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Tegal 901e Tegal 903e-Fully Refurbished and Upgraded By Allwin21

Tegal 90Xe Spart Parts List-RF

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Product Description

Tegal 90Xe Spart Parts (Tegal 901e Spare Parts, Tegal 903e Spare Parts) List-RF 

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CR1124-012 RF DLVY,EUROPE CE
31-086-009 PHASE/MAG DETECTOR ASSY 900
31-217-001 STPR MOTOR MOD J6 9 1/2″ 90X
31-217-002 STPR MOTOR MOD J7 10 1/2″ 90X
31-376-001 FAN SUB ASSY 15XX/9XX/E
40-141-001 GUIDE RF PWR SPLY 900
43-075-001 CHASSIS,MTG PLT-RF MDL,EUR 900
43-075-002 CHASSIS,PLATE RF DEL I900
44-856-001 HOUSING,RF BD 900
44-857-001 COVER,RD BD 900
50-039-001 FASTENER RF DLVY 9XX
51-150-001 SPACER RF DLVY 9XX
51-151-001 SPACER RF DLVY MT 9XX
80-127-002 SCR PNH PH 4-40X3/8L PL SST
80-127-021 SCR PNH PH 6-32X1/4L PL SST
80-127-042 SCR PNH PH 8-32X3/8L PL SST
80-127-063 SCR PNH PH 10-32X1/2L PL SST
80-127-462 SCR FLH PH 10-32X3/8L PL SST
80-150-217 SCR PNH PH M2.5X8MM L SST
80-152-002 NUT HEX 4-40-UNC-2B PL SST
80-162-001 WASHER,FLAT,#4,SST
80-162-003 WASHER,FLAT,#8,SST
80-162-004 WASHER,FLAT,#10,SST
80-163-022 WASHER LKG SPRING #4 SST
80-163-024 WASHER LKG SPRING #8 SST
80-163-025 WASHER LKG SPRING #10 SST
80-165-004 WSHR FL .140X.312X.031 NYL
80-200-057 HANDLE 3/8OD 1 3/4H 3 1/2CTR
80-200-187 PULLEY 1/4B 20GRV 40DP 5/16B
80-200-237 SPR CPRSN .055DIA 3/4L SST
80-200-338 PULLEY 1/4B 54GRV 40DP 5/16B
80-200-385 FANGUARD,3 1/4MTG,STL WIRE
80-200-688 SHIELDING,RF,1/4W,FOLDOVER
80-202-219 GROMMET STRIP .08/.13 PNL THK
80-202-298 BELT 1/4W 120GRV 40DP PEU/POL
80-204-001 LABEL,DANGER HIGH VOLTAGE
80-210-009 KNOB 4-PRONG 1/4-20THRD INSR
80-700-012 ADPTR,ANG,COAX,UHF,JACK/PLUG
93-910-001 CABLE,DATA/RF BD 900
93-916-001 CABLE,RF ON HOURMTR-RF BOX 900
80-700-012 RF DLVY,EUROPE CE
80-202-298 PHASE/MAG DETECTOR ASSY 900
93-910-001 STPR MOTOR MOD J6 9 1/2″ 90X
93-916-001 STPR MOTOR MOD J7 10 1/2″ 90X
93-917-001 FAN SUB ASSY 15XX/9XX/E
43-075-001 GUIDE RF PWR SPLY 900
43-075-002 CHASSIS,MTG PLT-RF MDL,EUR 900
44-857-001 CHASSIS,PLATE RF DEL I900
31-376-001 HOUSING,RF BD 900
80-200-385 COVER,RD BD 900
50-039-001 FASTENER RF DLVY 9XX
80-202-219 SPACER RF DLVY 9XX
40-141-001 SPACER RF DLVY MT 9XX
80-200-057 SCR PNH PH 4-40X3/8L PL SST
94-215-004 SCR PNH PH 6-32X1/4L PL SST
94-775-001 SCR PNH PH 8-32X3/8L PL SST
94-776-001 SCR PNH PH 10-32X1/2L PL SST
44-856-001 SCR FLH PH 10-32X3/8L PL SST
80-210-009 SCR PNH PH M2.5X8MM L SST
80-204-001 NUT HEX 4-40-UNC-2B PL SST
CR1113-008 WASHER,FLAT,#4,SST
80-152-002 WASHER,FLAT,#8,SST
99-196-002 WASHER,FLAT,#10,SST
99-172-003 WASHER LKG SPRING #4 SST
99-173-008 WASHER LKG SPRING #8 SST
31-086-009 WASHER LKG SPRING #10 SST
80-200-187 WSHR FL .140X.312X.031 NYL
80-200-338 HANDLE 3/8OD 1 3/4H 3 1/2CTR
CR1124-012 PULLEY 1/4B 20GRV 40DP 5/16B
80-127-462 SPR CPRSN .055DIA 3/4L SST
80-127-063 PULLEY 1/4B 54GRV 40DP 5/16B
80-127-002 FANGUARD,3 1/4MTG,STL WIRE
80-127-021 SHIELDING,RF,1/4W,FOLDOVER
80-127-042 GROMMET STRIP .08/.13 PNL THK
80-150-217 BELT 1/4W 120GRV 40DP PEU/POL
80-200-688 LABEL,DANGER HIGH VOLTAGE
51-150-001 KNOB 4-PRONG 1/4-20THRD INSR
51-151-001 ADPTR,ANG,COAX,UHF,JACK/PLUG
80-200-237 CABLE,DATA/RF BD 900
31-217-001 CABLE,RF ON HOURMTR-RF BOX 900

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 PLEASE CONTACT US IF YOU NEED TEGAL 901E SPARE PARTS, TEGAL 903E SPARE PARTS

Allwin21 Corp. has been focusing on providing solutions and enhancements toTegal 901e, Tegal 903e, Tegal 901e TTW, Tegal 903e TTW used plasma Etch RIE semiconductor process equipment. These OEM Etch RIE semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC, solid robotic wafer transfer system and new critical components to achieve the goal of giving our customers a production edge with right cost. 

 

 

The robust integrated robotic wafer transfer for Tegal 901e Tegal 90e

Tegal 901e Plasma Etch RIE

Manufacturer:Tegal | Condition:Fully Refurbished&Upgraded By Allwin21 | Wafer Size:3″/4″/5″/6″Capability |  Wafer loading: Automatic, Original Belt-Shuttle-Wafer-Transfer OR Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power:RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/RIE/Stand Alone | Etch Materials: Polysilicon, Refractory metal silicides and Nitride | Gas Lines:1~4 lines capability with customized MFCs range

 

Tegal 903e Plasma Etch RIE

Manufacturer: Tegal | Condition: Fully Refurbished&Upgraded By Allwin21 | Wafer Size: 3″/4″/5″/6″Capability |  Wafer loading: Automatic, Original Belt-Shuttle-Wafer-Transfer OR Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process/Plasma Etch/RIE/Stand Alone | Etch Materials: Silicon Oxide | Gas Lines: 1~4 lines capability with customized MFCs range

 

Tegal 901e TTW Plasma Etch RIE

Manufacturer:Tegal | Condition:Fully Refurbished&Upgraded By Allwin21 | Wafer Size:3″/4″/5″/6″Capability |  Wafer loading: Automatic, Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/RIE/Through-The-Wall(TTW) | Etch Materials: Polysilicon, Refractory metal silicides and Nitride | Gas Lines:1~4 lines capability with customized MFCs range

 

Tegal 903e TTW Plasma Etch RIE

Manufacturer: Tegal | Condition: Fully Refurbished&Upgraded By Allwin21 | Wafer Size: 3″/4″/5″/6″Capability |  Wafer loading: Automatic, Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process/Plasma Etch/RIE/Through-The-Wall(TTW) | Etch Materials: Silicon Oxide | Gas Lines: 1~4 lines capability with customized MFCs range

 

Tegal 901e Tegal 903e Upgrade Kits (Allwin21 Corp.)

The Upgrade kit for Tegal® 901e Tegal® 903e includes an advanced AW-900 System Control with touch screen operator interface or 17″ LCD Monitor , New PC with Allwin21 AW-900 software and new main control board. 

 

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