3/4ID 1/4W D40 |
| 80-890-030 | TUBE INNER BRD 1/4ID PVC Yel |
| 80-890-036 | TUBE INNER BRD 1/4ID PVC Blk |
| 80-890-037 | TUBE INNER BRD 1/4ID PVC Red |
| 80-890-38 | TUBE INNER BRD 1/4ID PVC Gry |
| 80-890-045 | TUBE INNER BRD 1/4ID PVC Blk |
| 80-890-046 | TUBE INNER BRD 1/4ID PVC Yel |
| 80-890-050 | TUBE INNER BRD 1/4ID PVC CLEAR |
| 80-200-342 | BAND CONT FEM .125PIN . SST |
| 33-085-002 | BELLOWS LWR ELCTD |
| 40-238-001 | BLOCK PIN CHUCK 900 |
| 42-449-001 | BRKT SHUTTLE CNTR 900 |
| 80-200-314 | CAM FOLLOWER,1/2OD,8-32 ,SS |
| 80-200-366 | CLAMP WORM GEAR 1/4-5/8 SST |
| 80-200-346 | CLAMP,2EAR,1/2NOM,CRP,STL TBG |
| 39-710-001 | COLLAR FLAG 90X |
| 39-732-001 | COLLAR PIN 90XE |
| 39-767-003 | COUPLING INSULATOR T/90XE |
| 80-080-077 | CYL AIR 3/4 SFT 2.09S 2B |
| 80-080-065 | CYL DBL STUD MT 1S 1/2B |
| 80-080-072 | CYL,DBL ENDED,1/2S,1 1/8B |
| 39-756-002 | ELBOW BHD SST 9XXE |
| 39-756-003 | ELBOW,BULKHEAD-W/FTNG,SST |
| 41-127-001 | FLAG CHUCK 901E |
| 41-137-001 | FLAG CHUCK 903E |
| 39-687-002 | FLANGE SHUTTLE 90X |
| 39-687-002 | FLANGE SHUTTLE 90X |
| 80-192-207 | FTNG ADPTR 1/4-1/4OD T BRB SST |
| 80-195-312 | FTNG ELB 1/8MNPT-1/8ID T BRB |
| 80-195-238 | FTNG PLUG 10-32F S-T SGL-S-OFF |
| 80-192-200 | FTNG STR 1/4ID T-1/8MNPT BRB P |
| 80-192-155 | FTNG STR 1/4OD T 10-32MTHRD BR |
| 80-192-236 | FTNG STR 1/4OD T-01/8MNPT SST |
| 80-195-284 | FTNG STR 1/8OD T 10-32MTHRD BR |
| 80-195-425 | FTNG STR 3/8OD T-1/4MNPT SST |
| 80-195-259 | FTNG TEE 1/8ID(2)-.078ID T BRB |
| 39-761-001 | GASKET RF CONTACT 9XXE |
| 80-202-323 | GSKT .170ID .312OD .016THK FBR |
| 40-304-001 | INSUL LWR ELCTD 90XE |
| 39-729-001 | KNOB FTNG 900 |
| 80-152-005 | NUT HEX 10-32-UNC-2B PL SST |
| 80-202-357 | O-R SILC GRY 6 3/4ID 1/4W D40 |
| 80-202-191 | O-R VITON 5/16ID 3/32W D70 |
| 80-202-192 | O-R VITON 6 1/4ID 3/32W D70 |
| 39-731-001 | PIN PLATE 901E |
| 39-731-005 | PIN PLATE 903EJ |
| 40-297-001 | PIN QUARTZ 901E |
| 40-297-002 | PIN QUARTZ 903E |
| 46-272-003 | PLATE ELECTRODE SUPPORT 90X |
| 46-467-001 | PLATE MODULAR CHUCK 90X |
| 31-388-001 | RF CONN ASSY 9XXE |
| 30-231-001 | RING ASSY LWR ELCTD SEAL 90XE |
| 80-200-340 | RING EXT 1/4SFT .025THK SST |
| 80-127-584 | SCR FLH PH 1/4-20X5/8L LKG SST |
| 80-127-063 | SCR PNH PH 10-32X1/2L PL SST |
| 80-127-101 | SCR PNH PH 4-40X1/4L LKG SST |
| 80-127-142 | SCR PNH PH 8-32X3/8L LKG SST |
| 80-127-273 | SCR SCH 10-32X1 1/4L PL SST |
| 80-127-363 | SCR SCH 10-32X1/2L LKG SST |
| 80-127-263 | SCR SCH 10-32X1/2L PL SST |
| 80-127-362 | SCR SCH 10-32X3/8L LKG SST |
| 80-127-262 | SCR SCH 10-32X3/8L PL SST |
| 39-689-001 | SCREW LIFTING 90X |
| 39-689-001 | SCREW LIFTING 90X |
| 39-738-001 | SHIELD GND ELCTD LWR 90XE |
| 51-038-002 | STANDOFF LWR ELCTD 9XX |
| 40-290-001 | STOP CYL 901E |
| 80-890-050 | TUBE INNER BRD 1/4ID PVC CLEAR |
| 80-890-030 | TUBE INNER BRD 1/4ID PVC Yel |
| 80-890-036 | TUBE INNER BRD 1/4ID PVC Blk |
| 80-890-037 | TUBE INNER BRD 1/4ID PVC Red |
| 80-890-38 | TUBE INNER BRD 1/4ID PVC Gry |
| 80-890-045 | TUBE INNER BRD 1/4ID PVC Blk |
| 80-890-046 | TUBE INNER BRD 1/4ID PVC Yel |
| 80-163-006 | WASHER LKG EXT T #1/2 SST |
| 80-163-004 | WASHER LKG EXT T #10 SST |
| 80-163-001 | WASHER LKG EXT T #4 SST |
| 80-162-004 | WASHER,FLAT,#8,SST |
[horizontal-scrolling group=”GROUP0″ scrollamount=”5″ scrolldelay=”0″]
PLEASE CONTACT US IF YOU NEED TEGAL 901E SPARE PARTS, TEGAL 903E SPARE PARTS
[contact-form-7 404 "Not Found"]
Allwin21 Corp. has been focusing on providing solutions and enhancements toTegal 901e, Tegal 903e, Tegal 901e TTW, Tegal 903e TTW used plasma Etch RIE semiconductor process equipment. These OEM Etch RIE semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC, solid robotic wafer transfer system and new critical components to achieve the goal of giving our customers a production edge with right cost.
Tegal 901e Plasma Etch RIE
Manufacturer:Tegal | Condition:Fully Refurbished&Upgraded By Allwin21 | Wafer Size:3″/4″/5″/6″Capability | Wafer loading: Automatic, Original Belt-Shuttle-Wafer-Transfer OR Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power:RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/RIE/Stand Alone | Etch Materials: Polysilicon, Refractory metal silicides and Nitride | Gas Lines:1~4 lines capability with customized MFCs range
Tegal 903e Plasma Etch RIE
Manufacturer: Tegal | Condition: Fully Refurbished&Upgraded By Allwin21 | Wafer Size: 3″/4″/5″/6″Capability | Wafer loading: Automatic, Original Belt-Shuttle-Wafer-Transfer OR Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process/Plasma Etch/RIE/Stand Alone | Etch Materials: Silicon Oxide | Gas Lines: 1~4 lines capability with customized MFCs range
Tegal 901e TTW Plasma Etch RIE
Manufacturer:Tegal | Condition:Fully Refurbished&Upgraded By Allwin21 | Wafer Size:3″/4″/5″/6″Capability | Wafer loading: Automatic, Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/RIE/Through-The-Wall(TTW) | Etch Materials: Polysilicon, Refractory metal silicides and Nitride | Gas Lines:1~4 lines capability with customized MFCs range
Tegal 903e TTW Plasma Etch RIE
Manufacturer: Tegal | Condition: Fully Refurbished&Upgraded By Allwin21 | Wafer Size: 3″/4″/5″/6″Capability | Wafer loading: Automatic, Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process/Plasma Etch/RIE/Through-The-Wall(TTW) | Etch Materials: Silicon Oxide | Gas Lines: 1~4 lines capability with customized MFCs range
Tegal 901e Tegal 903e Upgrade Kits (Allwin21 Corp.)
The Upgrade kit for Tegal® 901e Tegal® 903e includes an advanced AW-900 System Control with touch screen operator interface or 17″ LCD Monitor , New PC with Allwin21 AW-900 software and new main control board.
