Product Description
| CAM 20-23-009 |
PROFACTURE 55-005-001 |
BELT DRIVE LOADER | 4 |
| CAM 20-23-028 |
PROFACTURE 37-222-002 |
COOLING PLATE | 4 |
| CAM 20-23-029 |
THEIS 8100-1242 |
LIFTPINS, QUARTZ | 3 |
| CAM 20-23-045 |
TEGAL CORP. 99-287-003RW |
PCB, SHUTTLE INTERFACE | 2 |
| CAM 20-23-059 |
THE BURNS CORP PA1001 |
PUMP, WATER, CHILLER | 2 |
| CAM 20-23-061 |
ADVANCED ENERGY FC7800CU,SF6,15SCC |
MFC,SF6,CARD EDGE,4VCR,15SCCM | 2 |
| CAM 20-23-069 |
PRO FACTURE 80-200-144 |
BEARING, SHUTTLE RAIL | 10 |
| CAM 20-23-071 |
CAL SEAL 378SZ485 |
SIMRIZ O-RING | 17 |
| CAM 73-7414 |
TECH STAR INDUSTR. 37-221-001 |
SHOWER HEAD (4 TEGAL 903) | 3 |
| CAM 73-7416 |
THEIS ENTERPRISES 8160-1206 |
LENSE, EP, 903 | 3 |
| CAM 73-7530 |
PROFACTURE CORP. 55-004-001 |
BELT, DRIVE CARRIAGE 34″ 903 | 10 |
| CAM 73-7535 |
THEIS ENTERPRISE 8100-1388 |
BELT DRIVE, 41″ 903 | 3 |
| CAM 73-7643 |
PROFACTURE 39-741026 |
ELECTRODE/ LOWER FOR 903 TEGAL | 1 |
| CAM 73-7683 |
APPLIED CERAMICS 95-00032a |
RING, CERAMIC, 903 TEGAL | 4 |
| CAM 73-7692 |
PROFACTURE 40-297-002 |
PIN, QUARTZ, TEGAL | 19 |
| CAM 73-7716 |
PORTLAND VALVE 321-4-X-12DFR |
GAS LINE, 12″ FLEX, TEGAL 903 | 8 |
| CAM 73-7717 |
PROFACTURE CORP. 80-192-112 |
GAS LINE, 4″ FLEX, TEGAL 903 | 2 |
| CAM 73-7722 |
PROFACTURE CORP. 80-200-342 |
SPRING, QUARTZ PIN-903 | 14 |
| CAM 73-7834 |
GE CAPITAL 99-176-001 |
PCB, SENSOR 15, TEGAL | 1 |
| CAM 73-7853 |
SEMI PARTS 31165004 |
MOTOR/STEPPER/CARRIAGE – 903 | 3 |
| CAM 73-7860 |
TEGAL CORP. 8100-1722 |
BELT,TIMING,H5,TEGAL | 4 |
| CAM 73-7880 |
TEGAL CORP. 31-388-001 |
CONNECTOR,COAX L/E 903 | 5 |
| CAM 73-7881 |
MCMASTER CARR 7191K11 |
FILTER,CHILLER,903 | 7 |
| CAM 73-7916 |
PROFACTURE CORP. 23 |
TUBE/ASSY COOLANT L/E-903 | 6 |
| CAM 73-7945 |
PROFACTURE CORP. PRO-33-085-002 |
BELLOWS, L/E, 903 TEGAL | 2 |
| CAM 73-8060 |
SEMI PARTS 40-140-003 |
CERAMIC-UPPER 903E | 5 |
| CAM 73-8062 |
PROFACTURE CORP. 39-926-001 |
CHAMBER, TOP, 903 | 3 |
| CAM 73-9209R |
PROFACTURE PRO-CW1078-60401 |
SPATULA DRIVE UNIT,TEGAL 903 | 2 |
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Allwin21 Corp. has been focusing on providing solutions and enhancements to Tegal 901e, Tegal 903e, Tegal 901e TTW, Tegal 903e TTW used plasma Etch RIE semiconductor process equipment. These OEM Etch RIE semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC, solid robotic wafer transfer system and new critical components to achieve the goal of giving our customers a production edge with right cost.
Manufacturer:Tegal | Condition:Fully Refurbished&Upgraded By Allwin21 | Wafer Size:3″/4″/5″/6″Capability | Wafer loading: Automatic, Original Belt-Shuttle-Wafer-Transfer OR Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power:RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/RIE/Stand Alone | Etch Materials: Polysilicon, Refractory metal silicides and Nitride | Gas Lines:1~4 lines capability with customized MFCs range
Manufacturer: Tegal | Condition: Fully Refurbished&Upgraded By Allwin21 | Wafer Size: 3″/4″/5″/6″Capability | Wafer loading: Automatic, Original Belt-Shuttle-Wafer-Transfer OR Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process/Plasma Etch/RIE/Stand Alone | Etch Materials: Silicon Oxide | Gas Lines: 1~4 lines capability with customized MFCs range
Tegal 901e TTW Plasma Etch RIE
Manufacturer:Tegal | Condition:Fully Refurbished&Upgraded By Allwin21 | Wafer Size:3″/4″/5″/6″Capability | Wafer loading: Automatic, Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/RIE/Through-The-Wall(TTW) | Etch Materials: Polysilicon, Refractory metal silicides and Nitride | Gas Lines:1~4 lines capability with customized MFCs range
Tegal 903e TTW Plasma Etch RIE
Manufacturer: Tegal | Condition: Fully Refurbished&Upgraded By Allwin21 | Wafer Size: 3″/4″/5″/6″Capability | Wafer loading: Automatic, Allwin21 Solid-Robotic-Wafer-Transfer | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process/Plasma Etch/RIE/Through-The-Wall(TTW) | Etch Materials: Silicon Oxide | Gas Lines: 1~4 lines capability with customized MFCs range
Upgrade Kits for Tegal 901e Tegal 903e
The Upgrade kit for Tegal® 901e Tegal® 903e includes an advanced AW-900 System Control with touch screen operator interface or 17″ LCD Monitor , New PC with Allwin21 AW-900 software and new main control board.
