Product Description
Matrix 105 Process Module Parts List
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| Part Number | Description | Qty | |
| ***4 | 0101-0250 | ASSY,FILTERED THERMOCOUPLE | 1. EA |
| ***5 | 0990-32001 | TOROID, FERRITE L01. | 2 EA |
| ***5 | 0990-84094 | CONNECTOR,TC JACK 2 POS | 1. EA |
| ***5 | 0990-84095 | CONNECT0.R,TC PANEL MOUNT | 1 EA |
| ***5 | 0995-99722 | SENSOR, TEMPERATURE | 1 EA |
| ***4 | 0101-0385 | ASSY,ISOLATION VALVE | 1. EA |
| ***5 | 0990-84046 | CONNECTOR, 2 PIN 22 AWG | 1. EA |
| ***5 | 0990-85041 | COVER, 2 POS 1.00 MTA. | 1 EA |
| ***5 | 0994-70063 | FITTING, 1./2″ TUBE, 1/4 MPT | 2 EA |
| ***5 | 0995-16509 | VALVE, SOLENOID | 1 EA |
| ***4 | 0101-0401 | ASSY,ENDPOINT DETECTOR | 1 EA |
| ***4 | 0101-0450 | ASSY, DOOR POSITION SWITCH | 1 EA |
| ***5 | 0990-84001 | CONNECTOR, 6 PIN 22 AWG | 1 EA |
| ***5 | 0990-85093 | COVER, STRAIN RLF MTA 100-6 | 1 EA |
| ***5 | 0995-10006 | SENSOR, HALL EFFECT | 2 EA |
| ***4 | 0101-0501 | ASSY,HEATER CHUCK | 1. EA |
| ***5 | 0101-0244 | ASSY,HEATER BLOCK | 6 EA |
| ***5 | 0990-84044 | CONNECTOR, 6 PIN MALE | 1 EA |
| ***5 | 0992-40230 | BLOCK, HEATER POWER WIRING | 2 EA |
| ***5 | 0992-40287 | CHUCK, WAFER W/ REMOVABLE | 1 EA |
| ***5 | 0992-50005 | TUBING 1.8 AWG TEFLON | 1.9.2 IN |
| ***5 | 0992-50033 | INSULATOR, FIBERGLASS | 7 IN |
| ***5 | 0992-80159 | BRACKET, THERMOWELL MOUNT | 1 EA |
| ***5 | 0994-10153 | SCREW, 0-80 X i/16″ LONG | 26 EA |
| ***5 | 0995-99739 | THERMOSTAT, DIFFERENTIAL | 1 EA |
| ***5 | 0995-99740 | THERMOWELL, SURFACE MOUNT | 1 EA |
| ***4 | 0101-0510 | ASSEMBLY, RF FILTER BOX | 1 EA |
| ***5 | 0990-84043 | CONNECTOR, 6 PIN FEMALE | 1 EA |
| ***5 | 0990-84044 | CONNECTOR, 6 PIN MALE | 1 EA |
| ***5 | 0990-89003 | CONTACT, 1.6-1.8 AWG PIN | 5 EA |
| ***5 | 0990-89004 | CONTACT, 16-1.8 AWG SOCKET | .5EA |
| ***5 | 0990-99002 | FILTl3;R, lOA | 1 EA |
| ***5 | 0990-99006 | FILTER, 5A 1.25 VAC L | 2 EA |
| ***5 | 0990-80228 | BRACKET, MOUNT RF FILTERS | 1 EA |
| ***5 | 0990-80236 | BRACK~T, MOUNT RF FILTER | 1 EA |
| ***5 | 0993-00162 | ENCLOSURE, RF FILTERS | 1 EA |
| ***4 | 0992-10067 | WELDER ASSY,CHAMBER VAC. | 1 EA |
| ***4 | 0992-10005 | BELLLOWS AND HOUSING | 3 EA |
| ***4 | 0992-30025 | TUBING, 1/4″ COPPER | 30 IN |
| ***4 | 0992-30034 | COIL, RF OUTPUT INDUCTOR | 1 EA |
| ***4 | 0992-30035 | STRAP, GROUND | 3 EA |
| ***4 | 0992-40211 | STUD, THREADED CHUCK MTG. | 3 EA |
| ***4 | 0992-40248 | CLAMP, BLOCK BTM ~OMETER | 1 EA |
| ***4 | 0992-40263 | CLAMP, INSULATED REACTOR | 4 EA |
| ***4 | 0992-40265 | Bl\SEPLATE, WATER-COOLED | 1 EA |
| ***4 | 0992-40266 | CHAMBER, 6″‘INSULATED | 1 EA |
| ***4 | 0992-40283 | BELLOWS HOUSING | 3 EA |
| ***4 | 0992-40286 | RING, QUA,RTZ BAFFLE MTG. | 1 EA |
| ***4 | 0992-40288 | BLOCK, REACTOR LOCATING | 1 EA |
| ***4 | 0992-40293 | CLEVIS, CYLINDEa | 1 EA |
| ***4 | 0992-40363 | CLEVIS, DOOR WITH SENSOR | 1 EA |
| ***4 | 0992-40375 | ELECTRODE, FULL M~SH GROUND | 1 EA |
| ***4 | 0992–50002 | TUBING, 1/4″ ob V.~LIN | 32 IN |
| ***4 | 0992-50037 | CA~, BELLOWS HOUSING | 3 E:A |
| ***4 | 0992-60038 | RING,QUARTZ CHAMBER HOLD | 1 EA |
| ***4 | 0992-60039 | RETAINER f. UPPER REACTOR | 8 EA |
| ***4 | 0992-60092 | PINiWAFER RETAINER | 4·El\ |
| ***4 | 0992-60094 | RING/INSULATOR | 1 EA- |
| ***4 | 0992-60095 | BUSHINGFCHUC:K FASTENER | 6 EA |
| ***4 | 0992-60103 | INSULATOR, WAFER CHUCK | 1 EA |
| ***4 | 0992-60120 | CLAMP, GAUGE | 1 EA |
| ***4 | 0992-60126 | INSULATOR, LOWER, REACTOR | 1 EA |
| ***4 | 0992-60129 | IN’sULATOR, 1 REACTOR CLAMP | 1 EA |
| ***4 | 0992-60133 | INSUL..1;;TOR,,· DOOR. | 1 EA |
| ***4 | 0992-60135 | PIN, WAFER LIFTn;tc’.; SS BELLOWS | 3 EA·’ |
| ***4 | 0992-60147 | CHAMBER, QUARTZ W/DIFF– USER | 1 EA |
| ***4 | 0992-60148 | BAFFLE, QUARTZ, 1/2 it HOLES | 1 EA |
| ***4 | 0992-60161 | INStJliATb~, BELLOWS HOUSING | 3 EA |
| ***4 | 0992-70038 | SHIELD, END PC>l:NT SENSOR | 1 EA |
| ***4 | 0992-70051 | EL.ECTRODE,POSITIVE | 1 EA |
| ***4 | 0992-70221 | SHIELD, bOOR MOTOROLA | 1 EA |
| ***4 | 0992-80169 | BRACKET, GAUGE BLOCK | 1 EA |
| ***4 | 0992-80185 | BRKT, ENDPOINT SENSOR | 1 EA |
| ***4 | 0993-00107 | COVER, THERMOSTAT MPD • | 1 EA |
| ***4 | 0993-00135 | SIIIELD, ENDPOINT HEAT | 1 EA |
| ***4 | 0993-10053 | LABEL “CAUTION lfOT Elb’RFACE” | 1 EA |
| ***4 | 0993-20156 | PLA’r’E ~ TH$:RMOS.TAiJ;i COVER | 1 EA |
| ***4 | 0993-20176 | PLATE., DOOR | 1 EA |
| ***4 | 0993-20177 | DOOR, CHAMBER | 1 EA |
| ***4 | 0993-20178 | PLATE, HINGE | 1 EA |
| ***4 | 0993-30009 | SHAFT, PRCN .18 DIA x 1.25 LG | 1 EA· |
| ***4 | 0993-40021 | HINGEFCHAMBER | 1 EA |
| ***4 | 0993-40024 | PIN,CHAMBER HINGE | 2 EA |
| ***4 | 0993-40086 | STAND-OFF, PIN CYLINDERS | 3 EA |
| ***4 | 0993-40088 | PIN STAGING BLOCK | 1 EA |
| ***4 | 0993-40109 | PUMP RING | 1 EA |
| ***4 | 0993-50013 | LATCH,RF SHIELD | 2 EA |
| ***4 | 0993-50033 | HINGE, BLOCK INSULATED | 1 EA |
| ***4 | 0993-50035 | HINGE, BLOCK INSULATED | 1 EA |
| ***4 | 0993-50043 | RETAINER, SPRING BELLOWS | 3 EA |
| ***4 | 0993-50045 | E.;.,.RING, 094 SHAFT EXTERNAL | 3 EA |
| ***4 | 0993-50044 | RETAINER, -PIN· — | 1 EA |
| ***4 | 0993-60003 | SPRING, DOOR | 4 EA |
| ***4 | 0993-60004 | SPRING, COMPRESSION | 3 EA |
| ***4 | 0994-10087 | SCREW, 1/4″X3/16″ SKT | 4 EA |
| ***4 | 0994-10215 | SCREW, 10″‘-32 X .375.SHIELD | 3 EA |
| ***4 | 0994-10221 | SCREW, 1/4-20 X 3 1/2″ BLK | 4 EA |
| ***4 | 0994-60005 | O-RING, DOOR RED SILICONE | 1 EA |
| ***4 | 0994-60006 | O-RING,ANODIZED CHAMBER | 2 EA |
| ***4 | 0994-60007 | O”‘-RING,QUARTZ CHAMBER RED | 1 EA |
| ***4 | 0994-60017 | GASKET, CHUCK HOLDDOWN | 1 EA |
| ***4 | 0994-60019 | O-RING, VACUUM VALVE | 1 EA |
| ***4 | 0994-60050 | O-RING, CHUCK SEAL | 1 EA |
| ***4 | 0994-60055 | O-RING,P-7 WHITE SILICON | 3 EA |
| ***4 | 0994-60062 | O-RING, KALREZ, | 3 EA |
| ***4 | 0994-60063 | O-RING, KALREZ, | 1 EA |
| ***4 | 0994-60086 | O-RING, BELLOWS HOUSING CAP | 3 EA |
| ***4 | 0994-70002 | FITTING, 1/4′ BULKHEAD | 1 EA |
| ***4 | 0994-70105 | FTT.T.ING, UNION 1/4 IU | 2 EA |
| ***4 | 0994-70158 | FITTING, FERRULLESS 1/8″ NPT | 4 EA |
| ***4 | 0994-70184 | FITTING, ELBOW ULTRATORR 1/4″ | 1 EA |
| ***4 | 0995-10597 | CYLINDER, PANCAKE. | 1 EA |
| ***4 | 0995-99711 | T~SPUC~R,PRESSURE | 1 EA |
| ***4 | 0995-99723 | ADAPTOR, THERMOCOUPLE | 1 EA |
| ***4 | 0995-99765 | CLAMP, CONSTANT TORQUE | 2 EA |
| ***4 | 0995-99777 | CYLINDER, DOUBLE ACTING | 1 EA |
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Please contact us if you need Matrix 105 Spare Parts. Allwin21 Corp. has been focusing on providing solutions and enhancements to Matrix 105, Matrix 205 used plasma Asher Descum semiconductor process equipment and Matrix 303,Matrix 403 used plasma Etch semiconductor processequipment. These OEM semiconductor equipment have been used in productions and R&D since 1990′s. They have been proven to be a true “work horse”. Allwin21 Corp. can customize these OEM systems with Allwin21′s comparable integrated process control system with PC, solid robotic wafer transfer system and new critical components to achieve the goal of giving our customers a production edge with right cost.
Matrix 105 Plasma Asher Descum
Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 2″/3″/4″/5″/6″Capability | Wafer loading: Automatic, Original Brooks Orbitran® System-Frog Robot | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process,Stand Alone | Gas Lines: 1 ~ 2 lines capability with customized MFCs range
Matrix 205 Plasma Asher Descum
Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 2″/3″/4″/5″/6″Capability | Wafer loading: Automatic, Original Brooks Orbitran® System-Frog Robot | Plasma Power: RF,13.56MHz | Type: Parallel/Single Wafer Process,Through The Wall(TTW) | Gas Lines: 1 ~ 2 lines capability with customized MFCs range
Matrix 303 Plasma Etch
Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 3″4″/5″/6″Capability | Wafer loading: Automatic,Original Brooks Orbitran® System-Frog Robot | Plasma Power: RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/Stand Alone | Etch Materials: Nitride,Silicon Dioxide | Gas Lines: 1~3lines capability with customized MFCs range
Matrix 403 Plasma Etch
Manufacturer: Matrix | Condition: Fully Refurbished and Upgraded by Allwin21 | Wafer Size: 3″/4″/5″/6″Capability | Wafer loading:Automatic, Original Brooks Orbitran® System-Frog Robot | Plasma Power:RF,13.56MHz | Type:Parallel/Single Wafer Process/Plasma Etch/Through The Wall(TTW) | Etch Materials: Nitride,Silicon Dioxide | Gas Lines: 1 ~ 3lines capability with customized MFCs range
Matrix 10X 205 X03
The Upgrade kit for Matrix® 105, Matrix® 106 includes an advanced AW-105 System Control with touch screen operator interface or 17″ LCD Monitor , New PC with Allwin21 AW-105 software ,new main control board.
