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ByOthers
Allwin21 Corp.AG Associates
Branson/IPCGasonics
Lam ResearchMatrix
Perkin-ElmerTegal
MRCPlasma-Therm
Optorun Oxford

Allwin21 Corp. AG Associates
Branson/IPC Gasonics
Lam Research Matrix
Perkin-Elmer Tegal
MRC Plasma-Therm
Optorun  Oxford

 

Gasonics L3510 Plasma Asher
Manuals

Rapid Thermal Process


● AW610M
● AW820M
● AW820R

Plasma Ash & Descum


● AW-105R
● AW-10R
● AW-B3000

Plasma Etch RIE


● AW-901eR
● AW-903eR
● AW-303R

Sputter Deposition


● AW4450

Metal Film Metrology


● AWgage 150
● AWgage 200

RTP Retrofit & Upgrade

  • AG Associates Heatpulse RTPs
  • AG Associates Heatpulse 610
  • AG Associates Heatpulse 410
  • AG Associates Heatpulse 210
  • MPT RTP-600S
  • MPT RTP-600XP
  • MPT RTP-800XP
  • Link

Asher Retrofit & Upgrade

  • Matrix 105, 104, 106, 205
  • Branson/IPC 2000, 3000, 4000
  • Gasonics Aura 1000
  • Gasonics Aura 2000-LL
  • Gasonics Aura 3000
  • Gasonics Aura 3010
  • Gasonics L3510
  • Link

Etcher Retrofit & Upgrade

  • Tegal 901e, 903e, 915, 965
  • Matrix 303, 302, 403
  • Branson/IPC 2000, 3000, 4000
  • Plasma-Therm 700, 720, 730, 740, 790
  • Lam Research AutoEtch 490,590,690,790
  • Lam Rainbow 4400,4500,4600,4700 Series
  • Oxford Plasmalab 80, 133, 100, 800
  • Link

Sputter Retrofit & Upgrade

  • Perkin-Elmer 2400,4400,4410,4450
  • MRC 603, 643, 903, 923, 943
  • TES 600, 900, 4400, BJD-1800
  • SputterTech 4410, 4450
  • CPA 4400, 4450
  • 2ndSource 2400, 4400,4410,4450
  • Temescal BJD-1800,FC-1800 Evaporator
  • Link

© 2017–2026 Allwin21 Corp. All Rights Reserved. Specifications, configurations, availability and pricing are subject to change without notice. All trademarks are the property of their respective owners.

Software License Transfer Policy: Allwin21 software licenses are provided to the original end user and are intended for the lifetime use of the equipment. If equipment ownership is transferred, the new owner may apply for a software license transfer and re-registration. A transfer fee may apply. A valid software license is required for software updates, technical support, remote support, field service, and upgrade services.