Product Description
Part Number: S2100-0900-058
Description: S2100-0900-058 PCA, Main Control Board, AW610
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Allwin21 Corp. is the exclusive licensed manufacturer of AG Associates Heatpulse 610 Rapid Thermal Processing equipment. Allwin21 is manufacturing the new AccuThermo AW Series Atmospheric Rapid Thermal Processors and Vacuum Rapid Thermal Processors.Compared with traditional RTP systems, Allwin21″s AccuThermo AW RTPs have innovative software and more advanced temperature control technologies to achieve the best rapid thermal processing performance ( repeatability , uniformity and Stability etc.).
For many years AG Associates was the dominant manufacturer of RTP systems. It was founded in 1981 and produced the first single wafer RTP system in 1982, the Heatpulse 210. In 1987, it produced the Heatpulse 610. These RTP systems run at atmospheric pressure and rely on a pre-process nitrogen or argon purge prior to wafer processing. They are still being used around the world in manufacturing, R&D and Universities. These RTP systems have a proven track record for reliability and simplicity.
Rapid thermal processing (or RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (up to 1200 C or greater) on a timescale of several seconds or less. The wafers must be brought down (temperature) slow enough however, so they do not break due to thermal shock..Such rapid heating rates are attained by high intensity lamps process. These processes are used for a wide variety of applications in semiconductor manufacturing including dopant activation, thermal oxidation, metal reflow and chemical vapor deposition.
Allwin21 Corp. is the exclusive licensed manufacturer of AG Associates Heatpulse 610 Rapid Thermal Processing equipment. Allwin21 is manufacturing the new AccuThermo AW Series Atmospheric Rapid Thermal Processors and Vacuum Rapid Thermo Processors.Compared with traditional RTP systems, Allwin21″s AccuThermo AW RTPs have innovative software and more advanced temperature control technologies to achieve the best rapid thermal processing performance ( repeatability , uniformity and Stability etc.).
For many years AG Associates was the dominant manufacturer of RTP systems. It was founded in 1981 and produced the first single wafer RTP system in 1982, the Heatpulse 210. In 1987, it produced the Heatpulse 610. These RTP systems run at atmospheric pressure and rely on a pre-process nitrogen or argon purge prior to wafer processing. They are still being used around the world in manufacturing, R&D and Universities. These RTP systems have a proven track record for reliability and simplicity.
Manufacturer: Allwin21 Corp. | Condition: New | Wafer Size: Small ~ 4 inch | Wafer loading: Manually | Type: Desktop, Atmospheric Rapid Thermal Processing System | Temperature: 100 ~ 800 °C or 450 ~ 1250 °C | Gas Lines: 1 ~ 6 lines with customized MFCs range
Manufacturer: Allwin21 Corp. | Condition: New | Wafer Size: Small ~ 6 inch | Wafer loading: Manually | Type: Desktop, Rapid Thermal Processing Equipment | Temperature: 100 ~ 800 °C or 450 ~ 1250 °C | Gas Lines: 1 ~ 6 lines with customized MFCs range
Manufacturer: Allwin21 Corp. | Condition: New | Wafer Size: Small ~ 8 inch | Wafer loading: Manually | Type: Desktop, Atmospheric Rapid Thermal Processing System | Temperature: 100 ~ 800 °C or 450 ~ 1250 °C | Gas Lines: 1 ~ 4 lines with customized MFCs range
Manufacturer: Allwin21 Corp. | Condition:New | Wafer Size:Small ~ 8 inch | Wafer loading:Manually | Type: Stand Alone, Atmospheric Rapid Thermal Process System | Temperature: 100 ~ 800 °C or 450 ~ 1250 °C | Gas Lines: 1 ~ 5 lines with customized MFCs range
Manufacturer: Allwin21 Corp. | Condition: New | Wafer Size: Small ~ 6 inch | Wafer loading: Manually | Type: Stand Alone, Vacuum Rapid Thermal Processor | Temperature: 100 ~ 800 °C or 450 ~ 1050 °C | Gas Lines: 1 ~ 3 lines with customized MFCs range
Manufacturer: Allwin21 Corp. | Condition: New | Wafer Size: Small ~ 8 inch | Wafer loading: Manually | Type: Stand Alone, Vacuum Rapid Thermal Processor | Temperature: 100 ~ 800 °C or 450 ~ 1250 °C | Gas Lines: 1 ~ 4 lines with customized MFCs range
Allwin21 Corp. also provide upgrade kit for original AG Associates Heatpulse 610I for much better performance.
Allwin21 Corp.is the exclusive licensed manufacturer of AG Associates Heatpulse 610 Rapid Thermal Processing equipment. Allwin21 is manufacturing the new AccuThermo AW Series Atmospheric Rapid Thermal Processors and Vacuum Rapid Thermal Processors.
Allwin21 Corp. also provide upgrade kit for original AG Associates Heatpulse 410 for much better performance. Upgraded AG Heatpulse 410 is a rapid thermal processor which uses high-intensity, visible radiation to heat single wafer for short periods at precisely controlled temperatures
Allwin21 Corp. also provide upgrade kit for original AG Associates Minipulse 310 for much better performance. AG Minipulse 310 is a rapid thermal processor
Allwin21 Corp. also provide upgrade kit for original AG Associates Heatpulse 210 for much better performance. Upgraded AG Heatpulse 210 is a rapid thermal processor which uses high-intensity, visible radiation to heat single wafer for short periods at precisely controlled temperatures.
