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Polysilicon

Polysilicon:Tegal 901e, Tegal 903e, Lam AutoEtch,Lam Rainbow, Matrix 105 Matrix 303,Branson/IPC 3000, Gasonics Aura 1000,Gasonics Aura 3010 ...

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Negative Photoresist

Negative Photoresist

Negative photoresists typically consist of a cyclized rubber resin, a photo active compound (PAC), and a carrier solvent, most often xylene. Negative resist which has been exposed and developed is a  polymer, cross-linked in three dimensions. The exposed and developed negative resist may also contain residual developer solvents, chiefly isopropyl alcohol (IPA).…

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