Product Description
Tegal 90Xe Spart Parts (Tegal 901e Spare Parts, Tegal 903e Spare Parts) List-chamber
[horizontal-scrolling group=”GROUP0″ scrollamount=”5″ scrolldelay=”0″]
| 33-350-001 | TUBE GAS INLET 9XXE |
| 33-367-002 | GROUND RING 900 |
| 37-221-001 | ELCTD UPR T/903E |
| 37-221-002 | ELCTD UPR NON ANDZ T/903E |
| 37-221-003 | ELCTD,UPR-ANDZ,HP 903E |
| 37-568-001 | CLAMP,INSULATOR RING 900 |
| 38-023-001 | TUBE CHMBR COOLING 9XXE |
| 39-341-005 | CHMBR BODY VENTED 903E |
| 39-341-012 | CHAMBER BODY 900 |
| 39-342-001 | CHMBR TOP 9XX |
| 39-343-001 | MANF CHMBR 9XX |
| 39-344-001 | ELCTD,UPR-V/H COND,ANDZ T/900e |
| 39-344-002 | ELCTD UPR HIGH CONT 901e |
| 39-344-010 | ELCTD UPR cooling plate 903E |
| 39-347-003 | RING INSUL CLAMP 90XE |
| 39-680-003 | ELCTD CONE HEAD VENTED 903E |
| 39-680-005 | ELCTD UPR VENTED HD ANDZ 903E |
| 39-682-001 | GAS DIFFUSION TUBE BOT 963 |
| 39-683-001 | GAS DIFFUSION TUBE TOP 963 |
| 39-818-001 | SLEEVE FIBER OPTIC 9XX |
| 39-819-001 | BLOCK FIBER OPTIC 9XX |
| 39-819-004 | BLOCK,FIBER OPTIC I9XX |
| 39-926-001 | ELCTD TOP COOLED 9XXE |
| 39-928-001 | FTNG HOSE UPR OL |
| 39-929-001 | CAP GAS UPR COOLED ELCTD 90X |
| 40-140-001 | RING INSUL CER 9XX |
| 40-140-003 | RING INSUL CER 99.5 9XX |
| 40-159-001 | ROD SAPPHIRE .25DIA STRAIGHT |
| 41-215-001 | GROUND RING RETAINER 903EJ |
| 80-127-063 | SCR PNH PH 10-32X1/2L PL SST |
| 80-127-271 | SCR SCH 10-32X2 1/4L PL SST |
| 80-127-325 | SCR SCH 6-32X3/4L LKG SST |
| 80-128-065 | SCR VENT PNH PH 10-32X3/4L SST |
| 80-150-126 | SCR SET SCH 6-32X5/32L SST/NYL |
| 80-150-151 | SCR,CAP,SCH,10-24X1L,PL,SST |
| 80-150-152 | SCR,CAP,SCH,10-24X3 1/2L,SST |
| 80-150-286 | SCR,VENT,BH,8-32X3/4L,SST |
| 80-192-139 | GSKT,1/4OD T, UNPLATED NICKEL |
| 80-192-153 | FTNG STR 1/4ID T-1/8MNPT BRB B |
| 80-192-200 | FTNG STR 1/4ID T-1/8MNPT BRB P |
| 80-195-119 | FTNG VCR 9/16-18M 7/16-20M SST |
| 80-195-185 | FTNG NUT VCR 9/16-18FTHRD BLND |
| 80-200-366 | CLAMP WORM GEAR 1/4-5/8 SST |
| 80-202-154 | O-R VITON 1/4ID 3/32W D70 |
| 80-202-189 | O-R VITON 7 1/4ID 1/8W D70 |
| 80-202-190 | O-R VITON 10 1/2ID 3/16W D70 |
| 80-202-212 | O-R VITON 5/16ID 1/8W D70 |
| 80-202-394 | O-R,CHEMRAZ,3/4IDX1/8W,D80 |
| 80-202-464 | O-R CHEMRAZ 1/2ID 1/16W D80 |
| 80-202-465 | O-R CHEMRAZ 1/4ID 3/32W D80 |
| 80-202-467 | O-R,CHEMRAZ,7 1/4IDX1/8W,D80 |
| 80-202-468 | O-R,CHEMRAZ,10 1/2IDX3/16W,D80 |
| 80-890-050 | TUBE INNER BRD 1/4ID PVC CLEAR |
| 83-237-001 | SCR 10-32X1.12 80-128-170 903E |
| 39-819-001 | BLOCK FIBER OPTIC 9XX |
| 39-819-004 | BLOCK,FIBER OPTIC I9XX |
| 39-929-001 | CAP GAS UPR COOLED ELCTD 90X |
| 39-341-012 | CHAMBER BODY 900 |
| 39-341-005 | CHMBR BODY VENTED 903E |
| 39-342-001 | CHMBR TOP 9XX |
| 80-200-366 | CLAMP WORM GEAR 1/4-5/8 SST |
| 37-568-001 | CLAMP,INSULATOR RING 900 |
| 39-680-003 | ELCTD CONE HEAD VENTED 903E |
| 39-926-001 | ELCTD TOP COOLED 9XXE |
| 39-344-010 | ELCTD UPR cooling plate 903E |
| 39-344-002 | ELCTD UPR HIGH CONT 901e |
| 37-221-002 | ELCTD UPR NON ANDZ T/903E |
| 37-221-001 | ELCTD UPR T/903E |
| 39-680-005 | ELCTD UPR VENTED HD ANDZ 903E |
| 37-221-003 | ELCTD,UPR-ANDZ,HP 903E |
| 39-344-001 | ELCTD,UPR-V/H COND,ANDZ T/900e |
| 39-928-001 | FTNG HOSE UPR OL |
| 80-195-185 | FTNG NUT VCR 9/16-18FTHRD BLND |
| 80-192-153 | FTNG STR 1/4ID T-1/8MNPT BRB B |
| 80-192-200 | FTNG STR 1/4ID T-1/8MNPT BRB P |
| 80-195-119 | FTNG VCR 9/16-18M 7/16-20M SST |
| 39-682-001 | GAS DIFFUSION TUBE BOT 963 |
| 39-683-001 | GAS DIFFUSION TUBE TOP 963 |
| 33-367-002 | GROUND RING 900 |
| 41-215-001 | GROUND RING RETAINER 903EJ |
| 80-192-139 | GSKT,1/4OD T, UNPLATED NICKEL |
| 39-343-001 | MANF CHMBR 9XX |
| 80-202-464 | O-R CHEMRAZ 1/2ID 1/16W D80 |
| 80-202-465 | O-R CHEMRAZ 1/4ID 3/32W D80 |
| 80-202-154 | O-R VITON 1/4ID 3/32W D70 |
| 80-202-190 | O-R VITON 10 1/2ID 3/16W D70 |
| 80-202-212 | O-R VITON 5/16ID 1/8W D70 |
| 80-202-189 | O-R VITON 7 1/4ID 1/8W D70 |
| 80-202-468 | O-R,CHEMRAZ,10 1/2IDX3/16W,D80 |
| 80-202-394 | O-R,CHEMRAZ,3/4IDX1/8W,D80 |
| 80-202-467 | O-R,CHEMRAZ,7 1/4IDX1/8W,D80 |
| 40-140-003 | RING INSUL CER 99.5 9XX |
| 40-140-001 | RING INSUL CER 9XX |
| 39-347-003 | RING INSUL CLAMP 90XE |
| 40-159-001 | ROD SAPPHIRE .25DIA STRAIGHT |
| 83-237-001 | SCR 10-32X1.12 80-128-170 903E |
| 80-127-063 | SCR PNH PH 10-32X1/2L PL SST |
| 80-127-271 | SCR SCH 10-32X2 1/4L PL SST |
| 80-127-325 | SCR SCH 6-32X3/4L LKG SST |
| 80-150-126 | SCR SET SCH 6-32X5/32L SST/NYL |
| 80-128-065 | SCR VENT PNH PH 10-32X3/4L SST |
| 80-150-151 | SCR,CAP,SCH,10-24X1L,PL,SST |
| 80-150-152 | SCR,CAP,SCH,10-24X3 1/2L,SST |
| 80-150-286 | SCR,VENT,BH,8-32X3/4L,SST |
| 39-818-001 | SLEEVE FIBER OPTIC 9XX |
| 38-023-001 | TUBE CHMBR COOLING 9XXE |
| 33-350-001 | TUBE GAS INLET 9XXE |
| 80-890-050 | TUBE INNER BRD 1/4ID PVC CLEAR |
[horizontal-scrolling group=”GROUP0″ scrollamount=”5″ scrolldelay=”0″]
[contact-form-7 404 "Not Found"]
PLEASE CONTACT US IF YOU NEED TEGAL 901E SPARE PARTS, TEGAL 903E SPARE PARTS
Allwin21 Corp. has been focusing on providing solutions and enhancements toTegal 901e, Tegal 903e, Tegal 901e TTW, Tegal 903e TTW used plasma Etch RIE semiconductor process equipment. These OEM Etch RIE semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC, solid robotic wafer transfer system and new critical components to achieve the goal of giving our customers a production edge with right cost.
Tegal 901e Plasma Etch RIE
Manufacturer:Tegal | Condition:Fully Refurbished&Upgraded By Allwin21 | Wafer Size:3″/4″/5″/6″Capability | Wafer loading: Automatic, Original Belt-Shuttle-Wafer-Transfer OR Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power:RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/RIE/Stand Alone | Etch Materials: Polysilicon, Refractory metal silicides and Nitride | Gas Lines:1~4 lines capability with customized MFCs range
Tegal 903e Plasma Etch RIE
Manufacturer: Tegal | Condition: Fully Refurbished&Upgraded By Allwin21 | Wafer Size: 3″/4″/5″/6″Capability | Wafer loading: Automatic, Original Belt-Shuttle-Wafer-Transfer OR Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process/Plasma Etch/RIE/Stand Alone | Etch Materials: Silicon Oxide | Gas Lines: 1~4 lines capability with customized MFCs range
Tegal 901e TTW Plasma Etch RIE
Manufacturer:Tegal | Condition:Fully Refurbished&Upgraded By Allwin21 | Wafer Size:3″/4″/5″/6″Capability | Wafer loading: Automatic, Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/RIE/Through-The-Wall(TTW) | Etch Materials: Polysilicon, Refractory metal silicides and Nitride | Gas Lines:1~4 lines capability with customized MFCs range
Tegal 903e TTW Plasma Etch RIE
Manufacturer: Tegal | Condition: Fully Refurbished&Upgraded By Allwin21 | Wafer Size: 3″/4″/5″/6″Capability | Wafer loading: Automatic, Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process/Plasma Etch/RIE/Through-The-Wall(TTW) | Etch Materials: Silicon Oxide | Gas Lines: 1~4 lines capability with customized MFCs range
Tegal 901e Tegal 903e Upgrade Kits (Allwin21 Corp.)
The Upgrade kit for Tegal® 901e Tegal® 903e includes an advanced AW-900 System Control with touch screen operator interface or 17″ LCD Monitor , New PC with Allwin21 AW-900 software and new main control board.
